1	38	44	6937	akiyama	dummy	0	2008/9/1/18:40:17(172.16.44.130)	TiO2ターゲット取り付け
1	44	48	6937	akiyama	dummy	1	2008/9/2/12:16:50(130.34.95.43)	Chamber baking
2	0	30	6937	akiyama	dummy	1	2008/9/2/12:17:20(130.34.95.43)	Chamber baking and cooling down
2	31	38	6937	akiyama	dummy	0	2008/9/2/15:7:18(172.16.44.130)	Ti