1	27	40	4771	ueda,suita	dummy	0	2010/2/26/17:38:17(130.34.95.21)	Pt@550℃
1	46	48	6937	M.Moriyama	dummy	0	2010/3/1/23:16:49(130.34.95.44)	Pt/Ti@550℃ with Yanagida 田中秀治先生
2	0	6	6937	M.Moriyama	dummy	0	2010/3/1/23:17:11(130.34.95.44)	Pt/Ti@550℃ with Yanagida 田中秀治先生
-2	28	32	6937	hino	dummy	0	2010/3/2/10:46:42(130.34.94.147)	Mo@300C	2010/3/2/12:20:19(130.34.95.43)
2	30	34	6937	hino	dummy	0	2010/3/2/12:20:39(130.34.95.43)	Mo@300C
2	34	36	6937	hino	dummy	0	2010/3/2/12:21:31(130.34.95.43)	0
-8	22	38	6937	T. Matsumura	dummy	0	2010/3/4/12:38:4(130.34.95.43)	Ru @ 300C	2010/3/5/17:39:39(130.34.95.44)
4	34	42	6937	M.Moriyama	dummy	0	2010/3/4/16:24:31(130.34.95.43)	Pt/Ti@550℃ 2 sets
9	18	34	6937	T.Matsumura	dummy	0	2010/3/5/17:39:34(130.34.95.44)	Ru@300C
7	46	48	6937	M.Moriyama	dummy	0	2010/3/7/23:11:52(130.34.95.44)	Pt/Ti@550℃ with Matsuo 吉田先生承認
8	0	6	6937	M.Moriyama	dummy	0	2010/3/7/23:12:16(130.34.95.44)	Pt/Ti@550℃ with Matsuo 吉田先生承認
9	34	42	6937	M.Moriyama	dummy	0	2010/3/9/5:15:0(130.34.95.43)	Pt/Ti@550℃ 2sets
11	0	8	6937	M.Moriyama	dummy	0	2010/3/10/23:45:25(130.34.95.43)	Pt/Ti@550℃ 2sets 田中秀治先生承認
-12	38	44	4771	ueda	dummy	0	2010/3/12/15:54:15(130.34.95.21)	Pt/Ti@R.T.	2010/3/12/19:9:2(130.34.95.21)
12	38	41	4771	ueda	dummy	0	2010/3/12/15:54:15(130.34.95.21)	Pt/Ti@R.T.
12	41	44	4771	ueda	dummy	0	2010/3/12/19:51:27(130.34.95.21)	0
26	35	42	6937	akiyama	dummy	0	2010/3/26/10:33:21(130.34.95.43)	0
26	34	35	6937	akiyama	dummy	0	2010/3/26/10:40:28(130.34.95.43)	0
26	32	34	6937	akiyama	dummy	0	2010/3/26/15:17:40(130.34.95.43)	0
26	42	44	6937	akiyama	dummy	0	2010/3/26/19:49:45(130.34.95.43)	0
26	44	45	6937	akiyama, makihata	dummy	0	2010/3/26/22:0:24(130.34.95.44)	秋山承認
29	38	48	6937	M.Moriyama	dummy	1	2010/3/29/18:28:10(130.34.95.43)	チャンバー開放
-30	0	32	6937	M.Moriyama	dummy	0	2010/3/29/18:28:55(130.34.95.43)	チャンバーベーク	2010/3/29/18:29:1(130.34.95.43)
30	0	30	6937	M.Moriyama	dummy	1	2010/3/29/18:29:23(130.34.95.43)	チャンバーベーク