5 36 40 4771 cao dummy 0 2010/7/5/17:58:12(130.34.95.21) Pt (R.T.) 12 26 30 6898 zanma dummy 0 2010/7/7/16:45:19(130.34.95.28) TiN 8 22 30 4771 cao dummy 0 2010/7/8/10:23:54(130.34.95.21) Cu>200 deg 8 30 36 4771 cao dummy 0 2010/7/8/11:38:7(130.34.95.44) Cu, 200deg 9 31 40 4771 cao dummy 0 2010/7/8/20:20:46(130.34.95.21) Cu, 200deg. 12 34 38 6898 ishikawa dummy 0 2010/7/9/14:39:37(130.34.95.28) Pt(@RT) 12 38 48 6898 ishikawa dummy 0 2010/7/9/14:40:33(130.34.95.28) Target change (5:Pt->Ag) 13 26 30 6898 ishikawa dummy 0 2010/7/9/15:8:51(130.34.95.28) Ag @RT 9 40 44 4771 cao dummy 0 2010/7/9/18:11:47(130.34.95.44) Pt/Ti 11 39 43 4771 cao dummy 0 2010/7/11/17:25:1(130.34.95.21) Pt/Ti -15 22 36 4771 zhang, cao dummy 0 2010/7/11/18:34:19(130.34.95.44) Cu 200deg 2010/7/12/17:29:15(130.34.95.44) -16 22 34 4771 cao dummy 0 2010/7/12/17:32:43(130.34.95.44) Cu,200 deg 2010/7/15/12:14:43(130.34.95.21) 13 40 44 5810 inomata dummy 0 2010/7/12/19:15:4(130.34.95.44) 1,Au, 2. Cr 13 44 48 5810 inomata dummy 0 2010/7/12/19:15:43(130.34.95.44) 1.Au -> Cu, 2. Cr -> Ti, 戸田先生承認済み -14 20 28 5810 inomata dummy 0 2010/7/13/10:43:1(130.34.95.49) Au/Cr 2010/7/13/23:15:27(130.34.95.44) 21 20 26 6898 ishikawa dummy 0 2010/7/20/18:9:4(130.34.95.28) Ag @R.T. 22 34 40 6898 ishikawa dummy 0 2010/7/22/16:49:46(130.34.95.28) 0 -23 20 34 4771 Cao dummy 0 2010/7/22/19:19:5(130.34.95.21) Cu/Ti 300 deg 2010/7/22/19:32:40(130.34.95.21) -27 27 38 4771 cao dummy 0 2010/7/26/15:40:56(130.34.95.21) Cu/Ti 2010/7/26/15:41:8(130.34.95.21) 28 27 39 4771 cao dummy 0 2010/7/26/15:41:43(130.34.95.21) Cu/Ti 200 deg. -27 34 48 6898 ishikawa dummy 1 2010/7/26/20:26:44(130.34.95.28) 真空引き中 2010/7/26/20:27:10(130.34.95.28) 26 34 48 6898 ishikawa dummy 1 2010/7/26/20:27:32(130.34.95.28) 真空引き中 27 21 30 4771 cao dummy 0 2010/7/27/9:44:49(130.34.95.21) Cu/Ti 200 deg. 27 30 39 4771 cao dummy 0 2010/7/27/12:47:20(130.34.95.44) Ti 250deg -29 27 39 4771 zhang dummy 0 2010/7/28/17:34:47(130.34.95.44) 0 2010/7/28/17:35:27(130.34.95.44) -30 27 39 4771 zhang dummy 0 2010/7/28/17:35:15(130.34.95.44) Cu/Ti 250 deg 2010/7/29/15:1:28(130.34.95.44) -29 27 39 4771 zhang dummy 0 2010/7/28/17:35:49(130.34.95.44) Cu/Ti 250 deg 2010/7/29/16:35:13(130.34.95.44) 29 27 36 4771 zhang dummy 0 2010/7/28/17:35:49(130.34.95.44) Cu/Ti 250 deg