1	32	40	6937	H.Matsuo	dummy	0	2010/2/26/14:57:40(130.34.95.43)	Ti / Pt @320℃
1	27	31	4771	cao	dummy	0	2010/2/27/22:30:48(130.34.95.21)	Al room temp
-12	34	40	6937	H.Matsuo	dummy	0	2010/3/10/17:50:34(130.34.95.43)	Ti & Pt @320℃	2010/3/12/14:37:28(130.34.95.44)
-15	34	42	6898	yasuda	dummy	1	2010/3/11/14:10:15(130.34.95.28)	Target change 5.Pt->Ag@170deg	2010/3/15/15:16:1(130.34.95.28)
12	26	30	6937	H.Matsuo	dummy	0	2010/3/12/12:35:50(130.34.95.44)	Ti/Pt @320℃
-15	25	34	4771	Pt/Ti	dummy	0	2010/3/12/20:38:53(130.34.95.21)	0	2010/3/12/20:39:1(130.34.95.21)
-15	25	34	4771	cao	dummy	0	2010/3/12/20:39:20(130.34.95.21)	Pt/Ti	2010/3/15/12:35:37(130.34.95.44)
15	25	28	4771	cao	dummy	0	2010/3/12/20:39:20(130.34.95.21)	Pt/Ti
15	31	36	6898	yasuda	dummy	1	2010/3/15/15:16:27(130.34.95.28)	Target change 5.Pt-->Ag@170deg
17	22	28	6898	yasuda	dummy	0	2010/3/15/18:36:52(130.34.95.28)	3.Ti, 5.Ag@R.T.
17	28	34	6898	yasuda	dummy	1	2010/3/17/11:33:6(130.34.95.44)	Target change 5.Ag->SiO2@170deg
18	20	23	6898	yasuda	dummy	0	2010/3/17/12:36:0(130.34.95.28)	5. SiO2@R.T.
18	36	38	6898	yasuda	dummy	0	2010/3/18/18:2:8(130.34.95.28)	 5
26	25	28	6898	lu	dummy	0	2010/3/26/12:12:40(130.34.95.44)	TiN