-1	34	40	6898	fujita	dummy	0	2011/9/1/13:37:26(130.34.95.28)	Target Change 3:Cu -> Ag	2011/9/1/18:5:37(130.34.95.28)
-2	22	32	6898	fujita	dummy	0	2011/9/1/13:38:19(130.34.95.28)	Ag/Ti @ R.T.	2011/9/1/18:29:14(130.34.95.28)
1	34	39	6898	fujita	dummy	0	2011/9/1/13:37:26(130.34.95.28)	Target Change 3:Cu -> Ag
2	26	32	6898	fujita	dummy	0	2011/9/1/18:29:46(130.34.95.28)	Ag/Ti @ R.T.
9	26	30	5810	chin	dummy	0	2011/9/8/22:8:7(130.34.95.49)	TI/Pt/Ti
-13	40	44	6925	maegami	dummy	0	2011/9/12/16:22:13(130.34.95.35)	Ti/Pt@R.T.	2011/9/13/19:26:13(130.34.95.35)
13	40	41	6925	maegami	dummy	0	2011/9/12/16:22:13(130.34.95.35)	Ti/Pt@R.T.
14	32	38	6898	fujita	dummy	0	2011/9/14/13:8:3(130.34.95.28)	Target Change : 5 Pt -> SiO2
15	20	24	6898	fujita	dummy	0	2011/9/14/13:8:37(130.34.95.28)	SiO2 @ R.T.
21	28	34	6925	inagaki	dummy	0	2011/9/16/21:10:23(130.34.95.35)	Ti/Pt/SiO2@RT
20	26	32	6925	inagaki	dummy	0	2011/9/16/21:20:37(130.34.95.35)	target change 3 Ag -> Pt
-22	32	37	6925	maegami	dummy	0	2011/9/22/12:46:37(130.34.95.35)	0	2011/9/22/12:49:34(130.34.95.35)
-22	31	36	6925	maegami	dummy	0	2011/9/22/12:50:2(130.34.95.35)	Ti/Pt@R.T.	2011/9/22/14:41:59(130.34.95.35)
22	31	32	6925	maegami	dummy	0	2011/9/22/12:50:2(130.34.95.35)	Ti/Pt@R.T.
22	32	38	6925	maegami	dummy	0	2011/9/22/14:42:50(130.34.95.35)	Ti/Pt@R.T.
28	21	27	6898	fujita	dummy	0	2011/9/27/20:4:22(130.34.95.28)	target change 1 Ti -> Ta , 3 Pt -> Cu
-28	40	44	6898	fujita	dummy	0	2011/9/27/20:5:59(130.34.95.28)	Ta/Cu @RT	2011/9/28/18:33:37(130.34.95.28)
29	20	24	6898	fujita	dummy	0	2011/9/28/18:34:17(130.34.95.28)	Ta/Cu @ R.T.
29	24	26	6898	fujita	dummy	0	2011/9/29/10:34:59(130.34.95.28)	Ta/Cu @RT
-29	28	34	6898	fujita	dummy	0	2011/9/29/13:34:30(130.34.95.28)	Ta/Cu @ R.T.	2011/9/29/13:39:24(130.34.95.28)
29	28	30	6898	fujita	dummy	0	2011/9/29/13:34:30(130.34.95.28)	Ta/Cu @ R.T.
29	30	32	6898	fujita	dummy	0	2011/9/29/13:39:52(130.34.95.28)	Ta/Cu @ R.T.