-1	20	28	7281	date	dummy	0	2008/4/30/21:51:10(130.34.77.72)	SiO2	2008/5/1/11:10:10(130.34.77.72)
1	28	36	6909	T.Konno	dummy	0	2008/5/1/3:33:43(172.16.44.137)	SiO2
1	20	25	7281	date	dummy	0	2008/4/30/21:51:10(130.34.77.72)	SiO2
-1	36	38	6909	noriki	dummy	2	2008/5/1/15:32:2(130.34.95.37)	0	2008/5/1/15:33:2(130.34.95.37)
-1	36	38	6909	noriki	dummy	2	2008/5/1/15:33:16(130.34.95.37)	Taターゲット取り外し	2008/5/1/15:35:51(130.34.95.37)
-1	38	40	6909	noriki	dummy	2	2008/5/1/15:36:6(130.34.95.37)	Taターゲット取り外し	2008/5/1/15:36:36(130.34.95.37)
-1	40	42	6909	noriki	dummy	2	2008/5/1/15:36:47(130.34.95.37)	Taターゲット取り外し	2008/5/1/15:40:45(130.34.95.37)
-2	0	2	6909	noriki	dummy	2	2008/5/1/15:41:1(130.34.95.37)	Taターゲット取り外し	2008/5/1/16:29:46(172.16.44.137)
1	36	42	6909	T.Konno	dummy	0	2008/5/1/16:56:57(172.16.44.137)	0
2	6	14	7281	date	dummy	0	2008/5/1/19:19:32(130.34.77.72)	sio2
2	21	29	6965	wakui	dummy	0	2008/5/1/21:21:31(130.34.95.31)	SiO2
1	43	45	6909	noriki	dummy	2	2008/5/1/21:31:47(172.16.44.137)	Taターゲット取り外し
2	0	6	6909	konno	dummy	0	2008/5/1/22:21:22(172.16.44.137)	SiO2
2	14	18	7281	date	dummy	0	2008/5/2/2:22:40(172.16.44.137)	0
2	29	30	6965	wakui	dummy	0	2008/5/2/13:7:31(130.34.95.43)	0
-2	39	48	6965	wakui	dummy	0	2008/5/2/14:5:14(172.16.44.137)	SiO2	2008/5/2/18:20:39(130.34.95.31)
-4	16	24	6909	jeong	dummy	0	2008/5/3/22:51:38(172.16.44.137)	0	2008/5/3/22:51:47(172.16.44.137)
4	16	24	6909	jeong	dummy	0	2008/5/3/22:52:10(172.16.44.137)	Cu/Ta
5	30	36	6909	fujiwara	dummy	0	2008/5/5/10:38:4(172.16.44.141)	SiO2
5	36	40	6909	fujiwara	dummy	0	2008/5/5/14:4:30(130.34.95.37)	0
-8	30	42	6936	honjoya	dummy	0	2008/5/6/2:55:59(130.34.95.43)	Al	2008/5/7/20:23:42(130.34.95.43)
7	28	38	6909	jeong	dummy	0	2008/5/7/11:8:33(172.16.44.137)	SiO2
-8	18	24	6909	jeong	dummy	2	2008/5/7/17:58:11(172.16.44.137)	Al	2008/5/8/9:50:21(130.34.95.37)
-9	38	48	6909	kaiho	dummy	2	2008/5/7/19:47:7(130.34.95.37)	Pt	2008/5/8/23:32:44(130.34.95.37)
8	24	37	6936	honjoya	dummy	0	2008/5/7/20:24:31(130.34.95.43)	Al
8	18	22	6909	jeong	dummy	2	2008/5/7/17:58:11(172.16.44.137)	Al
8	37	38	6936	honjoya	dummy	0	2008/5/8/17:15:23(130.34.95.43)	Al
-9	32	44	6909	kaiho	dummy	2	2008/5/8/23:33:16(130.34.95.37)	Pt	2008/5/9/12:57:29(172.16.44.141)
9	36	48	6909	kaiho	dummy	2	2008/5/9/12:57:49(172.16.44.141)	Pt
-10	0	11	6936	honjoya	dummy	2	2008/5/9/18:12:9(130.34.95.43)	Cr/Pt/Au	2008/5/9/18:23:44(130.34.95.43)
11	0	10	6909	kaiho	dummy	0	2008/5/10/22:14:42(172.16.44.137)	Al
