-1	39	41	6421	iwanaga	dummy	0	2008/9/30/11:8:29(130.34.123.164)	0	2008/10/1/10:11:4(130.34.123.164)
-1	26	36	7281	takano	dummy	0	2008/9/30/17:2:52(130.34.77.72)	SiO2	2008/9/30/17:38:59(130.34.77.72)
-1	28	38	7281	takano	dummy	0	2008/9/30/17:39:38(130.34.77.72)	SiO2	2008/9/30/17:41:45(130.34.77.72)
1	26	36	7281	takano	dummy	0	2008/9/30/17:42:5(130.34.77.72)	SiO2
1	41	48	6936	tomono	dummy	0	2008/10/1/10:8:6(130.34.95.43)	Al
1	36	41	6937	Y.M.LEE	dummy	2	2008/10/1/10:52:22(130.34.95.43)	Al
2	30	38	6956	chiba	dummy	0	2008/10/1/18:24:7(130.34.95.38)	Al
3	38	46	6937	k.hirano	dummy	0	2008/10/3/18:11:38(130.34.95.43)	3.Ge
5	36	46	6937	hino	dummy	0	2008/10/5/14:32:17(130.34.95.43)	Mo
6	21	31	6908	konno	dummy	0	2008/10/6/7:28:36(130.34.95.37)	Al
6	40	44	6968	narumi	dummy	1	2008/10/6/15:6:46(130.34.88.130)	0
-9	8	18	6936	kawaguchi	dummy	2	2008/10/8/10:37:37(130.34.95.43)	Cu	2008/10/8/16:8:22(130.34.95.43)
8	30	42	6909	T.Konno	dummy	0	2008/10/8/14:43:18(172.16.44.149)	Ta/Cu
9	0	16	6936	honjoya	dummy	0	2008/10/8/16:9:18(130.34.95.43)	Ti/SiO2
-9	26	34	4771	tachihara	dummy	0	2008/10/8/18:22:20(130.34.95.21)	Al	2008/10/8/19:58:49(130.34.95.21)
-9	32	40	4771	tachihara	dummy	0	2008/10/8/19:59:19(130.34.95.21)	Al	2008/10/9/9:37:26(130.34.95.21)
9	20	32	6909	T.Konno	dummy	0	2008/10/8/21:52:2(172.16.44.149)	Ta/Cu
10	32	44	6909	jeong	dummy	2	2008/10/9/11:56:13(172.16.44.145)	Ta/Cu
-9	32	40	4771	sano	dummy	0	2008/10/9/13:33:23(130.34.95.21)	Al	2008/10/9/15:2:3(130.34.95.21)
9	32	33	4771	sano	dummy	0	2008/10/9/13:33:23(130.34.95.21)	Al
9	33	44	4771	sano	dummy	0	2008/10/9/15:2:48(130.34.95.21)	Al
10	16	26	7122	akiyama	dummy	0	2008/10/9/15:50:22(130.34.75.252)	Cu
10	0	12	6909	T.Konno	dummy	0	2008/10/9/16:47:39(172.16.44.146)	Ta/Cu
11	14	32	6937	honjoya	dummy	0	2008/10/11/4:0:8(130.34.95.43)	Ti/SiO2
14	22	34	6909	jeong	dummy	0	2008/10/13/17:13:45(172.16.44.145)	Ta/Cu
14	34	46	6898	Kirita	dummy	0	2008/10/14/12:23:21(130.34.95.28)	Ta/Cu
-15	17	30	6908	konn0	dummy	0	2008/10/14/15:33:45(172.16.44.146)	Ta	2008/10/14/15:33:56(172.16.44.146)
15	18	30	6908	konno	dummy	0	2008/10/14/15:34:12(172.16.44.146)	Ta
14	46	48	6898	Kirita	dummy	0	2008/10/14/21:53:5(130.34.95.28)	Ta
15	30	42	6909	noriki	dummy	0	2008/10/14/22:14:6(172.16.44.145)	Ta/Cu
15	42	48	6936	kawaguchi	dummy	0	2008/10/15/13:49:58(130.34.95.43)	Cu
16	0	2	6936	kawaguchi	dummy	0	2008/10/15/13:50:27(130.34.95.43)	Cu
-16	20	30	6937	hino	dummy	0	2008/10/15/17:30:42(130.34.95.43)	0	2008/10/15/17:30:49(130.34.95.43)
-16	20	30	6937	hino	dummy	0	2008/10/15/17:31:14(130.34.95.43)	3.Cu -> Mo	2008/10/15/17:32:19(130.34.95.43)
-16	24	34	6937	hino	dummy	0	2008/10/15/17:32:41(130.34.95.43)	3.Cu --> Mo	2008/10/15/17:36:37(130.34.95.43)
