1	22	38	6909	takeshita	dummy	2	2008/11/28/12:10:24(130.34.95.37)	Ir
-8	12	24	6936	kawaguchi	dummy	2	2008/11/28/16:23:0(130.34.95.43)	Ti/C	2008/11/28/16:23:37(130.34.95.43)
-9	12	24	6936	kawaguchi	dummy	2	2008/11/28/16:23:28(130.34.95.43)	Ti/Cu	2008/12/9/8:18:6(130.34.95.43)
8	12	24	6936	kawaguchi	dummy	2	2008/11/28/16:24:5(130.34.95.43)	Ti/Cu
2	28	42	6898	kirita	dummy	2	2008/11/28/17:42:1(130.34.95.28)	SiN
1	0	14	6936	honjoya	dummy	0	2008/11/30/3:2:18(130.34.95.43)	Ti/SiO2
1	38	44	6909	noriki	dummy	0	2008/12/1/10:7:4(130.34.95.37)	Cu
-3	38	41	6421	iwanaga	dummy	0	2008/12/1/12:27:58(130.34.123.164)	0	2008/12/1/12:28:23(130.34.123.164)
-3	38	41	6421	iwanaga	dummy	0	2008/12/1/12:28:41(130.34.123.164)	0	2008/12/3/10:21:16(130.34.123.164)
-2	16	28	7122	akiyama	dummy	0	2008/12/1/13:24:10(130.34.75.252)	0	2008/12/1/13:24:17(130.34.75.252)
2	18	28	7122	akiyama	dummy	0	2008/12/1/13:24:43(130.34.75.252)	Cu
-2	42	48	6937	Y.M.LEE	dummy	2	2008/12/1/15:44:46(130.34.95.43)	Al	2008/12/2/9:43:51(130.34.95.43)
-3	0	4	6937	Y.M.LEE	dummy	2	2008/12/1/15:45:21(130.34.95.43)	Al	2008/12/2/9:44:30(130.34.95.43)
3	18	28	6937	makihata	dummy	0	2008/12/1/15:50:24(130.34.95.43)	Al/Au
-3	4	18	6898	kirita	dummy	2	2008/12/1/19:6:25(130.34.95.28)	SiN	2008/12/1/19:6:44(130.34.95.28)
-3	4	18	6898	kirita	dummy	0	2008/12/1/19:7:7(130.34.95.28)	SiN	2008/12/2/12:56:13(130.34.95.28)
1	44	48	6909	s.kanno	dummy	0	2008/12/1/20:41:51(130.34.95.37)	SiO2
2	0	6	6909	s.kanno	dummy	0	2008/12/1/20:42:19(130.34.95.37)	SiO2
-4	22	38	6909	takeshita	dummy	2	2008/12/1/22:34:26(130.34.95.37)	Ir	2008/12/1/22:36:42(130.34.95.37)
-4	22	36	6909	takeshita	dummy	2	2008/12/1/22:36:56(130.34.95.37)	Ir	2008/12/1/23:6:39(130.34.95.37)
4	18	32	6909	takeshita	dummy	2	2008/12/1/23:7:15(130.34.95.37)	Ir
3	28	38	6937	Y.M.LEE	dummy	2	2008/12/2/9:44:20(130.34.95.43)	Al
2	42	48	6898	Yasuda	dummy	0	2008/12/2/12:56:35(130.34.95.28)	SiN
-3	0	8	6898	Yasuda	dummy	0	2008/12/2/12:56:58(130.34.95.28)	SiN	2008/12/2/23:52:57(172.16.44.145)
5	26	38	4771	tachihara	dummy	0	2008/12/2/18:46:29(130.34.95.21)	Al
-4	34	44	7281	takano	dummy	0	2008/12/2/20:4:54(130.34.77.72)	SiO2	2008/12/2/21:0:15(130.34.77.72)
3	0	3	6898	yasuda	dummy	0	2008/12/2/23:53:18(172.16.44.145)	SiN
3	38	40	6937	Y.M.LEE	dummy	0	2008/12/3/10:26:45(130.34.95.43)	0
-5	14	26	6908	konno	dummy	0	2008/12/3/13:13:19(172.16.44.146)	Al	2008/12/3/14:22:33(172.16.44.146)
4	0	12	6909	noriki	dummy	2	2008/12/3/17:59:40(172.16.44.145)	ti/cu
