5 20 26 6898 hino dummy 0 2011/1/4/12:51:40(130.34.95.28) TiN @70deg -6 28 34 5810 chin dummy 0 2011/1/5/17:23:5(130.34.95.49) TiN@rt 2011/1/5/19:7:55(130.34.95.49) -11 36 42 6898 hino dummy 0 2011/1/5/19:7:42(130.34.95.28) TargetChange:5 SiO2→Ag 2011/1/6/11:21:15(130.34.95.28) -12 20 26 6898 hino dummy 0 2011/1/5/19:11:35(130.34.95.28) Ag@RT/TiN@70deg 2011/1/6/11:21:18(130.34.95.28) 6 38 42 6898 hino dummy 0 2011/1/6/17:37:6(130.34.95.28) TargetChange:3 Tempax→Al -7 24 28 6898 hino dummy 0 2011/1/6/17:38:10(130.34.95.28) Al@RT 2011/1/6/17:38:48(130.34.95.28) -7 26 30 6898 hino dummy 0 2011/1/6/17:39:4(130.34.95.28) Al@RT 2011/1/7/12:24:10(130.34.95.28) 7 36 40 4771 cao dummy 0 2011/1/6/19:52:55(130.34.95.21) SiO2>Pt -8 22 27 4771 cao dummy 0 2011/1/6/19:53:39(130.34.95.21) Pt/Ti, R.T. 2011/1/7/20:43:14(130.34.95.44) 7 21 25 4771 cao dummy 0 2011/1/6/20:58:26(130.34.95.21) Al, RT -9 30 38 5810 chin,he dummy 0 2011/1/7/11:17:38(130.34.95.49) 0 2011/1/7/11:18:3(130.34.95.49) 9 30 38 5810 chin,he dummy 0 2011/1/7/11:18:55(130.34.95.49) TiN@rt 7 26 27 6898 hino dummy 0 2011/1/6/17:39:4(130.34.95.28) Al@RT 7 28 32 6898 hino dummy 0 2011/1/7/12:24:32(130.34.95.28) Al@RT 10 18 22 5810 asai dummy 0 2011/1/7/14:53:40(130.34.95.49) TargetChange @3 Al>Tempax -10 32 40 5810 asai dummy 0 2011/1/7/14:55:47(130.34.95.49) Ti/Pt/Tempax @RT 2011/1/7/15:10:55(130.34.95.49) 11 28 33 5810 asai dummy 0 2011/1/7/14:59:4(130.34.95.49) Ti/Pt/Tempax 11 38 44 6925 Shimizu dummy 0 2011/1/7/15:7:48(130.34.95.35) Target change: W on No.1 target -12 20 25 6925 Shimizu dummy 0 2011/1/7/15:10:15(130.34.95.35) W ＠R.T. 2011/1/7/15:10:31(130.34.95.35) -12 20 26 6925 Shimizu dummy 0 2011/1/7/15:10:57(130.34.95.35) W@R.T. 2011/1/11/12:11:36(130.34.95.35) 11 18 24 5810 asai dummy 0 2011/1/7/15:11:40(130.34.95.49) Ti/Pt/Tempax -12 36 48 6898 hino dummy 0 2011/1/7/17:49:24(130.34.95.28) target change 1:W -> Ti 3:Tempax -> Ag 2011/1/12/17:19:50(130.34.95.28) -13 20 26 6898 hino dummy 0 2011/1/7/17:50:51(130.34.95.28) Ti@70deg/Ag@RT 2011/1/12/17:21:37(130.34.95.28) 8 28 36 4771 cao dummy 0 2011/1/7/20:43:39(130.34.95.44) Pt/Ti, 300deg 8 24 28 4771 cao dummy 0 2011/1/8/11:26:35(130.34.95.44) Pt/Ti 12 24 30 6925 Shimizu dummy 0 2011/1/11/12:12:4(130.34.95.35) W@R.T. 11 33 38 5810 asai dummy 0 2011/1/11/14:51:24(130.34.95.43) Ti/Pt/Tempax 12 30 34 6925 Shimizu dummy 0 2011/1/11/21:25:30(130.34.95.35) 0 12 36 37 6898 hino dummy 0 2011/1/7/17:49:24(130.34.95.28) target change 1:W -> Ti 3:Tempax -> Ag 12 37 44 6898 hino dummy 0 2011/1/12/17:21:21(130.34.95.28) Target change : 3 Tempax -> Ag -13 20 24 6898 hinohino dummy 0 2011/1/12/17:22:15(130.34.95.28) Ag @ R.T. 2011/1/12/17:22:38(130.34.95.28) 13 20 24 6898 hino dummy 0 2011/1/12/17:23:6(130.34.95.28) Ag @ R.T. -13 39 43 6898 hino dummy 0 2011/1/13/18:32:1(130.34.95.28) Ag@RT 2011/1/13/18:33:50(130.34.95.28) 13 39 40 6898 hino dummy 0 2011/1/13/18:32:1(130.34.95.28) Ag@RT 13 37 39 6898 hino dummy 0 2011/1/13/18:34:8(130.34.95.28) Ag@RT