-2 30 36 6925 Shimizu dummy 0 2012/3/31/22:55:54(130.34.95.35) 0 2012/3/31/22:56:9(130.34.95.35) 1 30 36 6925 Shimizu dummy 0 2012/3/31/22:56:27(130.34.95.35) ITO@R.T. 2 37 43 6925 Shimizu dummy 0 2012/4/2/9:47:10(130.34.95.44) ITO@300, RT -3 18 22 6925 Shimizu dummy 0 2012/4/2/20:4:16(130.34.95.44) ITO@200 2012/4/2/20:5:57(130.34.95.44) -3 26 30 6925 Shimizu dummy 0 2012/4/2/20:6:15(130.34.95.44) 0 2012/4/3/13:18:45(130.34.95.35) -3 32 36 6925 Shimizu dummy 0 2012/4/3/13:18:42(130.34.95.35) 0 2012/4/3/16:9:12(130.34.95.35) 3 26 29 6925 Shimizu dummy 0 2012/4/2/20:6:15(130.34.95.44) 0 3 32 35 6925 Shimizu dummy 0 2012/4/3/13:18:42(130.34.95.35) 0 -3 38 42 6925 Shimizu dummy 0 2012/4/3/16:9:37(130.34.95.35) ITO@200oC 2012/4/3/18:40:21(130.34.95.35) 3 38 40 6925 Shimizu dummy 0 2012/4/3/16:9:37(130.34.95.35) ITO@200oC 4 18 22 6925 Shimizu dummy 0 2012/4/3/18:40:53(130.34.95.35) ITO@200oC -4 24 28 6925 Shimizu dummy 0 2012/4/4/10:8:28(130.34.95.44) ITO@200 2012/4/4/10:28:38(130.34.95.35) 4 25 29 6925 Shimizu dummy 0 2012/4/4/10:28:49(130.34.95.35) 0 5 38 42 6925 Shimizu dummy 0 2012/4/5/18:15:19(130.34.95.35) Target change 1:Au>Pt, 3:ITO>W 6 30 34 6925 Shimizu dummy 0 2012/4/5/19:35:46(130.34.95.44) Pt, W@RT 6 34 36 6925 Shimizu dummy 0 2012/4/6/14:26:16(130.34.95.35) 0 -10 26 36 6898 Li dummy 0 2012/4/10/7:58:3(130.34.95.28) Pt W@RT 2012/4/10/8:1:18(130.34.95.28) 10 18 28 6898 Li dummy 0 2012/4/10/8:2:15(130.34.95.28) Pt W@RT 12 36 40 6898 miura dummy 0 2012/4/12/16:39:27(130.34.95.28) Target change 3:W=Ti 5:SiO2=>Ag -13 22 25 6898 miura dummy 0 2012/4/13/9:34:42(130.34.95.28) 3:Ti 5:Ag@R.T. 2012/4/13/10:19:4(130.34.95.44) 13 22 23 6898 miura dummy 0 2012/4/13/9:34:42(130.34.95.28) 3:Ti 5:Ag@R.T. 13 33 36 6898 miura dummy 0 2012/4/13/15:34:47(130.34.95.28) 3:Ti 5:Ag@R.T. 16 31 33 6898 miura dummy 0 2012/4/16/14:51:31(130.34.95.44) 3:Ti@RT 16 41 44 6898 miura dummy 0 2012/4/16/19:46:34(130.34.95.44) Target Change 3;Ti->W 17 26 28 6898 miura dummy 0 2012/4/17/12:7:37(130.34.95.28) ３：W@RT 17 34 36 6898 miura dummy 0 2012/4/17/15:53:14(130.34.95.28) Target　Change　3:W=>Ti 18 30 33 6898 miura dummy 0 2012/4/18/11:46:2(130.34.95.28) 3:Ti 5:Ag@RT 18 34 38 6898 Kimura dummy 0 2012/4/18/15:55:0(130.34.95.28) 3:Ti @70deg 19 30 36 6898 Kimura dummy 0 2012/4/18/18:7:14(130.34.95.44) 3:Ti@70deg 18 39 41 6898 miura dummy 0 2012/4/18/18:20:31(130.34.95.28) Target Change 5:Ag=>SiO2 -19 36 38 6898 kimurt dummy 0 2012/4/19/14:27:22(130.34.95.28) 0 2012/4/19/14:28:4(130.34.95.28) 19 36 38 6898 Kimura dummy 0 2012/4/19/14:28:15(130.34.95.28) 0 -19 38 42 6898 hino dummy 0 2012/4/19/14:39:30(130.34.95.28) target change 1 Pt -> Ta , 3 Ti -> Cu 2012/4/19/15:4:42(130.34.95.28) 20 30 36 6898 hino dummy 0 2012/4/19/14:43:38(130.34.95.28) Ta,Cu@RT -19 38 44 6898 hino dummy 0 2012/4/19/15:5:57(130.34.95.28) 3:Ti@70deg, target change 1 Pt->Ta, 3 Ti->Cu 2012/4/19/15:14:21(130.34.95.44) 19 38 42 6898 hino dummy 0 2012/4/19/15:15:5(130.34.95.44) target change 1 Pt->Ta, 3 Ti->Cu 24 34 38 6898 Li dummy 0 2012/4/24/10:12:42(130.34.95.28) Target Change 1: Ta->Au 3 Cu->Ti -25 20 25 6898 Li dummy 0 2012/4/24/10:15:19(130.34.95.28) 3:Ti 1: Au@RT 2012/4/24/17:55:9(130.34.95.44) -26 26 30 6898 Li dummy 0 2012/4/24/17:55:40(130.34.95.44) Au/Ti 2012/4/24/17:55:51(130.34.95.44) -25 26 30 6898 Li dummy 0 2012/4/24/17:56:15(130.34.95.44) Au/Ti 2012/4/25/11:52:25(130.34.95.44) -26 26 30 6898 Li dummy 0 2012/4/25/11:54:1(130.34.95.44) Au/Ti 2012/4/26/8:1:23(130.34.95.44) 26 22 26 6898 Li dummy 0 2012/4/26/8:1:48(130.34.95.44) Au/Ti 27 22 26 6898 Li dummy 0 2012/4/26/17:26:12(130.34.95.28) Au/Ti 26 38 40 6898 miura dummy 0 2012/4/26/17:44:33(130.34.95.28) Target Change　5:SiO2=>Ag 27 30 33 6898 miura dummy 0 2012/4/27/11:35:14(130.34.95.28) 3:Ti 5:Ag@R.T. 27 37 39 6898 miura dummy 0 2012/4/27/17:32:9(130.34.95.28) Target Change　5:Ag=>SiO2