11	16	24	6909	jeong	dummy	0	2008/5/10/22:15:5(172.16.44.137)	Al
11	24	26	6909	jeong	dummy	0	2008/5/11/11:26:32(130.34.95.37)	0
11	26	28	6937	Andrew	dummy	0	2008/5/12/10:36:24(172.16.44.140)	Take out Cu target
12	21	23	6937	Andrew	dummy	2	2008/5/12/10:38:20(172.16.44.140)	Take out Cu target
13	24	32	4771	sano	dummy	0	2008/5/12/11:50:1(130.34.89.180)	Al
13	32	34	4771	tachihara	dummy	0	2008/5/13/15:43:29(172.16.44.137)	Al
13	34	36	4771	tachihara	dummy	0	2008/5/13/16:41:48(172.16.44.137)	Al
14	22	30	4771	tachihara	dummy	0	2008/5/13/19:48:24(130.34.89.180)	Al
14	30	36	6956	chiba	dummy	0	2008/5/14/10:27:4(130.34.95.38)	Al
15	24	36	6965	wakui	dummy	0	2008/5/14/21:27:31(172.16.44.137)	SiO2
-19	27	39	6909	fujiwara	dummy	2	2008/5/15/2:8:25(130.34.95.37)	Ta/Cu	2008/5/15/2:8:51(130.34.95.37)
-20	27	39	6909	fujiwara	dummy	2	2008/5/15/2:8:47(130.34.95.37)	Ta/Cu	2008/5/19/22:48:10(172.16.44.137)
17	28	36	6968	Itoyama	dummy	0	2008/5/15/22:7:52(130.34.88.130)	SiO2
16	22	28	6956	chiba	dummy	0	2008/5/16/10:32:29(130.34.95.38)	Al
24	20	32	6421	iwanaga	dummy	0	2008/5/16/12:3:5(130.34.123.164)	Al
16	42	48	6968	narumi	dummy	1	2008/5/16/14:43:45(130.34.88.130)	真空度低下の原因調査
17	0	28	6968	narumi	dummy	1	2008/5/16/14:44:56(130.34.88.130)	真空度低下の原因調査
16	31	42	6965	wakui	dummy	0	2008/5/16/15:15:17(130.34.95.31)	SiO2
19	32	38	6956	chiba	dummy	0	2008/5/19/15:41:10(130.34.95.38)	Al
20	0	18	6909	fujiwara	dummy	2	2008/5/19/18:32:36(172.16.44.141)	Ta/Cu 長時間スパッタ
20	21	24	6909	fujiwara	dummy	0	2008/5/20/0:16:36(172.16.44.137)	Cu
20	24	28	6909	fujiwara	dummy	0	2008/5/20/10:59:25(172.16.44.137)	Ta/Cu
20	30	31	6909	fujiwara	dummy	2	2008/5/20/13:19:34(172.16.44.137)	Taターゲット取り外し
-21	18	28	6909	jeong	dummy	0	2008/5/20/17:18:28(172.16.44.137)	Al	2008/5/20/18:49:49(172.16.44.137)
-21	22	32	6909	jeong	dummy	0	2008/5/20/18:50:22(172.16.44.137)	Al	2008/5/21/10:32:41(172.16.44.141)
21	22	24	6909	jeong	dummy	0	2008/5/20/18:50:22(172.16.44.137)	Al
-23	24	34	6909	fujiwara	dummy	0	2008/5/21/17:19:23(172.16.44.137)	SiO2	2008/5/21/17:19:30(172.16.44.137)
23	24	34	6909	fujiwara	dummy	0	2008/5/21/17:20:10(172.16.44.137)	SiO2
-21	42	48	6909	kino	dummy	2	2008/5/21/17:22:6(130.34.95.37)	Ta/Cu	2008/5/21/17:22:24(130.34.95.37)
22	0	6	6909	kino	dummy	0	2008/5/21/23:1:4(130.34.95.37)	SiO2
22	26	36	6909	jeong	dummy	0	2008/5/22/12:27:16(172.16.44.137)	Al
23	16	24	6909	beatrix	dummy	0	2008/5/22/13:56:45(172.16.44.136)	0
