7	23	28	6898	lu	dummy	0	2010/6/2/13:39:0(130.34.95.28)	TiN 70deg
14	28	32	6898	ishikawa	dummy	0	2010/6/10/17:44:11(130.34.95.28)	Al@RT
-15	20	26	4771	cao	dummy	0	2010/6/14/14:43:43(130.34.95.21)	Al/Pt/Ti	2010/6/14/14:44:2(130.34.95.21)
15	20	26	4771	cao	dummy	0	2010/6/14/14:44:47(130.34.95.21)	Al/Pt/Ti 300 deg
14	34	38	6898	ishikawa	dummy	0	2010/6/14/16:22:36(130.34.95.28)	Al@RT
15	27	33	4771	cao	dummy	0	2010/6/15/12:19:50(130.34.95.21)	Al/Pt/Ti 300 deg
-15	34	40	4771	cao	dummy	0	2010/6/15/16:41:10(130.34.95.21)	Al>Cu	2010/6/15/16:41:23(130.34.95.21)
15	34	36	4771	cao	dummy	0	2010/6/15/16:41:10(130.34.95.21)	Al>Cu
15	36	42	4771	cao	dummy	1	2010/6/15/16:41:48(130.34.95.21)	Al>Cu
-16	26	34	4771	Cao	dummy	0	2010/6/15/16:44:1(130.34.95.21)	Cu R.T	2010/6/15/18:55:57(130.34.95.21)
16	26	36	4771	cao	dummy	0	2010/6/15/18:56:28(130.34.95.21)	Cu R.T
16	36	40	4771	cao	dummy	0	2010/6/16/15:40:36(130.34.95.21)	Cu/Ti
28	20	21	6937	H.Matsuo	dummy	0	2010/6/28/9:36:18(130.34.95.44)	Pt@RT