-1 28 36 6898 Kimura dummy 0 2012/10/29/12:19:12(130.34.95.28) 1: Al @100deg, 3: TiN @70deg 2012/10/30/16:9:50(130.34.95.28) -2 20 28 5810 レミ dummy 0 2012/10/30/14:50:44(130.34.95.44) Target 交換 (1: Al --> W ; 3: Ti-->Ta) 2012/10/30/15:21:32(130.34.95.49) -5 20 30 5810 レミ dummy 0 2012/10/30/14:51:50(130.34.95.44) Ta, W sputter 2012/10/30/15:23:37(130.34.95.49) -1 36 44 5810 レミ dummy 0 2012/10/30/15:22:40(130.34.95.49) Target 交換 (1: Al -> Ta ; 3 : Ti -> W) 2012/11/1/18:50:38(130.34.95.49) -2 20 30 5810 レミ dummy 0 2012/10/30/15:24:1(130.34.95.49) Ta, W sputter 2012/10/30/16:6:0(130.34.95.49) -2 20 28 5810 レミ dummy 0 2012/10/30/16:7:15(130.34.95.49) Ta sputter 2012/11/1/18:50:32(130.34.95.49) -2 32 42 5810 レミ dummy 0 2012/10/30/16:7:55(130.34.95.49) Ta, W sputter 2012/11/1/18:50:35(130.34.95.49) -1 26 36 6898 Kimura dummy 0 2012/10/30/16:10:23(130.34.95.28) 1: Al @100deg, 3: TiN @70deg 2012/10/30/16:10:46(130.34.95.28) -1 28 36 6898 Kimura dummy 0 2012/10/30/16:11:8(130.34.95.28) 1: Al @100deg, 3: TiN @70deg 2012/11/1/15:52:37(130.34.95.28) 1 28 34 6898 Kimura dummy 0 2012/10/30/16:11:8(130.34.95.28) 1: Al @100deg, 3: TiN @70deg 1 36 40 5810 レミ dummy 0 2012/10/30/15:22:40(130.34.95.49) Target 交換 (1: Al -> Ta ; 3 : Ti -> W) 7 36 40 6898 miura dummy 0 2012/11/7/17:14:48(130.34.95.28) Target change: 5:SiO2=>Ag 8 30 32 6898 miura dummy 0 2012/11/7/17:16:23(130.34.95.28) Ag@R.T. 8 36 42 5810 レミ dummy 0 2012/11/7/19:39:22(130.34.95.49) Target 交換 (1: Al -> Ta ; 3 : Ti -> W) 9 20 28 5810 レミ dummy 0 2012/11/7/19:40:21(130.34.95.49) Ta sputter 9 30 40 5810 レミ dummy 0 2012/11/7/19:41:2(130.34.95.49) Ta, W sputter -12 28 38 6925 inagaki dummy 0 2012/11/9/13:6:59(130.34.95.35) target change 1 Ta -> Pt 2012/11/9/13:7:47(130.34.95.35) 12 28 38 6925 inagaki dummy 0 2012/11/9/13:9:7(130.34.95.35) target change 1 Ta -> Pt -13 24 32 6925 inagaki dummy 0 2012/11/9/13:9:23(130.34.95.35) Pt @RT 2012/11/9/13:9:42(130.34.95.35) -13 24 32 6925 inagaki dummy 0 2012/11/9/13:10:0(130.34.95.35) Pt/Ag @RT 2012/11/13/12:38:33(130.34.95.35) -13 36 40 6898 Kimura dummy 0 2012/11/9/19:19:48(130.34.95.28) 1: Pt @R.T. 2012/11/12/20:2:11(130.34.95.28) 13 40 44 6898 Miura dummy 0 2012/11/9/19:22:17(130.34.95.28) Target change: 3: W->Ti, 5: Ag->SiO2 13 24 28 6925 inagaki dummy 0 2012/11/9/13:10:0(130.34.95.35) Pt/Ag @RT 14 36 38 6898 miura dummy 0 2012/11/14/12:56:46(130.34.95.28) Ti/SiO2@R.T. 14 40 44 6925 suzuki dummy 0 2012/11/14/15:40:16(130.34.95.35) Target change 3:Ti->ITO 15 19 24 6925 suzuki dummy 0 2012/11/14/15:42:2(130.34.95.35) ITO/SiO2＠200/RT 16 19 26 6925 suzuki dummy 0 2012/11/15/19:48:44(130.34.95.35) ITO/SiO2＠RT 16 26 28 6925 suzuki dummy 0 2012/11/16/12:30:3(130.34.95.44) Ta,ITO@70,200oC 19 19 26 6925 suzuki dummy 0 2012/11/16/16:44:50(130.34.95.35) Ta,ITO,SiO2@70,200oC,RT 16 38 42 6898 Kimura dummy 0 2012/11/16/17:19:44(130.34.95.28) Target change : 1: Ta => Al, 3: ITO => Ti 17 22 28 6898 Kimura & Miura dummy 0 2012/11/16/17:20:36(130.34.95.28) 1: Al @100deg, 3: Ti @70deg (坂先生承認) 17 32 36 6898 Kimura & Miura dummy 0 2012/11/16/17:21:39(130.34.95.28) Target change: 1: Al => Ta, 3: Ti => ITO (坂先生承認) 22 19 26 6925 suzuki dummy 0 2012/11/21/15:31:4(130.34.95.35) SiO2,Ta,ITO@RT,70,200oC 26 32 36 6925 kohiyama dummy 0 2012/11/26/15:11:39(130.34.95.35) Target change 1: Ta->Pt , 3:ITO->Ti 27 18 22 6925 kohiyama dummy 0 2012/11/26/17:38:20(130.34.95.35) Ti,Pt@RT -27 24 31 6925 sato dummy 0 2012/11/26/20:12:46(130.34.95.35) 0 2012/11/26/20:12:50(130.34.95.35) 27 24 31 6925 sato dummy 0 2012/11/26/20:13:18(130.34.95.35) Ti,Pt@RT 28 38 42 6925 suzuki dummy 0 2012/11/28/15:44:28(130.34.95.35) Target change 1:Pt->Ta 3:Ti->ITO 29 19 28 6925 suzuki dummy 0 2012/11/28/15:45:29(130.34.95.35) SiO2,Ta,ITO@RT,70,200oC 29 28 36 6925 suzuki dummy 0 2012/11/29/10:14:18(130.34.95.35) SiO2,Ta,ITO@RT,70,200oC