2	14	16	4830	kishi	dummy	2	2009/3/30/17:21:31(130.34.95.30)	Cu>W
2	16	25	4830	kishi	dummy	0	2009/3/30/17:22:10(130.34.95.30)	W
2	25	27	4830	kishi	dummy	2	2009/3/30/17:22:27(130.34.95.30)	W>Cu
1	18	36	6909	meshida	dummy	0	2009/3/30/17:42:13(172.16.44.146)	Ta/Cu
1	36	38	6909	meshida	dummy	0	2009/4/1/17:17:11(130.34.95.37)	0
2	27	29	4830	kishi	dummy	0	2009/4/2/6:51:3(130.34.95.30)	0
3	28	42	6909	kaiho	dummy	2	2009/4/2/21:24:36(130.34.95.37)	Pt
6	20	32	6937	JW Lee	dummy	2	2009/4/3/16:12:23(172.16.44.131)	Cu-->Ge
-7	20	32	6937	JW Lee	dummy	0	2009/4/3/16:13:1(172.16.44.131)	Pt	2009/4/4/13:51:41(130.34.95.43)
6	32	36	6937	jw lee	dummy	0	2009/4/4/13:49:52(130.34.95.43)	ge
-7	17	29	6937	jw lee	dummy	0	2009/4/4/13:52:0(130.34.95.43)	Pt	2009/4/6/10:29:3(172.16.44.146)
-7	18	22	6937	林(NIKKO)	dummy	2	2009/4/6/10:33:58(130.34.95.43)	Ptをシバウラ2号機へ	2009/4/6/10:34:34(130.34.95.43)
-7	18	22	6937	林(NIKKO)	dummy	2	2009/4/6/10:35:13(130.34.95.43)	Ptをシバウラ2号機で使用(21時まで)	2009/4/7/8:48:42(130.34.95.43)
6	36	46	6937	JW Lee	dummy	0	2009/4/6/13:14:20(172.16.44.131)	Pt
6	46	48	6909	takeshita	dummy	2	2009/4/6/23:6:30(172.16.44.145)	Pt→Al
7	26	36	6909	takeshita	dummy	0	2009/4/6/23:8:25(172.16.44.145)	Al
7	18	20	6937	林(NIKKO)	dummy	2	2009/4/6/10:35:13(130.34.95.43)	Ptをシバウラ2号機で使用(21時まで)
9	20	35	6937	JW Lee	dummy	2	2009/4/7/11:5:47(172.16.44.131)	Ta-->Pt
7	36	44	6909	kaiho	dummy	0	2009/4/7/16:27:44(130.34.95.37)	Al
8	24	26	4830	kishi	dummy	2	2009/4/7/17:57:43(130.34.95.30)	Cu>W
8	26	35	4830	kishi	dummy	0	2009/4/7/17:58:13(130.34.95.30)	W
8	35	37	4830	kishi	dummy	2	2009/4/7/17:58:35(130.34.95.30)	W>Cu
8	37	39	4830	kishi	dummy	0	2009/4/8/11:55:42(130.34.95.30)	W
9	37	43	7046	kuroda	dummy	0	2009/4/9/23:6:41(130.34.192.103)	Al
-11	6	24	6908	noriki	dummy	2	2009/4/9/23:41:3(130.34.95.37)	Ta/Cu	2009/4/10/1:19:46(130.34.95.37)
-11	0	18	6908	noriki	dummy	2	2009/4/10/1:20:15(130.34.95.37)	Ta/Cu	2009/4/10/22:8:36(172.16.44.146)
-10	36	48	6908	ohara	dummy	2	2009/4/10/1:21:7(130.34.95.37)	Cu	2009/4/10/15:4:57(130.34.95.37)
10	21	34	4404	hyunjae	dummy	0	2009/4/10/9:29:30(130.34.248.198)	SIO2
-10	37	46	7046	kuroda	dummy	0	2009/4/10/16:40:56(172.16.44.146)	Al	2009/4/10/17:46:55(172.16.44.146)
10	37	38	7046	kuroda	dummy	0	2009/4/10/16:40:56(172.16.44.146)	Al
-11	18	24	6908	noriki	dummy	0	2009/4/10/20:57:10(172.16.44.146)	0	2009/4/10/22:8:40(172.16.44.146)
-11	45	47	6908	noriki	dummy	2	2009/4/10/22:7:51(172.16.44.146)	ta/cu	2009/4/10/22:8:29(172.16.44.146)