22	42	48	6909	kanno	dummy	2	2008/5/22/13:57:29(172.16.44.136)	Ta/Cu
23	34	43	6909	MURUGESAN	dummy	0	2008/5/22/13:58:5(172.16.44.136)	0
23	2	14	6936	honjoya	dummy	2	2008/5/22/14:28:49(130.34.95.43)	Cr/Pt/Au 
22	36	40	6909	jeong	dummy	0	2008/5/22/16:3:8(172.16.44.137)	Al
23	0	2	6909	BEATRIX	dummy	0	2008/5/22/19:50:17(172.16.44.136)	0
22	40	42	6909	KANNO	dummy	0	2008/5/22/19:50:46(172.16.44.136)	0
23	43	48	6965	wakui	dummy	0	2008/5/22/20:15:53(130.34.95.31)	SiO2
24	0	4	6965	wakui	dummy	0	2008/5/22/20:16:17(130.34.95.31)	SiO2
24	18	20	6421	iwanaga	dummy	2	2008/5/23/13:1:35(130.34.123.164)	0
24	4	14	6909	kino	dummy	0	2008/5/23/18:19:26(172.16.44.137)	0
-24	36	46	6937	ファイズル	dummy	2	2008/5/23/19:22:53(130.34.95.43)	cr/au	2008/5/24/16:11:7(130.34.95.43)
24	14	18	6909	T.Konno	dummy	0	2008/5/23/19:49:20(172.16.44.141)	Ta/Cu
25	22	32	6965	wakui	dummy	0	2008/5/24/0:27:57(130.34.95.31)	Au
24	46	48	6909	 T.Konno	dummy	2	2008/5/24/7:35:42(130.34.95.37)	Ta/Cu
25	0	18	6909	 T.Konno	dummy	0	2008/5/24/7:36:25(130.34.95.37)	Ta/Cu 長時間スパッタ
-26	28	40	6909	noriki	dummy	0	2008/5/24/13:50:39(130.34.95.37)	Ta/Au	2008/5/25/16:54:56(172.16.44.137)
24	34	44	6937	ファイズル	dummy	0	2008/5/24/16:11:43(130.34.95.43)	cr/au
25	18	22	6909	T.Konno	dummy	0	2008/5/25/2:16:27(130.34.95.37)	0
25	32	36	6965	wakui	dummy	0	2008/5/25/13:46:51(130.34.95.31)	0
-27	24	36	6909	noriki	dummy	0	2008/5/25/16:54:1(172.16.44.137)	0	2008/5/25/16:54:9(172.16.44.137)
27	24	36	6909	noriki	dummy	0	2008/5/25/16:54:26(172.16.44.137)	Ta/Au/Ta
-28	18	28	7281	takano	dummy	0	2008/5/26/17:9:34(130.34.77.72)	SiO2	2008/5/26/17:12:2(130.34.77.72)
28	20	30	7281	takano	dummy	0	2008/5/26/17:12:31(130.34.77.72)	SiO2
-28	30	40	6421	T.BABA	dummy	0	2008/5/26/18:39:8(130.34.248.191)	SiO2	2008/5/27/13:34:52(130.34.248.191)
-29	24	34	6968	sakuma	dummy	0	2008/5/26/23:10:9(130.34.88.130)	Cr/Au	2008/5/29/11:53:47(130.34.88.130)
-27	36	48	6937	nakamura	dummy	0	2008/5/26/23:57:28(130.34.95.43)	0	2008/5/27/17:21:7(130.34.95.43)
-29	18	22	6421	iwanaga	dummy	0	2008/5/27/13:31:8(130.34.123.164)	0	2008/5/27/13:40:22(130.34.123.164)
-28	42	48	6421	T.BABA	dummy	0	2008/5/27/13:35:33(130.34.248.191)	SiO2	2008/5/28/17:22:50(130.34.248.191)
-29	0	2	6421	T.BABA	dummy	0	2008/5/27/13:35:57(130.34.248.191)	SiO2	2008/5/28/17:22:58(130.34.248.191)
29	18	22	6421	iwanaga	dummy	0	2008/5/27/13:40:39(130.34.123.164)	0
27	36	37	6937	nakamura	dummy	0	2008/5/26/23:57:28(130.34.95.43)	0
