2	18	36	6909	meshida	dummy	0	2009/2/26/16:28:19(172.16.44.146)	Cu
3	20	34	6937	JW Lee	dummy	0	2009/2/27/18:41:55(172.16.44.131)	Ge sputtering
-3	34	40	6937	JW Lee	dummy	0	2009/2/27/18:58:44(172.16.44.131)	0	2009/3/3/17:13:11(172.16.44.131)
2	36	44	6936	kawaguchi	dummy	0	2009/3/2/16:12:8(130.34.95.43)	Cu/Ti
2	44	46	6936	kawaguchi	dummy	0	2009/3/2/17:58:52(130.34.95.43)	Cu/Ti
3	3	20	6936	tomono	dummy	2	2009/3/3/1:42:25(130.34.95.43)	Al
3	46	48	6936	honjoya	dummy	0	2009/3/3/10:57:8(172.16.44.146)	Ti/SiO2
4	0	14	6936	honjoya	dummy	0	2009/3/3/10:58:23(172.16.44.146)	Ti/SiO2
-4	18	34	6909	satou	dummy	2	2009/3/3/13:25:11(130.34.95.37)	Ta/Cu	2009/3/3/13:26:50(130.34.95.37)
4	30	48	6909	SATOU	dummy	2	2009/3/3/13:27:7(130.34.95.37)	Ta/Cu
4	14	30	6936	kawaguchi	dummy	0	2009/3/3/14:49:31(130.34.95.43)	Ti/Cu
3	34	37	6937	JW Lee	dummy	0	2009/2/27/18:58:44(172.16.44.131)	0
3	43	46	6937	honjoya	dummy	0	2009/3/3/20:5:22(130.34.95.43)	Ti/SiO2
-6	28	36	4404	Hyunjae Lee	dummy	0	2009/3/3/23:21:52(130.34.248.209)	SiO2	2009/3/5/2:3:56(130.34.248.209)
-5	0	14	6936	kawaguchi	dummy	0	2009/3/4/4:30:42(130.34.95.43)	Ti/Cu	2009/3/4/23:25:27(130.34.95.43)
-5	8	24	6936	kawaguchi	dummy	0	2009/3/4/23:26:8(130.34.95.43)	Ti/Cu	2009/3/5/3:52:30(130.34.95.43)
-5	30	36	4404	Hyunjae Lee	dummy	0	2009/3/5/2:3:46(130.34.248.209)	SiO2 deposition	2009/3/5/9:52:35(130.34.248.209)
5	8	10	6936	kawaguchi	dummy	0	2009/3/4/23:26:8(130.34.95.43)	Ti/Cu
-5	12	28	6936	kawaguchi	dummy	0	2009/3/5/3:52:54(130.34.95.43)	Cu/Ti	2009/3/5/8:56:2(130.34.95.43)
5	12	20	6936	kawaguchi	dummy	0	2009/3/5/3:52:54(130.34.95.43)	Cu/Ti
-6	18	36	6909	meshida	dummy	0	2009/3/5/9:55:26(172.16.44.145)	0	2009/3/5/9:55:37(172.16.44.145)
-6	18	36	6909	meshida	dummy	0	2009/3/5/9:56:18(172.16.44.145)	Cu	2009/3/5/9:57:47(172.16.44.145)
6	18	36	6909	meshida	dummy	0	2009/3/5/13:31:8(172.16.44.145)	Cu
6	0	14	6936	kawaguchi	dummy	0	2009/3/5/18:23:18(130.34.95.43)	Cu/Ti
6	36	48	6936	kawaguchi	dummy	0	2009/3/5/18:23:56(130.34.95.43)	Cu/TI
6	14	18	6936	kawaguchi	dummy	0	2009/3/6/2:32:39(130.34.95.43)	0
-7	0	18	6936	kawaguchi	dummy	0	2009/3/6/10:1:43(130.34.95.43)	Cu/TI	2009/3/6/21:44:48(130.34.95.43)
7	12	26	6936	kawaguchi	dummy	0	2009/3/6/21:45:13(130.34.95.43)	Cu/Ti
7	0	6	6936	kawaguchi	dummy	0	2009/3/7/0:54:20(130.34.95.43)	0
9	0	10	6936	kawaguchi	dummy	0	2009/3/8/20:56:18(130.34.95.43)	0
-11	20	34	6937	Y.M.LEE	dummy	2	2009/3/9/14:37:38(130.34.95.43)	3->Al	2009/3/10/9:43:36(130.34.95.43)
10	24	36	6937	Hoeppner	dummy	0	2009/3/10/0:5:21(130.34.95.43)	Cu
11	28	42	6937	Y.M.LEE	dummy	2	2009/3/10/9:44:26(130.34.95.43)	Al
