3	26	32	6925	inagaki	dummy	0	2012/8/30/15:53:17(130.34.95.35)	Pt/Ti@RT
3	32	36	5810	レミ	dummy	0	2012/8/31/12:46:2(130.34.95.49)	Cr, Pt, Ti sputter
3	38	44	6925	kohiyama	dummy	0	2012/9/3/17:52:55(130.34.95.35)	Target change 1: Cr->Au
-10	26	32	6925	inagaki	dummy	0	2012/9/4/17:34:26(130.34.95.35)	Au/Pt/Ti @RT	2012/9/5/19:48:45(130.34.95.43)
-5	18	22	6925	kohiyama	dummy	0	2012/9/4/20:51:52(130.34.95.35)	0	2012/9/4/20:52:0(130.34.95.35)
5	18	22	6925	kohiyama	dummy	0	2012/9/4/20:52:17(130.34.95.35)	Au@RT
6	38	44	6898	Kimura	dummy	0	2012/9/5/18:52:40(130.34.95.28)	Ti/Pt @70deg.
-9	28	38	6925	inagaki	dummy	0	2012/9/5/19:49:36(130.34.95.43)	Au/Pt/T i@RT	2012/9/5/19:50:5(130.34.95.43)
-10	28	38	6925	inagaki	dummy	0	2012/9/5/19:50:47(130.34.95.43)	Au/Pt/Ti @RT	2012/9/10/16:24:36(130.34.95.35)
-7	18	22	6925	kohiyama	dummy	0	2012/9/6/19:44:21(130.34.95.35)	0	2012/9/6/19:45:46(130.34.95.35)
7	18	22	6925	kohiyama	dummy	0	2012/9/6/19:45:58(130.34.95.35)	Au@RT
-11	26	34	6925	inagaki	dummy	0	2012/9/10/16:24:19(130.34.95.35)	0	2012/9/10/16:24:48(130.34.95.35)
10	28	35	6925	inagaki	dummy	0	2012/9/5/19:50:47(130.34.95.43)	Au/Pt/Ti @RT
11	26	36	6925	inagaki	dummy	0	2012/9/10/16:25:21(130.34.95.35)	Au/Pt/Ti @RT
12	28	32	6925	kohiyama	dummy	0	2012/9/11/19:13:59(130.34.95.35)	Pt@RT
-12	38	42	6925	kumagai	dummy	0	2012/9/11/22:37:38(130.34.95.35)	Target change 1:Au->Ag	2012/9/11/22:41:40(130.34.95.35)
-14	38	44	6925	suzuki	dummy	0	2012/9/12/22:24:40(130.34.95.35)	Target change 3:Pt->ITO	2012/9/13/10:13:27(130.34.95.35)
-18	18	24	6925	suzuki	dummy	0	2012/9/12/22:27:4(130.34.95.35)	ITO＠200	2012/9/13/10:13:54(130.34.95.35)
-13	38	44	6925	suzuki	dummy	0	2012/9/13/10:12:42(130.34.95.35)	Target change 3:Ti->ITO	2012/9/13/15:19:5(130.34.95.35)
14	18	26	6925	suzuki	dummy	0	2012/9/13/10:13:47(130.34.95.35)	ITO＠200
13	31	36	6925	suzuki	dummy	0	2012/9/13/15:19:2(130.34.95.35)	Target change 3:Pt->ITO
-19	38	42	6925	k.konno	dummy	0	2012/9/14/20:5:12(130.34.95.35)	Target change 1:Au -> W	2012/9/18/13:34:13(130.34.95.35)
-21	18	24	6925	k.konno	dummy	0	2012/9/14/20:5:36(130.34.95.35)	W@RT	2012/9/14/20:6:10(130.34.95.35)
-20	18	24	6925	k.konno	dummy	0	2012/9/14/20:6:42(130.34.95.35)	W@RT	2012/9/19/18:1:58(130.34.95.35)
19	30	35	6925	k.konno	dummy	0	2012/9/18/13:34:9(130.34.95.35)	Target change 1:Au -> W
24	35	40	6898	miura	dummy	0	2012/9/19/14:58:41(130.34.95.28)	Target change: 3:ITO=>Ti 5:Ti=>Ag
20	22	28	6925	k.konno	dummy	0	2012/9/19/18:2:33(130.34.95.35)	W@RT
20	28	40	6925	inagaki	dummy	0	2012/9/19/20:36:20(130.34.95.35)	target change 3 W -> Pt
21	26	34	6925	inagaki	dummy	0	2012/9/19/20:36:54(130.34.95.35)	Au/Pt/Ti @RT
21	38	42	6925	suzuki	dummy	0	2012/9/20/23:30:12(130.34.95.35)	Target change 3:Pt->ITO
-24	18	24	6925	suzuki	dummy	0	2012/9/20/23:30:42(130.34.95.35)	ITO＠200	2012/9/22/16:22:24(130.34.95.35)
22	26	32	6925	suzuki	dummy	0	2012/9/21/23:35:52(130.34.95.35)	ITO＠200
26	38	42	6925	k.konno	dummy	0	2012/9/24/12:17:55(130.34.95.35)	Target change 1:Au -> W
-26	24	38	6925	kohiyama	dummy	0	2012/9/24/14:29:37(130.34.95.35)	Au@RT	2012/9/24/21:27:2(130.34.95.35)
27	24	30	6925	k.konno	dummy	0	2012/9/24/15:4:38(130.34.95.35)	W@RT
25	26	30	6898	miura	dummy	0	2012/9/24/17:10:38(130.34.95.28)	Ti/Ag@R.T.
-26	18	30	6925	kohiyama	dummy	0	2012/9/25/9:28:17(130.34.95.35)	0	2012/9/25/9:28:36(130.34.95.35)
-26	18	22	6925	kohiyama	dummy	0	2012/9/25/9:33:21(130.34.95.35)	0	2012/9/25/9:34:3(130.34.95.35)
-26	26	30	6925	kohiyama	dummy	0	2012/9/25/9:33:37(130.34.95.35)	0	2012/9/25/9:33:54(130.34.95.35)
-26	18	36	6925	kohiyama	dummy	0	2012/9/26/0:29:47(130.34.95.35)	0	2012/9/26/0:29:52(130.34.95.35)
26	18	36	6925	kohiyama	dummy	0	2012/9/26/0:30:8(130.34.95.35)	Au@RT
27	30	34	6925	k.konno	dummy	0	2012/9/27/11:19:15(130.34.95.35)	0