-2	20	32	6937	J Lee	dummy	0	2009/1/29/13:36:9(172.16.44.143)	Pt	2009/2/2/10:16:11(172.16.44.143)
2	20	23	6937	J Lee	dummy	0	2009/1/29/13:36:9(172.16.44.143)	Pt
2	30	40	6937	jw lee	dummy	0	2009/2/2/10:21:47(172.16.44.143)	0
-2	40	48	6909	s.kanno	dummy	0	2009/2/2/15:44:16(130.34.95.37)	SiO2	2009/2/2/17:56:28(130.34.95.37)
-3	0	4	6909	s.kanno	dummy	0	2009/2/2/15:44:45(130.34.95.37)	SiO2	2009/2/2/17:56:34(130.34.95.37)
3	21	29	4404	Hyunjae Lee	dummy	0	2009/2/2/16:42:26(130.34.248.151)	SiO2 deposition
-4	36	46	6909	kaiho	dummy	2	2009/2/3/1:33:54(172.16.44.146)	Ti	2009/2/3/15:44:37(172.16.44.145)
-5	18	30	6937	H KIM	dummy	0	2009/2/3/10:8:44(130.34.95.43)	Pt/Ti	2009/2/3/19:9:26(130.34.95.43)
-5	0	18	6909	noriki	dummy	2	2009/2/3/14:29:11(130.34.95.37)	Ti/Cu	2009/2/3/15:3:58(172.16.44.146)
-4	18	36	6909	meshida	dummy	0	2009/2/3/14:29:48(130.34.95.37)	0	2009/2/3/14:29:58(130.34.95.37)
-4	30	36	6909	kaiho	dummy	2	2009/2/3/14:31:30(130.34.95.37)	Ti/Cu	2009/2/3/15:4:6(172.16.44.146)
-3	33	38	7122	akiyama	dummy	2	2009/2/3/16:0:5(130.34.198.5)	2--->Cu	2009/2/3/16:31:1(130.34.198.5)
-4	20	30	7122	akiyama	dummy	0	2009/2/3/16:4:6(130.34.198.5)	Cu	2009/2/3/16:31:11(130.34.198.5)
3	33	36	7122	akiyama	dummy	2	2009/2/3/16:0:5(130.34.198.5)	2--->Cu
3	36	37	7122	akiyama	dummy	0	2009/2/3/16:32:8(130.34.198.5)	中止：Cuに変えてません
6	18	36	6909	meshida	dummy	0	2009/2/3/16:47:7(172.16.44.146)	Ta/Cu
4	0	10	6937	makihata	dummy	0	2009/2/3/19:59:59(130.34.95.43)	0
4	10	14	6937	makihata	dummy	0	2009/2/3/20:0:19(130.34.95.43)	0
4	14	16	6937	makihata	dummy	0	2009/2/4/2:14:20(130.34.95.43)	0
5	26	34	6965	HOKARI	dummy	0	2009/2/4/20:16:5(130.34.95.43)	Al
5	34	36	6965	hokari	dummy	0	2009/2/5/12:46:40(130.34.95.31)	0
5	36	46	6965	hokari	dummy	0	2009/2/5/16:34:47(172.16.44.146)	Al
5	46	48	6965	hokari	dummy	0	2009/2/5/23:4:3(172.16.44.146)	0
9	16	32	7122	akiyama	dummy	0	2009/2/8/19:43:6(130.34.198.5)	Cu
9	32	34	4830	kishi	dummy	2	2009/2/9/10:59:15(130.34.95.30)	Cu>W
9	34	42	4830	kishi	dummy	0	2009/2/9/10:59:35(130.34.95.30)	W
-9	42	44	4830	kishi	dummy	0	2009/2/9/10:59:57(130.34.95.30)	W>Cu	2009/2/9/11:0:7(130.34.95.30)
9	42	44	4830	kishi	dummy	2	2009/2/9/11:0:28(130.34.95.30)	W>Cu
10	32	39	6945	takezawa	dummy	0	2009/2/9/22:20:36(130.34.95.48)	Cu
-10	42	44	6909	takeshita	dummy	2	2009/2/10/2:0:15(130.34.95.37)	Cuターゲット交換	2009/2/10/12:17:44(130.34.95.37)
-10	40	42	6909	takeshita	dummy	2	2009/2/10/12:18:10(130.34.95.37)	Cuターゲット交換	2009/2/10/14:18:0(130.34.95.37)
-10	44	46	6909	takeshtia	dummy	2	2009/2/10/14:18:38(130.34.95.37)	Cuターゲット交換	2009/2/10/19:39:59(130.34.95.37)
10	39	44	7122	akiyama	dummy	0	2009/2/10/16:4:4(130.34.198.5)	Cu
11	26	29	6945	takezawa	dummy	2	2009/2/10/17:4:7(172.16.44.171)	W-->Cu
-11	29	35	6945	takezawa	dummy	0	2009/2/10/17:4:34(172.16.44.171)	Cu	2009/2/11/13:46:53(172.16.44.171)
-10	46	48	6909	takeshita	dummy	2	2009/2/10/19:40:34(130.34.95.37)	Cuターゲット交換	2009/2/10/20:29:32(130.34.95.37)
11	6	8	6909	takeshita	dummy	2	2009/2/11/2:58:39(172.16.44.146)	Cuターゲット交換
11	29	30	6945	takezawa	dummy	0	2009/2/10/17:4:34(172.16.44.171)	Cu
-12	34	48	6909	noriki	dummy	2	2009/2/12/2:32:35(130.34.95.37)	Ti/Cu	2009/2/12/17:14:26(172.16.44.145)