-3	44	48	6909	noriki	dummy	0	2008/12/3/19:8:29(172.16.44.145)	0	2008/12/3/19:17:44(172.16.44.145)
3	42	48	6909	noriki	dummy	0	2008/12/3/19:17:56(172.16.44.145)	0
-4	32	38	6909	takeshita	dummy	0	2008/12/3/21:19:59(130.34.95.37)	Ir、使用後元のターゲットに戻します	2008/12/4/16:57:22(172.16.44.146)
4	12	18	6909	noriki	dummy	0	2008/12/3/22:28:47(172.16.44.146)	0
4	38	44	6937	nakamura	dummy	0	2008/12/3/23:5:42(130.34.95.43)	Cu Ti
4	32	36	6909	takeshita	dummy	0	2008/12/3/21:19:59(130.34.95.37)	Ir、使用後元のターゲットに戻します
5	18	20	6937	makihata	dummy	0	2008/12/5/6:56:30(130.34.94.141)	remove al target
7	0	18	6909	noriki	dummy	0	2008/12/6/16:1:58(172.16.44.146)	ti/cu
-7	18	24	6909	noriki	dummy	0	2008/12/7/0:42:15(130.34.95.37)	Ti/Cu	2008/12/7/10:17:28(172.16.44.146)
7	18	23	6909	noriki	dummy	0	2008/12/7/0:42:15(130.34.95.37)	Ti/Cu
-9	24	36	6908	konno	dummy	0	2008/12/8/9:52:53(172.16.44.146)	Al/Ti	2008/12/9/16:21:23(172.16.44.146)
-10	28	42	6937	JaeWung Lee	dummy	2	2008/12/8/10:15:47(172.16.44.151)	Ge target	2008/12/10/13:43:49(172.16.44.151)
9	36	46	4830	sasaki	dummy	2	2008/12/8/15:48:50(130.34.95.30)	W
-8	32	44	7122	akiyama	dummy	0	2008/12/8/15:57:6(130.34.75.252)	0	2008/12/8/17:15:41(130.34.75.252)
8	32	37	7122	akiyama	dummy	0	2008/12/8/15:57:6(130.34.75.252)	0
8	37	44	7122	akiyama	dummy	0	2008/12/8/17:15:59(130.34.75.252)	Cu
-11	26	34	6968	inomata	dummy	0	2008/12/8/17:57:29(130.34.88.130)	SiO2	2008/12/11/10:58:4(130.34.88.130)
9	12	19	6936	kawaguchi	dummy	2	2008/11/28/16:23:28(130.34.95.43)	Ti/Cu
-12	30	48	6936	honjoya	dummy	0	2008/12/9/9:45:10(130.34.95.43)	Ti/SiO2	2008/12/10/9:29:22(130.34.95.43)
10	4	20	6936	honjoya	dummy	0	2008/12/9/9:47:20(130.34.95.43)	Ti/SiO2
9	24	35	6908	konno	dummy	0	2008/12/8/9:52:53(172.16.44.146)	Al/Ti
10	20	23	6936	honjoya	dummy	0	2008/12/10/2:59:28(130.34.95.43)	Ti/SiO2
10	28	30	6937	JaeWung Lee	dummy	2	2008/12/8/10:15:47(172.16.44.151)	Ge target
10	32	43	6937	JaeWung Lee	dummy	2	2008/12/10/13:45:16(172.16.44.151)	Ge target
10	30	32	6937	JaeWung Lee	dummy	2	2008/12/10/13:47:25(172.16.44.151)	Ge target
-11	16	26	6936	kawaguchi	dummy	0	2008/12/10/15:27:54(130.34.95.43)	0	2008/12/11/9:24:40(130.34.95.43)
-11	40	48	6936	kawaguchi	dummy	0	2008/12/10/15:29:5(130.34.95.43)	Cu/Ti	2008/12/11/17:1:10(130.34.95.43)
11	12	16	6936	kawaguchi	dummy	0	2008/12/10/15:29:23(130.34.95.43)	Cu/Ti
12	0	4	6936	kawaguchi	dummy	0	2008/12/10/15:29:39(130.34.95.43)	Cu/Ti
11	16	21	6936	kawaguchi	dummy	0	2008/12/10/15:27:54(130.34.95.43)	0
13	34	42	6968	inomata	dummy	0	2008/12/11/10:59:51(130.34.88.130)	SiO2