10	45	47	6908	noriki	dummy	2	2009/4/10/22:8:22(172.16.44.146)	cu/ta
-11	12	30	6908	noriki	dummy	0	2009/4/10/22:9:55(172.16.44.146)	0	2009/4/11/10:40:41(130.34.95.37)
11	12	24	6908	noriki	dummy	0	2009/4/10/22:9:55(172.16.44.146)	0
11	26	42	6908	ohara	dummy	0	2009/4/11/10:41:16(130.34.95.37)	Cu
12	22	34	6937	matsuzaki	dummy	0	2009/4/12/10:17:19(130.34.95.43)	0
-13	36	48	6909	meshida	dummy	0	2009/4/13/13:24:38(130.34.95.37)	Ta/Cu	2009/4/13/13:27:58(130.34.95.37)
14	0	26	6909	meshida	dummy	0	2009/4/13/13:25:4(130.34.95.37)	Ta/Cu
13	34	48	6909	meshida	dummy	0	2009/4/13/13:28:18(130.34.95.37)	Ta/Cu
14	36	48	4404	Hyunjae Lee	dummy	0	2009/4/14/1:56:49(130.34.248.131)	SiO2 deposition
14	26	28	6909	meshida	dummy	0	2009/4/14/12:39:44(172.16.44.145)	0
15	42	48	6909	kaiho	dummy	2	2009/4/14/20:46:28(172.16.44.145)	Pt
-16	0	6	6909	kaiho	dummy	0	2009/4/14/20:46:48(172.16.44.145)	Pt	2009/4/14/21:0:42(172.16.44.145)
16	20	30	6909	takeshita	dummy	0	2009/4/14/21:0:28(172.16.44.145)	Al
16	0	6	6909	kaiho	dummy	2	2009/4/14/21:1:1(172.16.44.145)	Pt,Al
-16	30	38	4249	abe	dummy	0	2009/4/15/18:22:39(130.34.95.17)	Au/Cr	2009/4/15/18:23:1(130.34.95.17)
17	36	48	4404	Hyunjae Lee	dummy	0	2009/4/15/19:24:3(130.34.248.131)	SiO2
16	30	32	6909	takeshita	dummy	0	2009/4/16/15:4:56(130.34.95.37)	0
17	26	36	6909	kaiho	dummy	0	2009/4/17/3:57:26(130.34.95.37)	Al
18	0	4	6937	kim	dummy	2	2009/4/17/19:18:36(172.16.44.146)	Pt取出し
-20	24	36	6937	JW Lee	dummy	0	2009/4/18/13:3:8(172.16.44.131)	Ge	2009/4/20/10:3:4(172.16.44.131)
19	37	45	4404	Hyunjae Lee	dummy	0	2009/4/19/18:10:21(130.34.248.198)	SiO2 deposition
-21	16	32	6908	konno	dummy	0	2009/4/20/16:13:13(130.34.95.37)	Al	2009/4/21/14:17:54(172.16.44.145)
22	17	29	6908	konno	dummy	0	2009/4/21/7:2:47(130.34.95.37)	SiO2
21	16	31	6908	konno	dummy	0	2009/4/20/16:13:13(130.34.95.37)	Al
22	36	46	6937	makihata	dummy	0	2009/4/21/22:11:36(130.34.95.43)	0
-24	20	34	6908	konno	dummy	0	2009/4/22/8:56:22(172.16.44.146)	SiO2	2009/4/23/11:56:40(172.16.44.145)
-23	28	40	5810	Y.M.LEE	dummy	0	2009/4/22/15:29:3(130.34.95.49)	Al	2009/4/23/10:24:45(130.34.95.49)
-24	36	48	6909	takeshita	dummy	2	2009/4/22/20:25:52(130.34.95.37)	Ta/Cu	2009/4/22/20:55:0(130.34.95.37)
23	44	48	6909	takeshita	dummy	2	2009/4/22/20:55:21(130.34.95.37)	Ta/Cu
24	0	12	6909	takeshita	dummy	0	2009/4/22/20:55:43(130.34.95.37)	0
24	16	30	6908	konno	dummy	0	2009/4/23/11:57:9(172.16.44.145)	SiO2
-24	30	32	4830	kishi	dummy	0	2009/4/23/13:57:16(130.34.95.30)	Al>W	2009/4/23/13:58:47(130.34.95.30)