12	22	31	6909	takeshita	dummy	0	2009/2/12/3:25:55(172.16.44.145)	Al
13	16	18	6936	kawaguchi	dummy	2	2009/2/12/3:26:23(130.34.95.43)	Ti はずす
12	31	34	6909	takeshita	dummy	0	2009/2/12/14:1:38(172.16.44.146)	0
12	34	37	6909	noriki	dummy	2	2009/2/12/2:32:35(130.34.95.37)	Ti/Cu
13	0	16	6909	noriki	dummy	2	2009/2/12/18:24:22(130.34.95.37)	Ti/Cu
15	2	4	4830	kishi	dummy	2	2009/2/14/23:50:30(130.34.95.30)	Cu>W
15	4	14	4830	kishi	dummy	0	2009/2/14/23:51:6(130.34.95.30)	W
15	14	16	4830	kishi	dummy	2	2009/2/14/23:51:30(130.34.95.30)	W>Cu
-20	16	28	5318	sano	dummy	2	2009/2/15/15:0:50(130.34.231.209)	Alにターゲット交換。	2009/2/17/14:31:19(130.34.231.209)
16	25	26	3586	itasaka	dummy	2	2009/2/16/12:24:2(172.16.44.146)	Tiとりはずし
18	22	23	6936	kano	dummy	0	2009/2/16/15:33:34(130.34.95.43)	Ti取り外します。
17	26	34	7046	kuroda	dummy	0	2009/2/16/21:52:2(130.34.192.103)	Al
-17	36	44	5318	sano	dummy	0	2009/2/17/14:33:20(130.34.231.209)	Al	2009/2/17/14:41:44(130.34.231.209)
17	34	42	5318	sano	dummy	0	2009/2/17/14:42:9(130.34.231.209)	Al
-18	26	34	7046	KIHARA	dummy	0	2009/2/17/14:51:54(130.34.95.43)	Al	2009/2/17/14:53:32(130.34.95.43)
-18	26	34	6936	kihara	dummy	0	2009/2/17/14:54:5(130.34.95.43)	Al	2009/2/17/20:41:21(130.34.95.43)
17	42	46	5318	sano	dummy	0	2009/2/17/18:44:48(172.16.44.146)	Al
-18	30	38	6937	kihara	dummy	0	2009/2/17/20:41:45(130.34.95.43)	Al	2009/2/18/14:10:56(130.34.95.43)
18	30	31	6937	kihara	dummy	0	2009/2/17/20:41:45(130.34.95.43)	Al
-21	26	40	7046	kuroda	dummy	0	2009/2/18/16:54:13(130.34.192.103)	Al	2009/2/19/18:35:14(130.34.192.103)
19	36	46	7046	kuroda	dummy	0	2009/2/19/17:35:40(130.34.192.103)	Al
24	18	36	6909	meshida	dummy	0	2009/2/19/18:10:27(130.34.95.37)	Ta/Cu
20	28	40	6908q	Ohara Yuki	dummy	0	2009/2/20/9:7:35(130.34.95.37)	Ta/Cu
20	40	48	6909	satou	dummy	0	2009/2/20/10:42:58(130.34.95.37)	Ta
21	0	4	6909	satou	dummy	0	2009/2/20/18:26:15(172.16.44.171)	0
21	32	46	6908	Ohara Yuki	dummy	0	2009/2/21/15:51:43(130.34.95.37)	Ta/Cu
-22	34	44	6968	iitsuka	dummy	0	2009/2/22/10:33:1(130.34.88.130)	SiO2	2009/2/22/10:35:40(130.34.88.130)
22	34	44	6968	iitsuka	dummy	0	2009/2/22/10:36:8(130.34.88.130)	Ir→SiO2
23	30	48	6909	noriki	dummy	2	2009/2/23/14:26:57(130.34.95.37)	Ta/Cu
24	0	2	6909	noriki	dummy	0	2009/2/23/22:50:53(172.16.44.146)	0
-24	37	47	7281	takano	dummy	0	2009/2/24/12:59:55(130.34.77.72)	SiO2	2009/2/24/16:42:11(130.34.77.72)
25	26	36	6937	kihara	dummy	0	2009/2/24/13:34:45(130.34.95.43)	Al
24	39	48	7281	takano	dummy	0	2009/2/24/16:43:13(130.34.77.72)	SiO2
25	36	40	6937	kihara	dummy	0	2009/2/25/10:52:32(130.34.95.43)	Al
26	2	12	7046	kuroda	dummy	0	2009/2/25/15:20:54(130.34.192.103)	Al
-27	17	32	6936	honjoya	dummy	2	2009/2/26/22:41:40(130.34.95.43)	Ti/SiO2	2009/2/27/2:11:4(130.34.95.43)
-27	19	32	6937	honjoya	dummy	0	2009/2/27/2:11:35(130.34.95.43)	Ti/SiO2	2009/2/27/7:22:35(172.16.44.146)
27	17	25	6936	honjoya	dummy	0	2009/2/27/7:23:3(172.16.44.146)	Al
27	44	48	6936	tomono	dummy	0	2009/2/27/20:57:7(130.34.95.43)	Al
28	0	10	6936	tomono	dummy	0	2009/2/27/20:57:34(130.34.95.43)	Al
28	26	38	6936	tomono	dummy	0	2009/2/28/12:38:57(130.34.95.43)	0