1 44 48 6909 kaiho dummy 2 2009/5/1/19:59:28(130.34.95.37) Pt 2 0 12 6909 kaiho dummy 0 2009/5/1/19:59:44(130.34.95.37) Pt 11 20 34 6937 JW Lee dummy 2 2009/5/7/13:45:47(172.16.44.131) Ge 12 20 34 6937 JW Lee dummy 0 2009/5/7/13:46:18(172.16.44.131) Pt -8 34 48 6909 kaiho dummy 2 2009/5/8/14:16:33(130.34.95.37) Al 2009/5/8/22:11:20(172.16.44.146) 10 36 48 6909 kaiho dummy 0 2009/5/8/16:30:16(172.16.44.146) Pt 8 34 47 6909 kaiho dummy 2 2009/5/8/14:16:33(130.34.95.37) Al 10 34 36 6909 kaiho dummy 0 2009/5/10/17:11:58(172.16.44.145) Pt 12 34 48 6909 meshida dummy 0 2009/5/11/11:10:37(172.16.44.145) Ta/Cu 13 0 24 6909 meshida dummy 0 2009/5/11/11:11:13(172.16.44.145) Ta/Cu 13 32 44 7281 takano dummy 0 2009/5/11/21:13:44(130.34.77.72) SiO2 13 24 32 6937 jw lee dummy 0 2009/5/12/10:7:42(172.16.44.146) 0 14 20 30 7122 kuroki dummy 0 2009/5/12/10:23:23(130.34.198.5) Cu 15 16 32 6908 konno dummy 0 2009/5/12/12:18:24(172.16.44.146) SiO2 -15 32 46 6937 JW Lee dummy 0 2009/5/12/14:14:37(172.16.44.131) 0 2009/5/13/23:52:49(172.16.44.131) 14 8 10 6936 kawaguchi dummy 0 2009/5/13/18:48:55(130.34.95.43) Cuはずす -14 18 20 6936 kawaguchi dummy 2 2009/5/13/18:49:29(130.34.95.43) Cuつける 2009/5/14/6:26:30(172.16.44.171) -14 30 45 6937 jw Lee dummy 0 2009/5/13/23:52:30(172.16.44.131) 0 2009/5/14/15:36:43(172.16.44.146) 14 10 20 6936 kawaguchi dummy 0 2009/5/14/6:26:52(172.16.44.171) Cu/TI -14 45 48 6936 kawaguchi dummy 0 2009/5/14/6:27:26(172.16.44.171) Cu/Ti 2009/5/14/19:18:18(130.34.95.43) -15 0 16 6936 kawaguchi dummy 0 2009/5/14/6:27:55(172.16.44.171) Cu/Ti 2009/5/14/19:18:28(130.34.95.43) 14 30 34 6937 jw Lee dummy 0 2009/5/13/23:52:30(172.16.44.131) 0 -15 32 46 6936 kawaguchi dummy 0 2009/5/14/19:18:1(130.34.95.43) Ti/Cu 2009/5/15/17:55:33(130.34.95.43) -15 46 48 6936 kawaguchi dummy 0 2009/5/15/10:8:4(130.34.95.43) Cu/Ti 2009/5/15/17:55:46(130.34.95.43) -16 28 42 6936 kawaguchi dummy 0 2009/5/15/12:35:11(130.34.95.43) Cu/Ti 2009/5/15/17:56:0(130.34.95.43) 21 26 30 6968 narumi dummy 0 2009/5/15/16:27:15(130.34.88.130) 使用方法説明のため 15 32 38 6936 kawaguchi dummy 0 2009/5/14/19:18:1(130.34.95.43) Ti/Cu 16 20 34 6936 kawaguchi dummy 0 2009/5/15/17:56:41(130.34.95.43) Cu/Ti -18 46 48 6908 Ohara Yuki dummy 0 2009/5/16/13:36:43(130.34.95.37) 0 2009/5/16/13:36:48(130.34.95.37) 18 46 48 6908 Ohara Yuki dummy 0 2009/5/16/13:37:15(130.34.95.37) Ta/Cu 18 42 46 6908 Ohara Yuki dummy 2 2009/5/16/13:37:49(130.34.95.37) Ti >>> Ta 19 0 20 6908 Ohara Yuki dummy 0 2009/5/16/13:38:39(130.34.95.37) Ta/Cu 17 23 34 6936 kawaguchi dummy 0 2009/5/17/11:31:20(172.16.44.171) Cu/Ti -18 18 30 6936 kawaguchi dummy 0 2009/5/17/15:39:56(130.34.95.43) Cu/Ti 2009/5/18/12:56:25(130.34.95.43) 18 2 12 7046 kuroda dummy 2 2009/5/17/23:58:25(130.34.192.103) Al 19 22 34 4771 hojo dummy 0 2009/5/18/12:6:5(130.34.89.162) Al 18 18 28 6936 kawaguchi dummy 0 2009/5/17/15:39:56(130.34.95.43) Cu/Ti -18 32 42 6937 kawaguchi dummy 0 2009/5/18/12:56:59(130.34.95.43) Cu/Ti 2009/5/18/13:5:8(130.34.95.43) -19 34 48 6936 kawaguchi dummy 0 2009/5/18/13:5:27(130.34.95.43) Cu/Ti 2009/5/19/13:40:55(130.34.95.43) -20 0 12 6909 kaiho dummy 0 2009/5/18/15:39:41(130.34.95.37) Al 