5	25	33	6925	Shimizu	dummy	0	2012/1/4/9:59:56(130.34.95.35)	SiO2@RT
6	35	39	6898	miura	dummy	0	2012/1/6/14:56:28(130.34.95.28)	Target Change:1 Au->Sn
10	29	36	6898	miura	dummy	0	2012/1/10/13:51:30(130.34.95.28)	Sn@R.T.
11	34	42	5810	h.miyashita	dummy	0	2012/1/10/19:52:56(130.34.95.49)	Ag@RT
-12	38	42	6925	Shimizu	dummy	0	2012/1/11/20:44:0(130.34.95.35)	Target change 1:Sn→Au	2012/1/12/11:43:34(130.34.95.35)
-13	20	24	6925	Shimizu	dummy	0	2012/1/11/20:44:52(130.34.95.35)	Au@R.T.	2012/1/12/18:31:38(130.34.95.44)
12	35	39	6925	Shimizu	dummy	0	2012/1/12/11:43:58(130.34.95.35)	Target change 1:Sn→Au
12	27	30	6898	miura	dummy	0	2012/1/12/12:40:40(130.34.95.28)	Sn@R.T.
13	29	32	6925	Shimizu	dummy	0	2012/1/12/18:32:41(130.34.95.44)	Au@R.T.
-13	34	38	5810	h.miyashita	dummy	0	2012/1/13/0:11:37(130.34.95.43)	0	2012/1/13/0:12:4(130.34.95.43)
13	34	38	5810	h.miyashita	dummy	0	2012/1/13/0:12:39(130.34.95.43)	Ag@R.T.
18	34	38	6898	miura	dummy	0	2012/1/18/12:22:45(130.34.95.28)	Target Change:1 Au->Sn
19	20	24	6898	miura	dummy	0	2012/1/18/12:23:6(130.34.95.28)	Sn@R.T.
18	32	34	6898	miura	dummy	0	2012/1/18/13:3:37(130.34.95.28)	0
19	24	26	6898	miura	dummy	0	2012/1/19/11:8:21(130.34.95.44)	0
-24	28	38	6898	金井敏行	dummy	0	2012/1/23/15:29:18(130.34.95.28)	Target Change:1 Sn->Ta :2 Ti->Cu :3 Ag->SiO2	2012/1/23/15:32:59(130.34.95.28)
-25	28	38	6898	金井敏行	dummy	0	2012/1/23/15:32:22(130.34.95.28)	Target Change:1 Sn->Ta :2 Ti->Cu :3 Ag->SiO2	2012/1/23/16:51:2(130.34.95.28)
-27	20	24	6898	金井敏行	dummy	0	2012/1/23/15:34:57(130.34.95.28)	Ta@R.T.	2012/1/23/16:53:11(130.34.95.28)
-27	26	32	6898	金井敏行	dummy	0	2012/1/23/15:36:16(130.34.95.28)	Cu@R.T. 	2012/1/23/16:53:14(130.34.95.28)
-27	32	36	6898	金井敏行	dummy	0	2012/1/23/15:37:38(130.34.95.28)	Target Change:1 Ta->Sn	2012/1/23/16:53:18(130.34.95.28)
26	20	26	6949	sergey	dummy	0	2012/1/24/13:10:18(130.34.95.19)	Target: ITO
24	30	36	6949	sergey	dummy	0	2012/1/24/14:16:29(130.34.95.19)	Target change
25	30	42	6949	sergey	dummy	0	2012/1/25/12:37:38(130.34.95.19)	target change
26	26	32	6949	sergey	dummy	0	2012/1/26/11:24:1(130.34.95.19)	target ITO@200℃
-27	30	34	6898	金井敏行	dummy	0	2012/1/26/13:57:31(130.34.95.28)	Target Change:1 ?->Ta :3 ?->Cu :5 ?->SiO2	2012/1/27/14:4:43(130.34.95.28)
30	20	24	6898	金井敏行	dummy	0	2012/1/26/13:58:18(130.34.95.28)	Ta@R.T.
-30	26	36	6898	金井敏行	dummy	0	2012/1/26/13:59:34(130.34.95.28)	Cu@R.T. and Target Change :1 Ta->Sn	2012/1/27/14:9:18(130.34.95.28)
31	20	24	6898	kanai	dummy	0	2012/1/26/14:30:24(130.34.95.28)	Sn@R.T.
31	26	30	6898	kanai	dummy	0	2012/1/26/14:31:3(130.34.95.28)	SiO2@R.T.
27	30	31	6898	金井敏行	dummy	0	2012/1/26/13:57:31(130.34.95.28)	Target Change:1 ?->Ta :3 ?->Cu :5 ?->SiO2
27	31	34	6898	kanai	dummy	0	2012/1/27/14:8:15(130.34.95.28)	target Change :3 ITO->Ta :5 Ag->SiO2
30	26	36	6898	kanai	dummy	0	2012/1/27/14:11:10(130.34.95.28)	Cu@R.T. and Target Change :1 Cu->Sn
31	30	34	6898	kanai	dummy	0	2012/1/30/9:19:30(130.34.95.28)	Sn@R.T.
31	39	41	6898	miura	dummy	0	2012/1/31/18:52:51(130.34.95.28)	Sn@R.T.