16	20	30	6937	hino	dummy	0	2008/10/15/17:43:33(130.34.95.43)	3.Cu --> Mo
16	34	36	6909	noriki	dummy	2	2008/10/15/20:30:11(172.16.44.146)	Ta取り外し
16	2	4	6936	kawaguchi	dummy	0	2008/10/15/21:52:25(130.34.95.43)	Cu
16	4	14	6936	kawaguchi	dummy	0	2008/10/16/1:58:14(172.16.44.149)	0
16	30	34	6909	jeong	dummy	0	2008/10/16/10:3:13(130.34.95.37)	SiO2
16	36	42	6909	jeong	dummy	0	2008/10/16/10:3:31(130.34.95.37)	SiO2
16	42	44	6909	jeong	dummy	0	2008/10/16/19:54:8(172.16.44.146)	0
17	26	36	6937	hino	dummy	0	2008/10/17/11:8:44(130.34.95.43)	Mo
20	26	36	4771	tachihara	dummy	0	2008/10/17/17:48:31(130.34.95.21)	Al/SiO2
-17	36	48	6937	KIM	dummy	0	2008/10/17/18:14:22(172.16.44.146)	0	2008/10/17/18:14:42(172.16.44.146)
17	36	39	6937	KIM	dummy	0	2008/10/17/18:14:22(172.16.44.146)	0
17	39	48	6937	kim	dummy	0	2008/10/17/18:15:2(172.16.44.146)	Al
20	36	46	4404	Ha, Jun-SeoK	dummy	0	2008/10/17/21:52:9(130.34.248.197)	0
-18	22	34	6909	jeong	dummy	0	2008/10/17/23:1:16(172.16.44.145)	0	2008/10/18/4:11:29(172.16.44.146)
-18	20	32	6909	jeong	dummy	0	2008/10/18/4:11:57(172.16.44.146)	Al	2008/10/18/4:12:55(172.16.44.146)
-18	22	34	6909	jeong	dummy	0	2008/10/18/4:13:16(172.16.44.146)	Al	2008/10/18/4:29:32(172.16.44.146)
-18	10	20	6908	noriki	dummy	0	2008/10/18/4:13:44(172.16.44.146)	Al	2008/10/18/4:29:28(172.16.44.146)
18	10	11	6908	noriki	dummy	0	2008/10/18/4:13:44(172.16.44.146)	Al
-22	32	44	6937	Y.M.LEE	dummy	0	2008/10/20/17:7:30(130.34.95.43)	Al	2008/10/21/23:43:15(130.34.95.43)
21	20	32	4771	tachihara	dummy	0	2008/10/20/17:58:17(130.34.95.21)	Al
-21	36	48	6937	H KIM	dummy	0	2008/10/20/23:8:57(130.34.95.43)	Al	2008/10/21/12:30:0(130.34.95.43)
-23	18	32	6937	hino	dummy	0	2008/10/21/11:57:38(130.34.95.43)	SiO2	2008/10/21/15:56:34(130.34.95.43)
-22	18	32	6937	hino	dummy	0	2008/10/21/15:56:30(130.34.95.43)	SiO2	2008/10/22/0:32:5(130.34.95.43)
21	40	48	4404	LEE	dummy	0	2008/10/21/19:19:38(130.34.248.197)	SiO2
22	6	18	6909	jeong	dummy	0	2008/10/21/23:15:32(172.16.44.146)	Al
-23	32	44	6937	Y.M.LEE	dummy	0	2008/10/21/23:43:45(130.34.95.43)	0	2008/10/21/23:47:4(130.34.95.43)
22	32	44	6937	Y.M.LEE	dummy	0	2008/10/21/23:47:29(130.34.95.43)	Al
23	18	32	6937	hino	dummy	0	2008/10/22/0:32:0(130.34.95.43)	SiO2
22	18	20	6909	jeong	dummy	0	2008/10/22/8:44:57(172.16.44.145)	0
-24	19	29	6908	konno	dummy	0	2008/10/22/12:16:53(172.16.44.146)	Al	2008/10/22/13:27:2(172.16.44.145)
22	30	32	6937	Y.M.LEE	dummy	0	2008/10/22/14:38:11(130.34.95.43)	0
23	0	8	6936	kawaguchi	dummy	2	2008/10/22/19:22:0(130.34.95.43)	Cu
23	8	16	6936	kawaguchi	dummy	0	2008/10/23/5:54:48(130.34.95.43)	0
24	22	34	7122	akiyama	dummy	2	2008/10/23/11:25:44(130.34.75.252)	3.Mo->Cu
24	36	46	4771	PHAN	dummy	0	2008/10/23/17:53:48(130.34.95.21)	Cu
24	10	22	6909	jeong	dummy	0	2008/10/23/23:42:50(172.16.44.146)	Al
