4	29	34	6898	watanabe	dummy	0	2011/10/4/13:56:55(130.34.95.28)	Cu/Ta@RT
5	38	44	6898	fujita	dummy	0	2011/10/5/16:55:50(130.34.95.28)	Target Change 1: Ta -> Ti 3; Cu -> Al
7	20	26	6898	fujita	dummy	0	2011/10/6/12:45:26(130.34.95.28)	TiN @ 70degree
-12	20	26	6898	fujita	dummy	0	2011/10/11/21:25:18(130.34.95.28)	TiN @ R.T.	2011/10/11/21:25:23(130.34.95.28)
12	20	26	6898	fujita	dummy	0	2011/10/11/21:25:46(130.34.95.28)	TiN @ 70 degree
13	36	40	6898	fujimori	dummy	0	2011/10/13/16:56:26(130.34.95.28)	taget change 1:Ti -> Pt
14	26	30	6898	fujimori	dummy	0	2011/10/13/19:33:46(130.34.95.28)	Pt@RT
-19	24	28	6898	fujita	dummy	0	2011/10/18/17:57:28(130.34.95.28)	SiO2 @ R.T.	2011/10/19/11:37:49(130.34.95.28)
19	24	26	6898	fujita	dummy	0	2011/10/18/17:57:28(130.34.95.28)	SiO2 @ R.T.
24	34	42	6925	inagaki	dummy	0	2011/10/19/20:14:42(130.34.95.35)	target change 3 Al -> Ti
-25	26	38	6925	inagaki	dummy	0	2011/10/19/20:22:44(130.34.95.35)	Pt/Ti/SiO2 @RT	2011/10/20/11:3:12(130.34.95.35)
25	22	30	6925	inagaki	dummy	0	2011/10/20/11:3:42(130.34.95.35)	Pt/Ti/SiO2 @RT
24	30	32	6898	fujita	dummy	0	2011/10/24/13:33:47(130.34.95.28)	SiO2 @ R.T.
-26	38	44	6898	watanabe	dummy	0	2011/10/24/13:44:24(130.34.95.28)	target change 1 Pt->Fe  3 Ti->W 	2011/10/26/15:29:38(130.34.95.28)
27	26	30	6898	watanabe	dummy	0	2011/10/24/13:46:52(130.34.95.28)	Fe/W@R.T.
-31	26	32	6898	watanabe	dummy	0	2011/10/24/14:17:40(130.34.95.28)	Fe/W@R.T.	2011/10/31/12:55:33(130.34.95.28)
26	32	38	6898	watanabe	dummy	0	2011/10/26/15:29:34(130.34.95.28)	target change 1:Pt -> Fe , 3:Ti -> W
-31	32	40	6925	inagaki	dummy	0	2011/10/28/14:35:26(130.34.95.35)	0	2011/10/28/14:35:32(130.34.95.35)
31	32	40	6925	inagaki	dummy	0	2011/10/28/14:37:8(130.34.95.35)	target change 1 Fe -> Ti  3 W -> Pt
31	21	24	6898	watanabe	dummy	0	2011/10/31/9:59:22(130.34.95.28)	Fe@R.T
31	24	26	6898	watanabe	dummy	0	2011/10/31/11:47:42(130.34.95.44)	Fe@RT
31	26	28	6898	watanabe	dummy	0	2011/10/24/14:17:40(130.34.95.28)	Fe/W@R.T.