11	28	38	4830	sasaki	dummy	2	2008/12/11/11:43:41(130.34.95.30)	W
11	38	40	4830	sasaki	dummy	0	2008/12/11/17:54:33(172.16.44.146)	0
-12	18	26	7281	date	dummy	2	2008/12/11/23:41:14(130.34.77.72)	sio2	2008/12/12/8:1:31(130.34.77.72)
12	18	19	7281	date	dummy	2	2008/12/11/23:41:14(130.34.77.72)	sio2
12	24	34	7281	date	dummy	2	2008/12/12/8:4:34(130.34.77.72)	sio2
-17	38	41	6421	iwanaga	dummy	0	2008/12/12/11:27:27(130.34.123.164)	0	2008/12/16/11:0:23(130.34.123.164)
12	34	36	7281	date	dummy	0	2008/12/12/13:48:20(130.34.77.72)	0
-14	40	48	6936	honjoya	dummy	0	2008/12/13/0:55:23(130.34.95.43)	Al	2008/12/14/19:5:37(130.34.95.43)
15	0	6	6936	honjoya	dummy	0	2008/12/13/0:55:49(130.34.95.43)	Al
13	10	12	6945	mori	dummy	2	2008/12/13/4:0:10(130.34.95.43)	Al
13	12	18	6945	mori	dummy	0	2008/12/13/4:0:49(130.34.95.43)	Al
13	18	20	6945	mori	dummy	0	2008/12/13/4:1:11(130.34.95.43)	Al
13	27	30	6945	mori	dummy	0	2008/12/13/13:0:41(130.34.95.48)	0
-18	23	25	3586	itasaka	dummy	2	2008/12/13/14:44:27(130.34.95.17)	Tiを#2へ移動	2008/12/15/13:46:59(130.34.95.17)
14	40	41	6936	honjoya	dummy	0	2008/12/13/0:55:23(130.34.95.43)	Al
15	6	12	6936	honjoya	dummy	0	2008/12/14/19:5:58(130.34.95.43)	Al
15	12	14	6936	honjoya	dummy	0	2008/12/14/23:27:3(130.34.95.43)	Al
15	18	32	6936	Matsuzaki	dummy	0	2008/12/15/7:14:45(130.34.95.43)	0
15	17	18	6936	honjoya	dummy	0	2008/12/15/8:36:44(130.34.95.43)	0
-16	28	42	6936	honjoya	dummy	0	2008/12/15/8:44:21(130.34.95.43)	Al	2008/12/15/16:28:41(130.34.95.43)
-16	26	28	6936	honjoya	dummy	0	2008/12/15/8:51:37(130.34.95.43)	Al	2008/12/15/16:28:25(130.34.95.43)
-18	32	34	3586	itasaka	dummy	2	2008/12/15/11:17:4(130.34.95.17)	Tiをもどします	2008/12/15/13:47:32(130.34.95.17)
19	23	25	3586	itasaka	dummy	2	2008/12/15/13:46:55(130.34.95.17)	Tiを#2へ移動
-16	33	47	6936	honjoya	dummy	0	2008/12/15/16:29:15(130.34.95.43)	Al	2008/12/16/12:34:26(130.34.95.43)
-16	0	14	6936	kawaguchi	dummy	2	2008/12/15/17:32:39(130.34.95.43)	Cu/Ti	2008/12/15/23:36:25(130.34.95.43)
-17	28	38	4830	sasaki	dummy	2	2008/12/15/17:35:59(130.34.95.30)	W	2008/12/17/16:41:27(130.34.95.30)
16	14	28	6936	kawaguchi	dummy	0	2008/12/15/23:38:27(130.34.95.43)	Cu/Ti
16	0	14	6936	honjoya	dummy	0	2008/12/15/23:49:10(130.34.95.43)	Al
16	32	48	4771	PHAN	dummy	2	2008/12/16/13:33:38(130.34.95.21)	Fe78Si10B12 target
17	38	48	4771	PHAN	dummy	0	2008/12/16/13:34:46(130.34.95.21)	0
-18	28	48	4771	PHAN	dummy	0	2008/12/16/13:35:25(130.34.95.21)	0	2008/12/16/16:23:4(130.34.95.21)
17	14	28	6936	kawaguchi	dummy	0	2008/12/16/15:13:42(130.34.95.43)	Cu/Ti
