4 28 40 6925 inagaki dummy 0 2012/11/30/17:17:28(130.34.95.35) target change 1 Ta -> Pt 5 26 34 6925 inagaki dummy 0 2012/11/30/17:17:49(130.34.95.35) Pt @RT 3 28 36 5810 レミ dummy 0 2012/11/30/22:58:28(130.34.95.49) ターゲット交換（3：　ITO -> Cｒ） -5 34 42 5810 レミ dummy 0 2012/11/30/23:0:55(130.34.95.49) Cr, Pt スパッター 2012/11/30/23:1:35(130.34.95.49) 5 34 42 5810 レミ dummy 0 2012/11/30/23:1:57(130.34.95.49) Cr, Pt @ RT 6 30 38 5810 レミ dummy 0 2012/11/30/23:4:37(130.34.95.49) ターゲット交換（３： Cr -> Ti) 7 20 26 5810 レミ dummy 0 2012/11/30/23:5:21(130.34.95.49) Ti @ RT 5 42 44 6898 Fujimori dummy 0 2012/12/3/16:37:35(130.34.95.28) 1:Pt @ RT 7 26 34 6925 inagaki dummy 0 2012/12/4/12:11:40(130.34.95.35) Pt @RT -11 21 29 5810 レミ dummy 0 2012/12/4/17:59:49(130.34.95.49) Ta, W @ RT 2012/12/10/19:13:8(130.34.95.49) 10 28 36 5810 レミ dummy 0 2012/12/4/18:2:53(130.34.95.49) ターゲット交換（1: Pt -> Ta ; 3: Ti ->W ) 7 34 38 6925 sato dummy 0 2012/12/5/18:48:8(130.34.95.35) Ti/Pt＠RT -11 32 36 6925 kohiyama dummy 0 2012/12/6/21:10:24(130.34.95.35) Target change 1: Pt->Au 2012/12/6/21:10:38(130.34.95.35) -11 32 36 6925 kohiyama dummy 0 2012/12/6/21:11:9(130.34.95.35) Target change 1: Ta->Au 2012/12/10/12:33:59(130.34.95.35) -12 18 24 6925 kohiyama dummy 0 2012/12/6/21:12:28(130.34.95.35) Au@RT 2012/12/11/21:10:49(130.34.95.35) -12 30 36 6925 kohiyama dummy 0 2012/12/6/21:12:44(130.34.95.35) Au@RT 2012/12/12/10:36:45(130.34.95.35) -7 38 42 5810 レミ dummy 0 2012/12/7/12:21:46(130.34.95.44) サンプル取り出し 2012/12/7/14:59:11(130.34.95.44) -8 28 32 6925 suzuki dummy 0 2012/12/8/13:34:45(130.34.95.35) Target change 3:Ti->ITO 2012/12/8/14:30:38(130.34.95.35) -10 18 26 6925 suzuki dummy 0 2012/12/8/13:36:30(130.34.95.35) ITO/SiO2＠200,300/RT 2012/12/8/14:30:42(130.34.95.35) 8 28 31 6925 suzuki dummy 0 2012/12/8/13:34:45(130.34.95.35) Target change 3:Ti->ITO -13 18 24 6925 suzuki dummy 0 2012/12/10/12:33:26(130.34.95.35) ITO/SiO2＠200,300/RT 2012/12/12/16:40:41(130.34.95.35) -11 32 36 6925 kohiyama dummy 0 2012/12/10/12:34:53(130.34.95.35) Target change 1: Ta->Au , 3: W->ITO 2012/12/11/14:10:38(130.34.95.35) -18 21 26 5810 レミ dummy 0 2012/12/18/10:3:23(130.34.95.49) 0 2012/12/18/10:3:42(130.34.95.49) 18 21 23 5810 レミ dummy 0 2012/12/18/10:3:23(130.34.95.49) 0 18 23 26 5810 レミ dummy 0 2012/12/18/10:4:0(130.34.95.49) Ta, W @ RT 18 41 44 6925 suzuki dummy 0 2012/12/18/11:55:41(130.34.95.35) target change 3:W->ITO 18 39 41 6925 kohiyama dummy 0 2012/12/18/12:55:18(130.34.95.35) Target change 1: Ta->Au 19 17 24 6925 kohiyama dummy 0 2012/12/18/13:34:20(130.34.95.35) Au@RT -19 30 38 5810 レミ dummy 0 2012/12/18/15:55:14(130.34.95.49) ターゲット交換 (1: Au -> Cr) 2012/12/18/16:57:1(130.34.95.49) 20 21 25 5810 レミ dummy 0 2012/12/18/15:58:45(130.34.95.49) Cr @ RT -20 30 34 6898 fujimori dummy 0 2012/12/18/16:51:44(130.34.95.28) ターゲット交換（1:　Cr -> Pt） 2012/12/20/13:53:37(130.34.95.28) 21 28 34 6898 fujimori dummy 0 2012/12/18/16:53:33(130.34.95.28) Pt @ RT -19 32 40 5810 レミ dummy 0 2012/12/18/16:57:33(130.34.95.49) ターゲット交換 (1: Au -> Cr) 2012/12/18/17:4:14(130.34.95.49) 19 24 32 6925 suzuki dummy 0 2012/12/18/16:58:49(130.34.95.35) ITO/SiO2＠200,300/RT 21 21 25 5810 レミ dummy 0 2012/12/18/17:2:37(130.34.95.49) Pt, Ti @ RT 19 32 40 5810 レミ dummy 0 2012/12/18/17:5:3(130.34.95.49) ターゲット交換 (1: Au -> Cr ; 3: ITO -> Ti) -21 36 42 6925 k.konno dummy 0 2012/12/18/18:37:18(130.34.95.35) Pt@ RT 2012/12/19/17:7:58(130.34.95.35) 19 40 44 4771 原 dummy 1 2012/12/19/15:23:10(130.34.95.21) 他装置の配管調整に伴うメンテナンス -21 42 46 6925 konno dummy 0 2012/12/19/16:57:37(130.34.95.35) Target change 3:Ti -> W 2012/12/19/17:7:54(130.34.95.35) -24 17 24 6925 k.konno dummy 0 2012/12/19/16:58:8(130.34.95.35) W@RT 2012/12/19/16:58:20(130.34.95.35) -25 17 24 6925 K.konno dummy 0 2012/12/19/16:58:34(130.34.95.35) W@RT 2012/12/19/17:5:49(130.34.95.35) -21 34 38 6925 k.konno dummy 0 2012/12/19/17:8:33(130.34.95.35) Target change 3:Ti -> W 2012/12/19/17:9:47(130.34.95.35) 21 34 38 6925 k.konno dummy 0 2012/12/19/17:10:1(130.34.95.35) Pt@ RT -21 38 44 6925 k.konno dummy 0 2012/12/19/17:10:16(130.34.95.35) Target change 3:Ti -> W 2012/12/20/13:42:2(130.34.95.35) -25 38 44 6925 k.konno dummy 0 2012/12/19/17:13:5(130.34.95.35) W@RT 2012/12/25/14:51:17(130.34.95.35) 20 25 28 5810 iizuka dummy 0 2012/12/20/10:32:13(130.34.95.44) Ti@RT 20 28 29 5810 iizuka dummy 0 2012/12/20/13:41:26(130.34.95.44) Ti@RT 21 38 42 6925 suzuki dummy 0 2012/12/20/13:43:2(130.34.95.35) Target change 1:Pt->W 3:Ti->ITO -26 18 24 6925 suzuki dummy 0 2012/12/20/13:45:55(130.34.95.35) ITO＠200,300 2012/12/22/18:17:35(130.34.95.35) 20 30 34 6898 fujimori dummy 0 2012/12/20/13:54:25(130.34.95.28) Target change: 1:Cr=>Pt 5:SiO2=>Ag 21 26 28 6898 miura dummy 0 2012/12/20/14:1:16(130.34.95.28) Ag@R.T. -25 44 47 6925 suzuki dummy 0 2012/12/22/18:17:25(130.34.95.35) Target change 1:W->Ta 5:Ag->SiO2 2012/12/25/16:30:23(130.34.95.35) 26 18 26 6925 suzuki dummy 0 2012/12/22/18:18:42(130.34.95.35) Ta,SiO2,ITO@70,RT,200oC 25 30 35 6925 k.konno dummy 0 2012/12/25/14:33:46(130.34.95.35) 0 25 38 42 6925 suzuki dummy 0 2012/12/25/16:30:19(130.34.95.35) Target change 1:W->Ta 5:Ag->SiO2 26 27 30 6925 suzuki dummy 0 2012/12/26/13:17:31(130.34.95.44) ITO@300 26 30 34 6925 suzuki dummy 0 2012/12/26/14:38:2(130.34.95.44) ITO@300 27 28 37 5810 An dummy 0 2012/12/26/21:8:59(130.34.95.43) ターゲット交換 (3: ITO->Ti) 28 21 25 5810 An dummy 0 2012/12/26/21:9:55(130.34.95.43) Ti @ RT 28 26 30 5810 iizuka dummy 0 2012/12/27/14:1:43(130.34.95.49) Ti @ RT