-12	18	34	6908	konno	dummy	0	2009/3/10/15:54:43(130.34.95.37)	Ti	2009/3/12/15:16:48(172.16.44.171)
10	36	48	6936	h.miyashita	dummy	2	2009/3/10/17:3:10(172.16.44.145)	Al
11	18	28	6937	makihata	dummy	0	2009/3/11/9:17:57(130.34.95.43)	0
12	34	48	6937	makihata	dummy	0	2009/3/11/9:19:3(130.34.95.43)	Cr/Au/Etching
13	18	26	6937	kumagae	dummy	0	2009/3/11/13:58:57(130.34.95.43)	Ti
-13	26	38	6937	makihata	dummy	0	2009/3/12/11:9:27(130.34.95.43)	0	2009/3/12/11:11:15(130.34.95.43)
13	26	38	6937	makihata	dummy	0	2009/3/12/11:11:31(130.34.95.43)	Al
12	18	33	6908	konno	dummy	0	2009/3/10/15:54:43(130.34.95.37)	Ti
-16	20	34	6937	JW Lee	dummy	0	2009/3/12/15:46:1(172.16.44.131)	Ge 	2009/3/14/16:17:39(172.16.44.131)
15	18	32	6936	kawaguchi	dummy	0	2009/3/12/22:9:23(130.34.95.43)	Cu/Ti
16	8	20	6936	kawaguchi	dummy	0	2009/3/12/22:9:57(130.34.95.43)	Cu/Ti
14	36	48	6909	noriki	dummy	2	2009/3/12/23:12:34(172.16.44.171)	Ti/Cu
-17	18	36	6909	meshida	dummy	0	2009/3/13/9:34:18(172.16.44.145)	Ta/Cu	2009/3/16/9:35:6(172.16.44.146)
-16	28	40	6937	JW Lee	dummy	0	2009/3/14/16:18:30(172.16.44.131)	ge	2009/3/14/16:22:25(172.16.44.131)
16	28	42	6937	JW Lee	dummy	0	2009/3/14/16:23:8(172.16.44.131)	ge
15	34	44	6937	makihata	dummy	0	2009/3/15/9:11:52(130.34.94.144)	al
-16	42	48	6937	makihata	dummy	0	2009/3/15/16:15:25(130.34.95.43)	0	2009/3/15/16:15:30(130.34.95.43)
16	42	48	6937	makihata	dummy	0	2009/3/15/16:15:46(130.34.95.43)	Al
17	0	6	6937	makihata	dummy	0	2009/3/15/17:10:27(130.34.95.43)	0
17	6	18	6936	kawaguchi	dummy	0	2009/3/16/7:9:45(130.34.95.43)	Ti/Cu
-17	36	48	6936	kawaguchi	dummy	0	2009/3/16/7:11:1(130.34.95.43)	Ti/Cu	2009/3/17/19:51:15(130.34.95.43)
17	20	32	6937	makihata	dummy	0	2009/3/16/9:58:59(130.34.95.43)	al/etching?
-19	20	32	6937	jw Lee	dummy	0	2009/3/16/11:7:38(172.16.44.131)	0	2009/3/18/16:31:48(172.16.44.131)
-18	18	36	6909	meshida	dummy	0	2009/3/16/14:12:13(130.34.95.37)	0	2009/3/16/14:12:17(130.34.95.37)
-18	20	32	6936	kawaguchi	dummy	0	2009/3/16/17:15:6(130.34.95.43)	Ti/Cu	2009/3/18/12:4:13(130.34.95.43)
18	32	46	6937	JW Lee	dummy	0	2009/3/16/20:57:45(172.16.44.131)	0
17	18	20	6936	kawaguchi	dummy	0	2009/3/17/3:23:42(130.34.95.43)	0
23	18	36	6909	meshida	dummy	0	2009/3/17/8:58:43(130.34.95.37)	Ta/Cu
18	12	20	6937	k.hirano	dummy	0	2009/3/17/9:5:1(130.34.95.43)	1.Al
-20	32	44	6937	makihata	dummy	0	2009/3/17/11:18:30(130.34.95.43)	0	2009/3/17/11:18:41(130.34.95.43)
20	32	44	6937	makihata	dummy	0	2009/3/17/11:18:54(130.34.95.43)	Al
24	18	30	6937	kim	dummy	0	2009/3/17/14:49:34(130.34.95.43)	Pt
18	0	8	6936	kawai	dummy	0	2009/3/17/18:53:52(130.34.95.43)	Pt/Ti
21	22	34	7046	kuroda	dummy	0	2009/3/17/19:5:42(130.34.192.103)	Al
