-3	28	34	6937	kim	dummy	0	2009/7/30/21:23:41(130.34.95.43)	Pt/Ti@600	2009/8/3/9:55:27(130.34.95.43)
1	32	40	6937	kim	dummy	0	2009/8/3/16:9:33(130.34.95.44)	;pt/ti@600
-6	18	34	6936	Lin	dummy	0	2009/8/4/11:22:5(130.34.95.44)	0	2009/8/4/11:22:46(130.34.95.44)
6	18	34	6936	Lin	dummy	0	2009/8/4/11:23:32(130.34.95.44)	Ru
4	28	36	6937	kim	dummy	0	2009/8/4/12:40:58(130.34.95.43)	Pt/Ti@600
5	30	38	6937	M.Moriyama	dummy	0	2009/8/5/12:20:1(130.34.95.43)	Pt@550℃
6	34	40	6937	T. Matsumura	dummy	0	2009/8/6/8:56:0(130.34.95.43)	Ru @ 300C
-6	40	48	6937	T. Matsumura	dummy	1	2009/8/6/11:26:56(130.34.95.44)	Main Chamber Open	2009/8/6/20:47:45(130.34.95.43)
-7	0	20	6937	T. Matsumura	dummy	1	2009/8/6/11:27:32(130.34.95.44)	Main Chamber Bake and Cooling	2009/8/6/20:47:50(130.34.95.43)
6	40	44	6937	T. Matsumura	dummy	1	2009/8/6/11:26:56(130.34.95.44)	Main Chamber Open
7	0	20	6937	T. Matsumura	dummy	1	2009/8/6/20:48:41(130.34.95.43)	Chamber Bake 田中（秀）先生承認済み
6	44	48	6937	T. Matsumura	dummy	1	2009/8/6/20:49:18(130.34.95.43)	Chamber Bake 田中（秀）先生承認済み
7	20	24	6937	T. Matsumura	dummy	1	2009/8/7/10:19:9(130.34.95.43)	0
18	20	26	6937	T. Matsumura	dummy	0	2009/8/18/10:5:59(130.34.95.43)	Ru @ 300C
25	30	40	6937	akiyama	dummy	0	2009/8/24/16:7:44(130.34.95.43)	Ti, Pt
-27	26	34	6937	akiyama	dummy	0	2009/8/25/16:17:53(130.34.95.43)	Ti, Pt@600C	2009/8/25/16:18:5(130.34.95.43)
-26	26	34	6937	akiyama	dummy	0	2009/8/25/16:18:37(130.34.95.43)	Ti, Pt@600C	2009/8/26/12:11:56(130.34.95.43)
25	40	42	6937	T. Matsumura	dummy	0	2009/8/25/18:49:2(130.34.95.43)	Ru
26	26	27	6937	akiyama	dummy	0	2009/8/25/16:18:37(130.34.95.43)	Ti, Pt@600C
26	28	36	6937	akiyama	dummy	0	2009/8/26/12:12:37(130.34.95.43)	Ti, Pt@600C
26	36	40	6937	akiyama	dummy	0	2009/8/26/17:41:11(130.34.95.44)	0
27	36	44	6937	kim	dummy	0	2009/8/27/10:31:47(130.34.95.43)	Pt/Ti@600
-28	17	25	6937	kim	dummy	0	2009/8/27/10:32:27(130.34.95.43)	Pt/Ti@600	2009/8/27/10:39:31(130.34.95.43)
28	28	36	6937	kim	dummy	0	2009/8/27/10:32:55(130.34.95.43)	Pt/Ti@600
28	18	24	6937	kim	dummy	0	2009/8/27/10:40:11(130.34.95.43)	Pt/Ti@600
27	30	36	6937	T. Matsumura	dummy	0	2009/8/27/12:29:34(130.34.95.44)	Ru @ 300C
27	28	30	6937	T. Matsumura	dummy	0	2009/8/27/13:8:9(130.34.95.43)	Ru @ 300C
28	36	48	6937	T. Matsumura	dummy	1	2009/8/27/16:10:36(130.34.95.43)	停電のため立ち下げ
29	0	48	6937	T. Matsumura	dummy	1	2009/8/28/15:59:56(130.34.95.43)	停電
30	0	48	6937	T. Matsumura	dummy	1	2009/8/28/16:0:24(130.34.95.43)	停電
31	0	48	6937	T. Matsumura	dummy	1	2009/8/28/16:1:32(130.34.95.43)	立ち上げ（チャンバーベーク）