4	26	34	5810	kim	dummy	0	2010/1/4/9:42:14(130.34.95.49)	0
7	24	30	6898	nobe	dummy	0	2010/1/5/18:41:32(130.34.95.28)	TiN@R.T
7	38	44	6898	yasuda	dummy	1	2010/1/6/10:54:8(130.34.95.28)	Target change 5.Pt->Ag@170deg
-8	22	28	6898	yasuda	dummy	0	2010/1/6/10:55:27(130.34.95.28)	1.Au, 3.Ti, 5.Ag@R.T.	2010/1/7/20:46:5(130.34.95.28)
-8	28	32	6953	Goto	dummy	0	2010/1/6/16:26:47(130.34.95.28)	1. Au at R.T.	2010/1/7/20:46:8(130.34.95.28)
-8	38	44	6898	yasuda	dummy	1	2010/1/7/13:50:4(130.34.95.28)	Target change 5.Ag->SiO2@170deg	2010/1/7/20:46:11(130.34.95.28)
7	30	36	6898	nobe 	dummy	0	2010/1/7/14:54:5(130.34.95.28)	TiN@R.T
-9	22	29	6898	yasuda&lu	dummy	1	2010/1/9/10:52:30(130.34.95.28)	Target change 5.Pt->Ag@170deg 燈明先生承認	2010/1/9/11:11:3(130.34.95.44)
9	22	25	6898	yasuda&lu	dummy	1	2010/1/9/10:52:30(130.34.95.28)	Target change 5.Pt->Ag@170deg 燈明先生承認
12	38	44	6898	yasuda	dummy	1	2010/1/12/12:8:38(130.34.95.28)	Target change 5.Ag->SiO2@170deg
12	34	38	6898	yasuda	dummy	0	2010/1/12/12:9:36(130.34.95.28)	1.Au, 3.Ti, 5.Ag@R.T.
13	28	31	6953	Gotou	dummy	0	2010/1/12/12:19:33(130.34.95.28)	1. Au at R.T.
13	31	35	6898	yasuda	dummy	0	2010/1/12/12:20:7(130.34.95.28)	5. SiO2@R.T.
12	30	34	5810	kim	dummy	0	2010/1/12/14:49:50(130.34.95.49)	0
-14	26	30	4771	cao	dummy	0	2010/1/14/10:11:41(130.34.95.21)	room temperature	2010/1/14/10:11:58(130.34.95.21)
-14	26	32	4771	cao	dummy	0	2010/1/14/10:12:18(130.34.95.21)	room temperature	2010/1/14/10:15:0(130.34.95.21)
14	26	32	4771	cao	dummy	0	2010/1/14/10:15:20(130.34.95.21)	Au/Ti, room temperature
14	33	36	5810	kim	dummy	0	2010/1/14/15:46:31(130.34.95.49)	0
19	32	35	5810	kim	dummy	0	2010/1/19/16:10:23(130.34.95.49)	0
22	27	29	6937	H.matsuo	dummy	0	2010/1/22/13:6:18(130.34.95.44)	Au@RT
25	35	39	6937	H.Matsuo	dummy	1	2010/1/25/17:33:18(130.34.95.43)	Target Change 5,SiO2->Pt & 320℃Bake
26	21	28	6937	H.Matsuo	dummy	0	2010/1/25/18:44:37(130.34.95.44)	Ti/Pt@320
26	36	40	6898	lu	dummy	0	2010/1/26/17:44:20(130.34.95.28)	TiN
29	28	32	5810	kim	dummy	0	2010/1/27/23:50:29(130.34.95.49)	0
30	32	40	4771	cao	dummy	0	2010/1/30/16:7:2(130.34.95.43)	Pt/Ti@300℃
30	40	44	4771	cao	dummy	0	2010/1/30/20:8:11(130.34.95.21)	Pt/Ti 300 degree