-18	16	28	6936	kawaguchi	dummy	0	2008/12/16/15:13:54(130.34.95.43)	0	2008/12/18/9:55:42(130.34.95.43)
17	0	12	6937	makihata	dummy	0	2008/12/16/16:57:44(130.34.95.43)	Al
17	28	36	4830	sasaki	dummy	2	2008/12/15/17:35:59(130.34.95.30)	W
18	16	22	6936	kawaguchi	dummy	0	2008/12/16/15:13:54(130.34.95.43)	0
-18	28	40	6936	kawaguchi	dummy	0	2008/12/18/10:6:27(130.34.95.43)	Cu/Ti	2008/12/18/14:19:4(130.34.95.43)
18	28	31	6936	kawaguchi	dummy	0	2008/12/18/10:6:27(130.34.95.43)	Cu/Ti
-19	32	42	4830	sasaki	dummy	2	2008/12/18/15:41:38(130.34.95.30)	W	2008/12/19/3:8:22(130.34.95.30)
20	23	25	3586	higuchi	dummy	2	2008/12/19/14:38:20(130.34.95.17)	Ptとりはずし
-19	36	46	4830	sasaki	dummy	2	2008/12/19/17:46:11(130.34.95.30)	W	2008/12/19/18:5:28(172.16.44.146)
19	36	39	4830	sasaki	dummy	2	2008/12/19/17:46:11(130.34.95.30)	W
20	38	48	4830	sasaki	dummy	2	2008/12/20/18:7:40(130.34.95.30)	W
-21	30	40	7281	takano	dummy	0	2008/12/20/23:11:27(130.34.77.72)	SiO2	2008/12/21/13:34:21(130.34.77.72)
-21	34	44	7281	takano	dummy	0	2008/12/21/13:34:41(130.34.77.72)	SiO2	2008/12/21/13:54:42(130.34.77.72)
-22	18	30	6937	makihata	dummy	0	2008/12/21/14:16:14(130.34.95.43)	Al	2008/12/22/2:28:39(130.34.94.145)
22	19	32	6937	makihata	dummy	0	2008/12/22/2:29:9(130.34.94.145)	Al
-22	42	48	6936	honjoya	dummy	0	2008/12/22/8:0:19(130.34.95.43)	Ti/SiO2	2008/12/22/8:5:4(130.34.95.43)
-23	0	12	6936	honjoya	dummy	0	2008/12/22/8:1:1(130.34.95.43)	Ti/SiO2	2008/12/22/20:40:37(130.34.95.43)
-22	43	48	6936	honjoya	dummy	2	2008/12/22/8:5:59(130.34.95.43)	Ge→Ti	2008/12/22/20:40:22(130.34.95.43)
22	32	34	6937	makihata	dummy	0	2008/12/22/14:55:46(130.34.95.43)	0
-23	26	48	4771	PHAN	dummy	1	2008/12/22/16:26:51(130.34.95.21)	Fe78Si10B12 target	2008/12/22/16:27:38(130.34.95.21)
-23	26	48	4771	PHAN	dummy	2	2008/12/22/16:28:10(130.34.95.21)	Fe78Si10B12 target	2008/12/22/17:17:20(130.34.95.21)
24	24	34	6937	JaeWung Lee	dummy	0	2008/12/22/18:0:38(172.16.44.143)	Ge sputtering
22	43	44	6936	honjoya	dummy	2	2008/12/22/8:5:59(130.34.95.43)	Ge→Ti
23	8	26	6936	honjoya	dummy	0	2008/12/22/20:41:32(130.34.95.43)	Ti/SiO2
22	44	46	6936	honjoya	dummy	2	2008/12/22/20:42:55(130.34.95.43)	Al→Ti
23	26	28	6936	honjoya	dummy	0	2008/12/23/10:48:39(130.34.95.43)	0
-25	20	28	6937	nakamura	dummy	0	2008/12/23/16:45:43(130.34.95.43)	Ti/Cu	2008/12/23/16:46:2(130.34.95.43)
25	20	28	6937	nakamura	dummy	0	2008/12/23/16:46:46(130.34.95.43)	Ti/Cu
24	34	40	6937	JaeWung Lee	dummy	0	2008/12/24/10:38:49(172.16.44.151)	G