2009/5/19/19:39:5(130.34.95.37) -20 34 48 6909 meshida dummy 0 2009/5/18/18:16:19(130.34.95.37) Ta/Cu 2009/5/20/15:15:59(130.34.95.37) -21 0 26 6909 meshida dummy 0 2009/5/18/18:16:45(130.34.95.37) Ta/Cu 2009/5/20/15:16:5(130.34.95.37) -20 18 34 6908 noriki dummy 2 2009/5/18/22:17:9(172.16.44.145) Cu/Ta 2009/5/20/2:2:53(130.34.95.37) 19 20 22 6908 Ohara Yuki dummy 0 2009/5/19/6:28:18(172.16.44.146) 0 -21 30 42 6936 kawaguchi dummy 0 2009/5/19/8:23:41(130.34.95.43) 0 2009/5/19/8:23:51(130.34.95.43) 21 30 42 6936 kawaguchi dummy 0 2009/5/19/8:24:8(130.34.95.43) Cu/Ti 21 42 48 6908 noriki dummy 2 2009/5/20/2:3:19(130.34.95.37) Cu/Ta 22 0 12 6908 noriki dummy 0 2009/5/20/2:3:41(130.34.95.37) 0 -26 20 34 6908 konno dummy 0 2009/5/20/7:13:54(130.34.95.37) SiO2 2009/5/25/7:9:47(130.34.95.37) -26 16 20 6908 konno dummy 2 2009/5/20/7:14:22(130.34.95.37) SiO2 2009/5/21/14:37:26(172.16.44.171) -26 34 36 4830 kishi dummy 2 2009/5/20/12:4:46(130.34.95.30) W 2009/5/20/16:18:5(130.34.95.30) -26 36 48 4830 kishi dummy 0 2009/5/20/12:5:18(130.34.95.30) W 2009/5/20/16:18:9(130.34.95.30) -25 28 42 6937 JW Lee dummy 0 2009/5/20/14:32:57(172.16.44.131) 0 2009/5/25/14:5:26(172.16.44.146) -28 28 42 6937 JW Lee dummy 0 2009/5/20/14:33:22(172.16.44.131) 0 2009/5/26/21:20:51(172.16.44.146) -26 40 42 4830 kishi dummy 2 2009/5/20/16:50:26(130.34.95.30) W 2009/5/20/16:51:53(130.34.95.30) -26 42 48 4830 kishi dummy 0 2009/5/20/16:51:7(130.34.95.30) W 2009/5/20/16:51:42(130.34.95.30) -27 16 18 6908 konno dummy 2 2009/5/21/14:36:36(172.16.44.171) SiO2 2009/5/21/14:37:10(172.16.44.171) -27 18 32 6908 konno dummy 0 2009/5/21/14:36:54(172.16.44.171) SiO2 2009/5/21/14:37:58(172.16.44.171) -26 16 20 6908 konno dummy 2 2009/5/21/15:7:22(172.16.44.146) 0 2009/5/25/7:9:41(130.34.95.37) -22 30 39 6965 wang dummy 0 2009/5/22/10:15:0(130.34.95.31) al 2009/5/22/15:11:26(130.34.95.31) 22 30 33 6965 wang dummy 0 2009/5/22/10:15:0(130.34.95.31) al -27 16 20 6908 konno dummy 2 2009/5/25/7:10:14(130.34.95.37) SiO2 2009/5/26/8:57:26(172.16.44.171) -27 20 32 6908 konno dummy 0 2009/5/25/7:10:42(130.34.95.37) SiO2 2009/5/26/8:57:32(172.16.44.171) 25 28 31 6937 JW Lee dummy 0 2009/5/20/14:32:57(172.16.44.131) 0 -26 40 46 6937 T. Matsumura dummy 0 2009/5/26/9:25:38(130.34.95.43) Al 2009/5/26/21:24:49(130.34.95.43) -26 46 48 6937 T. Matsumura dummy 0 2009/5/26/19:48:28(130.34.95.43) Al 2009/5/26/21:24:55(130.34.95.43) 26 40 45 6937 T. Matsumura dummy 0 2009/5/26/9:25:38(130.34.95.43) Al -27 36 48 7046 kuroda dummy 2 2009/5/27/16:13:52(130.34.192.103) Ti 2009/5/27/18:18:7(172.16.44.146) 28 0 18 6937 Hoeppner dummy 0 2009/5/27/17:7:37(130.34.95.43) Cu 27 36 39 7046 kuroda dummy 2 2009/5/27/16:13:52(130.34.192.103) Ti 28 26 30 6968 narumi dummy 0 2009/5/27/18:59:19(130.34.88.130) メンテナンス -28 18 26 6937 Hoeppner dummy 0 2009/5/28/0:10:28(130.34.95.43) Cr 2009/5/28/0:35:43(130.34.95.43) -29 18 30 6937 matsuzaki dummy 0 2009/5/28/14:0:52(130.34.95.43) 0 2009/5/29/8:17:37(130.34.95.43) 28 38 42 5810 shiufang dummy 0 2009/5/28/15:3:12(130.34.95.49) 0 29 16 18 4771 hojo dummy 0 2009/5/28/17:36:45(130.34.89.162) Al target change 29 18 19 6937 matsuzaki dummy 0 2009/5/28/14:0:52(130.34.95.43) 0