-24	32	42	4830	kishi	dummy	0	2009/4/23/13:57:43(130.34.95.30)	W	2009/4/23/14:50:43(172.16.44.146)
-24	42	44	4830	kishi	dummy	2	2009/4/23/13:58:42(130.34.95.30)	W>Al	2009/4/23/14:50:55(172.16.44.146)
-24	30	32	4830	kishi	dummy	2	2009/4/23/13:59:10(130.34.95.30)	Al>W	2009/4/23/14:50:38(172.16.44.146)
23	30	32	4830	kishi	dummy	2	2009/4/23/14:49:45(172.16.44.146)	Al>W
23	32	42	4830	kishi	dummy	0	2009/4/23/14:50:33(172.16.44.146)	W
-24	32	48	6908	Ohara Yuki	dummy	0	2009/4/23/21:50:48(172.16.44.145)	0	2009/4/23/21:50:51(172.16.44.145)
24	32	48	6908	Ohara Yuki	dummy	0	2009/4/23/21:51:13(172.16.44.145)	Ta/Cu
25	0	4	6908	Ohara Yuki	dummy	0	2009/4/23/21:51:46(172.16.44.145)	Ta/Cu
-25	20	32	5810	Y.M.LEE	dummy	0	2009/4/24/10:28:38(130.34.95.49)	0	2009/4/24/10:28:59(130.34.95.49)
-25	20	32	5810	Y.M.LEE	dummy	2	2009/4/24/10:29:36(130.34.95.49)	Al	2009/4/25/13:20:43(130.34.95.49)
-25	32	40	7046	kuroda	dummy	0	2009/4/24/12:52:6(130.34.192.103)	Al	2009/4/25/11:41:12(130.34.192.103)
-27	20	36	6908	konno	dummy	0	2009/4/24/14:53:52(172.16.44.146)	SiO2	2009/4/27/14:16:3(172.16.44.171)
-25	4	8	6908	Ohara 	dummy	0	2009/4/24/21:42:41(172.16.44.146)	0	2009/4/24/21:42:52(172.16.44.146)
25	4	8	6908	Ohara yuki	dummy	0	2009/4/24/21:43:13(172.16.44.146)	Ta/Cu
25	20	29	5810	Y.M.LEE	dummy	2	2009/4/24/10:29:36(130.34.95.49)	Al
27	20	31	6908	konno	dummy	0	2009/4/24/14:53:52(172.16.44.146)	SiO2
27	32	44	5810	Y.M.LEE	dummy	0	2009/4/27/15:47:28(130.34.95.43)	Al
27	44	48	5810	Y.M.LEE	dummy	0	2009/4/27/17:54:57(130.34.95.43)	0
28	30	46	6937	jw lee	dummy	2	2009/4/28/12:30:47(172.16.44.131)	pt
28	46	48	6909	kaiho	dummy	0	2009/4/28/15:52:10(172.16.44.146)	Al
29	0	8	6909	kaiho	dummy	0	2009/4/28/15:52:25(172.16.44.146)	Al
-29	20	32	4771	PHAN	dummy	0	2009/4/28/19:31:39(130.34.89.162)	0	2009/4/28/19:32:13(130.34.89.162)
-29	20	32	4771	PHAN	dummy	0	2009/4/28/19:32:39(130.34.89.162)	Al	2009/4/28/19:33:8(130.34.89.162)
29	20	32	4771	PHAN	dummy	2	2009/4/28/19:33:50(130.34.89.162)	SiO2
-30	20	34	6937	jw Lee	dummy	0	2009/4/28/21:7:47(172.16.44.146)	Ge	2009/4/30/10:38:25(172.16.44.131)
29	32	44	6908	noriki	dummy	2	2009/4/29/2:13:44(130.34.95.37)	Ta/Cu
-30	34	46	4771	PHAN	dummy	0	2009/4/29/17:6:28(130.34.89.162)	SiO2	2009/4/30/11:18:57(130.34.89.162)
29	44	48	6909	noriki	dummy	0	2009/4/29/22:14:30(172.16.44.171)	0
30	0	4	6908	noriki	dummy	0	2009/4/29/23:48:44(172.16.44.146)	0
30	20	24	6937	jw Lee	dummy	0	2009/4/28/21:7:47(172.16.44.146)	Ge