25	26	36	6909	kaiho	dummy	2	2008/10/24/20:19:28(130.34.95.37)	Cu/Ta
25	36	38	6909	kaiho	dummy	0	2008/10/24/20:19:44(130.34.95.37)	0
-28	28	42	6937	makihata	dummy	0	2008/10/25/9:50:57(130.34.94.144)	Cr/Au	2008/10/25/9:52:51(130.34.94.144)
-28	27	43	6937	makihata	dummy	2	2008/10/25/9:58:53(130.34.94.144)	Etching/Cr/Au	2008/10/28/14:10:18(130.34.95.43)
-26	10	26	6909	jeong	dummy	0	2008/10/25/17:33:38(172.16.44.146)	Cu	2008/10/26/0:42:53(172.16.44.145)
25	46	48	6909	noriki	dummy	0	2008/10/25/18:58:15(172.16.44.146)	0
-26	0	8	6909	jeong	dummy	0	2008/10/25/18:58:53(172.16.44.146)	Cu	2008/10/25/18:59:12(172.16.44.146)
26	0	6	6909	noriki	dummy	0	2008/10/25/18:59:38(172.16.44.146)	Cu
27	19	26	6909	meshida	dummy	2	2008/10/27/9:33:31(172.16.44.146)	Cu/Ta取り外し
27	26	30	6909	meshida	dummy	0	2008/10/27/9:40:41(130.34.95.37)	Cu/Ta
29	26	35	6956	usuba	dummy	0	2008/10/27/10:50:15(130.34.95.38)	Al
27	30	42	6909	jeong	dummy	2	2008/10/27/11:41:27(130.34.95.37)	Al
27	42	48	6936	kawaguchi	dummy	0	2008/10/27/13:34:0(130.34.95.43)	Ti/Cu
28	0	4	6936	kawaguchi	dummy	0	2008/10/27/13:35:0(130.34.95.43)	Ti/Cu
28	43	48	6909	kaiho	dummy	2	2008/10/27/15:6:55(130.34.95.37)	Ta/Cu
29	0	4	6909	kaiho	dummy	2	2008/10/27/15:7:20(130.34.95.37)	Ta/Cu
-29	16	26	4771	tachihara	dummy	0	2008/10/27/17:31:43(130.34.95.21)	Al	2008/10/28/13:31:8(130.34.95.21)
30	38	41	6421	iwanaga	dummy	0	2008/10/27/17:32:40(130.34.123.164)	0
28	4	6	6936	kawaguchi	dummy	0	2008/10/27/21:58:8(130.34.95.43)	0
28	27	31	6937	makihata	dummy	2	2008/10/25/9:58:53(130.34.94.144)	Etching/Cr/Au
28	36	43	6937	makihata	dummy	0	2008/10/28/14:10:53(130.34.95.43)	Etching/Cr/Au
29	10	24	6909	jeong	dummy	0	2008/10/28/14:30:3(130.34.95.37)	Al
-28	34	36	6936	kawaguchi	dummy	2	2008/10/28/14:41:28(130.34.95.43)	ターゲット交換	2008/10/28/14:57:30(130.34.95.43)
29	40	48	6909	kaiho	dummy	2	2008/10/29/2:18:21(172.16.44.146)	Cu/Ta
30	0	6	6909	kaiho	dummy	2	2008/10/29/2:18:47(172.16.44.146)	Cu/Ta
29	24	26	6909	jeong	dummy	0	2008/10/29/4:17:19(172.16.44.146)	0
-31	22	34	5318	sano	dummy	2	2008/10/30/14:19:56(130.34.231.209)	Al	2008/10/31/0:35:28(130.34.231.209)
-31	22	32	5318	sano	dummy	2	2008/10/31/0:36:3(130.34.231.209)	Al	2008/10/31/10:19:7(172.16.44.146)
31	22	23	5318	sano	dummy	2	2008/10/31/0:36:3(130.34.231.209)	Al
-31	23	34	5318	sano	dummy	2	2008/10/31/10:20:4(172.16.44.146)	Al	2008/10/31/14:30:5(172.16.44.146)
-31	40	48	6936	kawaguchi	dummy	2	2008/10/31/12:56:54(130.34.95.43)	Ti/Cu	2008/10/31/15:39:24(130.34.95.43)
31	23	31	5318	sano	dummy	2	2008/10/31/10:20:4(172.16.44.146)	Al
-31	31	40	5318	sano	dummy	2	2008/10/31/14:30:43(172.16.44.146)	Al,W	2008/10/31/14:40:19(172.16.44.146)
31	31	32	5318	sano	dummy	2	2008/10/31/14:30:43(172.16.44.146)	Al,W