2	34	40	6898	KANAI	dummy	0	2012/3/2/16:27:28(130.34.95.28)	1:Sn@R.T.
-7	25	38	6898	kanai	dummy	0	2012/3/6/10:47:6(130.34.95.28)	1:Sn@R.T.	2012/3/6/10:47:16(130.34.95.28)
6	25	38	6898	kanai	dummy	0	2012/3/6/10:47:43(130.34.95.28)	1:Sn@R.T.
8	28	38	6898	kanai	dummy	0	2012/3/8/12:45:16(130.34.95.28)	1:Sn@R.T.
9	27	38	6898	kanai	dummy	0	2012/3/9/11:38:55(130.34.95.28)	1:Sn@R.T. 5:SiO2@R.T.
12	35	39	6898	miura	dummy	0	2012/3/12/16:27:42(130.34.95.28)	Target Change:5 SiO2->Ag
13	20	23	6898	miura	dummy	0	2012/3/12/18:39:18(130.34.95.28)	3:Ti　5:Ag　@R.T.
13	34	37	6898	miura	dummy	0	2012/3/13/16:10:45(130.34.95.28)	Target　Change　５：5:Ag=>SiO2
14	20	22	6898	miura	dummy	0	2012/3/14/9:17:28(130.34.95.44)	5:SiO2@RT
14	22	28	6936	T.Naono	dummy	0	2012/3/14/9:44:37(130.34.95.44)	SiO2
14	28	32	6936	T. Naono	dummy	0	2012/3/14/11:16:39(130.34.95.43)	SiO2
15	28	34	5810	chin	dummy	0	2012/3/14/11:53:57(130.34.95.49)	SiO2@RT
14	32	34	6936	T.Naono	dummy	0	2012/3/14/14:37:11(130.34.95.44)	0
14	34	40	6898	Kanai	dummy	0	2012/3/14/15:1:11(130.34.95.28)	Sn@R.T. SiO2@R.T.
15	18	26	6936	T. Naono	dummy	0	2012/3/14/17:36:27(130.34.95.43)	SiO2@RT
16	26	28	6898	miura	dummy	0	2012/3/16/11:27:40(130.34.95.28)	5:SiO2@R.T.
16	38	42	6936	T.Naono	dummy	0	2012/3/16/18:10:58(130.34.95.43)	SiO2@RT
23	28	34	5810	chin	dummy	0	2012/3/21/18:44:15(130.34.95.49)	SiO2@RT
22	32	36	4771	Wang	dummy	1	2012/3/22/8:30:10(130.34.95.21)	change the target,  Sn->Al
-22	23	32	6898	李	dummy	0	2012/3/22/10:51:30(130.34.95.28)	S	2012/3/22/13:23:9(130.34.95.44)
22	23	29	6898	李	dummy	0	2012/3/22/10:51:30(130.34.95.28)	S
23	18	24	4771	Wang	dummy	0	2012/3/22/18:16:58(130.34.95.21)	Al
23	34	40	4771	Wang	dummy	0	2012/3/23/10:47:58(130.34.95.21)	Al
23	40	43	4771	Wang	dummy	0	2012/3/23/18:38:53(130.34.95.44)	Al
26	29	35	6898	kanai	dummy	0	2012/3/26/10:20:43(130.34.95.28)	change the target  1:Al->Ta 3:Ti->Cu
-27	18	24	6898	kanai	dummy	0	2012/3/26/10:21:39(130.34.95.28)	Ta,Cu@R.T. 	2012/3/26/11:25:23(130.34.95.28)
27	18	27	6898	kanai	dummy	0	2012/3/26/11:26:15(130.34.95.28)	Ta,Cu@R.T. 
27	28	32	6898	li	dummy	0	2012/3/27/13:6:21(130.34.95.44)	change the target: 1: Ta->Sn 3:Cu->Ti
27	32	34	6898	kanai	dummy	0	2012/3/27/14:56:5(130.34.95.44)	target change 1:Ta->Sn 3:Cu->Ti
27	34	38	6898	li	dummy	0	2012/3/27/16:7:52(130.34.95.44)	change the target: Ti->Cu
28	16	34	6898	li	dummy	0	2012/3/28/6:44:55(130.34.95.44)	baking after target change
28	34	36	6898	kanai	dummy	0	2012/3/28/15:4:9(130.34.95.28)	Sn@R.T.
29	32	36	6925	Shimizu	dummy	0	2012/3/28/18:27:38(130.34.95.35)	Sn->Au, Cu->Cr
-30	30	34	6925	Shimizu	dummy	0	2012/3/28/18:28:24(130.34.95.35)	Au/Cr@R.T.	2012/3/30/10:4:53(130.34.95.35)
-30	22	27	4771	cao	dummy	0	2012/3/29/21:59:24(130.34.95.21)	Au/Cr	2012/3/30/11:18:36(130.34.95.21)
30	34	38	6925	Shimizu	dummy	0	2012/3/30/10:5:18(130.34.95.35)	Au/Cr@R.T.
30	22	25	4771	cao	dummy	0	2012/3/29/21:59:24(130.34.95.21)	Au/Cr
30	38	42	6925	Shimizu	dummy	0	2012/3/30/17:13:39(130.34.95.35)	Target change 3:Cr->ITO