17	36	42	6936	kawaguchi	dummy	0	2009/3/16/7:11:1(130.34.95.43)	Ti/Cu
-19	0	14	6936	kawaguchi	dummy	0	2009/3/17/19:52:5(130.34.95.43)	0	2009/3/19/1:27:28(130.34.95.43)
-19	14	20	6936	kawaguchi	dummy	0	2009/3/18/10:31:36(130.34.95.43)	Ti/Cu	2009/3/19/1:27:14(130.34.95.43)
18	20	27	6936	kawaguchi	dummy	0	2009/3/16/17:15:6(130.34.95.43)	Ti/Cu
19	24	40	6937	JW Lee	dummy	0	2009/3/18/16:32:26(172.16.44.131)	Pt
-19	20	24	6936	kawaguchi	dummy	0	2009/3/18/22:28:4(130.34.95.43)	Ti/Cu	2009/3/19/1:27:22(130.34.95.43)
19	0	5	6936	kawaguchi	dummy	0	2009/3/17/19:52:5(130.34.95.43)	0
-21	34	48	6936	kawaguchi	dummy	0	2009/3/19/4:27:55(130.34.95.43)	Cu/Ti	2009/3/21/22:29:7(130.34.95.43)
22	22	34	6936	kawaguchi	dummy	0	2009/3/19/4:28:34(130.34.95.43)	TI/Cu
19	20	24	6937	jw lee	dummy	0	2009/3/19/9:48:55(172.16.44.131)	0
19	44	48	6937	makihata	dummy	0	2009/3/19/20:56:56(130.34.95.43)	0
20	0	8	6937	makihata	dummy	0	2009/3/19/20:57:15(130.34.95.43)	0
-20	8	18	6937	makihata	dummy	0	2009/3/20/0:51:46(130.34.95.43)	0	2009/3/20/3:28:2(130.34.95.43)
20	8	9	6937	makihata	dummy	0	2009/3/20/0:51:46(130.34.95.43)	0
20	12	21	6937	Hoeppner	dummy	0	2009/3/20/4:30:14(130.34.95.43)	Cu
20	21	24	6937	Hoeppner	dummy	0	2009/3/20/9:1:4(172.16.44.171)	Cu
22	0	14	6937	makihata	dummy	0	2009/3/21/10:8:57(130.34.94.143)	SiO2
21	34	47	6936	kawaguchi	dummy	0	2009/3/19/4:27:55(130.34.95.43)	Cu/Ti
21	4	16	6936	kawaguchi	dummy	0	2009/3/21/22:29:36(130.34.95.43)	0
22	16	22	6936	kawaguchi	dummy	0	2009/3/21/22:30:11(130.34.95.43)	0
-23	36	46	6936	kawaguchi	dummy	0	2009/3/23/8:16:13(130.34.95.43)	Ti/Cu	2009/3/23/18:33:39(130.34.95.43)
24	30	42	6909	noriki	dummy	0	2009/3/23/15:50:54(130.34.95.37)	Ta/Cu
-25	24	36	6937	JW Lee	dummy	0	2009/3/23/15:56:26(172.16.44.131)	0	2009/3/25/14:9:45(172.16.44.131)
23	36	40	6936	kawaguchi	dummy	0	2009/3/23/8:16:13(130.34.95.43)	Ti/Cu
23	42	48	6936	kawaguchi	dummy	0	2009/3/23/18:33:51(130.34.95.43)	0
24	0	6	6936	kawaguchi	dummy	0	2009/3/23/18:34:4(130.34.95.43)	0
24	11	18	6936	kawaguchi	dummy	2	2009/3/24/5:42:26(130.34.95.43)	Ti/Cu
25	0	20	6908	ohara	dummy	0	2009/3/24/14:52:57(130.34.95.37)	Ta/Cu
24	42	48	6909	noriki	dummy	0	2009/3/24/20:3:4(172.16.44.146)	0
-25	36	48	6936	kawaguchi	dummy	2	2009/3/25/1:13:3(130.34.95.43)	Ti/Cu	2009/3/25/17:44:12(130.34.95.43)
26	0	16	6936	kawaguchi	dummy	2	2009/3/25/1:38:19(130.34.95.43)	Ti/Cu
-26	20	32	6937	Y.M.LEE	dummy	2	2009/3/25/12:0:29(130.34.95.43)	Al	2009/3/25/17:41:52(130.34.95.43)
28	32	42	4404	Hyunjae Lee	dummy	0	2009/3/25/12:58:4(130.34.248.209)	SiO2 deposition
25	24	31	6937	JW Lee	dummy	0	2009/3/23/15:56:26(172.16.44.131)	0
25	36	38	6936	kawaguchi	dummy	2	2009/3/25/1:13:3(130.34.95.43)	Ti/Cu
