1	16	17	6937	T. Matsumura	dummy	1	2008/8/4/12:17:42(130.34.95.43)	Shutdown
6	18	26	6937	H KIM	dummy	0	2008/8/5/21:46:0(130.34.95.43)	Pt/Ti
12	0	48	6937	Yoshida	dummy	1	2008/8/8/14:17:54(172.16.44.143)	JEOLスパッタ工事のため使用不可
8	42	46	6937	M.Moriyama	dummy	0	2008/8/8/19:50:0(130.34.95.43)	Pt@550℃
11	34	48	6937	kim	dummy	0	2008/8/11/16:11:24(130.34.95.43)	pt/ti
20	19	24	6937	M.Moriyama	dummy	0	2008/8/19/17:46:0(130.34.95.43)	Pt@550℃
27	26	34	4771	Ishikawa	dummy	0	2008/8/26/18:27:33(130.34.95.21)	Pt/Ti
28	28	34	6937	T. Matsumura	dummy	0	2008/8/28/12:57:7(130.34.95.43)	Ru @ 300C
-28	34	48	6937	T. Matsumura	dummy	1	2008/8/28/16:47:5(172.16.44.146)	0	2008/8/28/16:47:22(172.16.44.146)
28	34	36	6937	T. Matsumura	dummy	1	2008/8/28/16:47:5(172.16.44.146)	0
28	36	48	6937	T. Matsumura	dummy	0	2008/8/28/16:47:34(172.16.44.146)	0