6	24	34	6937	関	dummy	0	2006/9/13/11:22:38(130.34.95.43)	0
6	34	42	6937	関	dummy	0	2006/9/13/11:32:9(130.34.95.43)	0
-27	12	26	6937	関	dummy	1	2006/9/21/14:59:46(130.34.95.5)	0	2006/9/21/15:47:30(130.34.95.43)
-27	12	26	6937	関	dummy	0	2006/9/21/15:50:15(130.34.95.43)	0	2006/9/21/16:7:11(130.34.95.43)
28	42	46	6937	Yoshida	dummy	0	2006/9/28/16:22:45(130.34.95.43)	Ti sputter
29	20	28	6937	Yoshida	dummy	0	2006/9/28/16:24:17(130.34.95.43)	Ti/Au/Ti sputter
29	0	20	6937	Yoshida	dummy	1	2006/9/28/23:2:55(130.34.95.43)	ベーキング