26	16	24	6936	kawaguchi	dummy	0	2009/3/25/17:44:41(130.34.95.43)	Ti/Cu
-25	38	48	6909	noriki	dummy	0	2009/3/25/17:45:32(130.34.95.37)	Ti/Cu	2009/3/25/19:35:30(172.16.44.146)
25	38	42	6909	noriki	dummy	0	2009/3/25/17:45:32(130.34.95.37)	Ti/Cu
26	24	28	6936	kawaguchi	dummy	0	2009/3/26/5:47:19(130.34.95.43)	Ti/Cu
26	28	32	6936	kawaguchi	dummy	0	2009/3/26/10:4:17(130.34.95.43)	Cu/Ti
-27	18	28	6937	H KIM	dummy	2	2009/3/26/10:30:5(130.34.95.43)	Al	2009/3/26/10:30:19(130.34.95.43)
-27	18	28	6937	H KIM	dummy	2	2009/3/26/10:30:51(130.34.95.43)	Pt/Ti	2009/3/26/19:25:29(130.34.95.43)
26	32	38	6936	kawaguchi	dummy	0	2009/3/26/11:58:13(130.34.95.43)	Ti/Cu
-27	28	40	6937	Y.M.LEE	dummy	2	2009/3/26/17:9:15(130.34.95.43)	Al	2009/3/26/18:29:50(130.34.95.43)
-29	6	19	6936	kawaguchi	dummy	0	2009/3/26/17:38:40(130.34.95.43)	Ti/Cu	2009/3/28/21:33:26(130.34.95.43)
-27	18	28	6937	H KIM	dummy	2	2009/3/26/19:25:46(130.34.95.43)	Al	2009/3/27/10:38:20(130.34.95.43)
-27	28	40	6937	H KIM	dummy	0	2009/3/26/19:26:51(130.34.95.43)	Pt/Ti	2009/3/26/19:26:56(130.34.95.43)
-27	28	40	6937	H KIM	dummy	2	2009/3/26/19:27:17(130.34.95.43)	Pt/Ti	2009/3/27/10:38:27(130.34.95.43)
26	38	42	6936	kawaguchi	dummy	0	2009/3/26/19:35:13(130.34.95.43)	Cu/Ti
27	18	24	6937	H KIM	dummy	2	2009/3/26/19:25:46(130.34.95.43)	Al
-27	24	36	6937	H KIM	dummy	2	2009/3/27/10:38:52(130.34.95.43)	Pt/Ti	2009/3/27/10:39:29(130.34.95.43)
27	24	38	6937	H KIM	dummy	2	2009/3/27/10:39:48(130.34.95.43)	Pt/Ti
27	38	42	6937	kim	dummy	2	2009/3/27/15:4:48(130.34.95.43)	Pt/Ti
28	18	20	4830	kishi	dummy	2	2009/3/27/17:31:0(130.34.95.30)	Ti>W
28	20	30	4830	kishi	dummy	0	2009/3/27/17:31:17(130.34.95.30)	0
28	30	32	4830	kishi	dummy	2	2009/3/27/17:31:46(130.34.95.30)	W>Ti
-27	42	48	6937	kim	dummy	2	2009/3/27/18:12:56(172.16.44.146)	Pt/Ti	2009/3/27/20:57:44(172.16.44.146)
27	42	44	6937	kim	dummy	2	2009/3/27/18:12:56(172.16.44.146)	Pt/Ti
28	42	46	4404	Koike	dummy	0	2009/3/28/18:37:3(130.34.248.209)	SiO2 deposition
-29	16	28	6936	kawagjcnk	dummy	0	2009/3/28/21:33:38(130.34.95.43)	0	2009/3/28/21:33:46(130.34.95.43)
29	16	28	6936	kawaguchi	dummy	0	2009/3/28/21:33:57(130.34.95.43)	0
29	32	44	6936	kawaguchi	dummy	0	2009/3/29/12:53:37(130.34.95.43)	Ti/Cu
-30	32	40	6937	Hoeppner	dummy	0	2009/3/30/11:15:42(130.34.95.43)	0	2009/3/30/11:15:50(130.34.95.43)
-30	32	40	6937	Hoeppner	dummy	0	2009/3/30/11:16:25(130.34.95.43)	Cr	2009/3/30/16:47:45(130.34.95.43)
31	20	32	6937	JW Lee	dummy	0	2009/3/30/13:6:41(172.16.44.131)	Pt
30	32	36	6937	Hoeppner	dummy	0	2009/3/30/11:16:25(130.34.95.43)	Cr
31	32	44	6937	JW Lee	dummy	0	2009/3/31/15:4:59(172.16.44.131)	Ge