27	43	48	6937	nakamura	dummy	0	2008/5/27/17:21:25(130.34.95.43)	0
28	0	6	6937	nakamura	dummy	0	2008/5/27/17:21:41(130.34.95.43)	0
28	6	12	6937	nakamura	dummy	2	2008/5/27/23:11:8(130.34.95.43)	Cu
28	12	16	6937	nakamura	dummy	0	2008/5/28/4:34:1(130.34.95.43)	Cu
28	16	18	6937	nakamura	dummy	0	2008/5/28/7:30:7(130.34.95.43)	Cu
-29	34	44	6937	matumura	dummy	0	2008/5/28/10:8:20(130.34.95.43)	Al	2008/5/29/13:23:37(130.34.95.43)
30	22	32	4771	tachihara	dummy	0	2008/5/28/11:10:49(130.34.89.180)	Al
-28	34	42	6936	kawaguchi	dummy	0	2008/5/28/14:10:19(130.34.95.43)	0	2008/5/28/14:10:31(130.34.95.43)
-28	34	42	6936	kawaguchi	dummy	0	2008/5/28/14:10:50(130.34.95.43)	Au/Cr	2008/5/28/14:11:36(130.34.95.43)
30	14	22	6936	kawaguchi	dummy	0	2008/5/28/14:12:13(130.34.95.43)	Au/Cr
28	38	48	6937	Katrin	dummy	2	2008/5/28/17:35:46(172.16.44.134)	Cr
-29	0	4	6937	Ka	dummy	0	2008/5/28/17:36:11(172.16.44.134)	0	2008/5/28/17:36:21(172.16.44.134)
29	0	4	6937	Katrin	dummy	0	2008/5/28/17:36:44(172.16.44.134)	Cr
29	5	17	4830	jeong	dummy	0	2008/5/28/19:54:6(172.16.44.137)	Cr/Au
-29	44	48	6937	nakamura	dummy	0	2008/5/28/23:47:45(130.34.95.43)	0	2008/5/29/0:30:34(130.34.95.43)
-30	0	4	6937	nakamura	dummy	0	2008/5/28/23:48:3(130.34.95.43)	0	2008/5/29/0:30:40(130.34.95.43)
30	32	39	6421	iwanaga	dummy	0	2008/5/29/11:12:39(130.34.123.164)	Al
29	24	26	6968	sakuma	dummy	0	2008/5/26/23:10:9(130.34.88.130)	Cr/Au
29	28	38	6937	T. Matsumura	dummy	2	2008/5/29/13:24:2(130.34.95.43)	Al
-31	18	30	6421	T.BABA	dummy	2	2008/5/29/13:42:50(130.34.248.191)	SiO2	2008/5/30/22:35:51(130.34.248.191)
-29	38	48	6909	jeong	dummy	2	2008/5/29/14:47:21(172.16.44.141)	Ta/Cu	2008/5/29/20:12:49(172.16.44.137)
30	40	47	4830	Y.Sato	dummy	0	2008/5/29/16:52:18(130.34.95.30)	Cr/Au
-31	32	44	6968	sakuma	dummy	0	2008/5/29/19:53:56(130.34.88.130)	Cr/Au	2008/5/31/12:13:41(130.34.88.130)
29	38	43	6909	jeong	dummy	2	2008/5/29/14:47:21(172.16.44.141)	Ta/Cu
-30	0	6	6968	sakuma	dummy	0	2008/5/29/20:15:26(130.34.88.130)	Cr/Au	2008/5/29/23:12:50(130.34.88.130)
29	43	48	6909	jeong	dummy	2	2008/5/29/20:18:4(172.16.44.137)	Al
-30	47	48	6937	T. Matsumura	dummy	2	2008/5/29/22:1:11(130.34.95.43)	0	2008/5/29/22:1:50(130.34.95.43)
31	0	9	6937	T. Matsumura	dummy	2	2008/5/29/22:1:43(130.34.95.43)	Al
30	47	48	6937	T. Matsumura	dummy	2	2008/5/29/22:2:12(130.34.95.43)	Al
31	20	30	6909	jeong	dummy	2	2008/5/30/23:0:42(172.16.44.137)	Ta
31	30	32	6909	jeong	dummy	0	2008/5/31/11:50:50(172.16.44.137)	0