-1	20	32	6925	k.yoshida	dummy	0	2009/8/31/14:5:54(130.34.95.35)	target change 3.->Ta, 5->Al	2009/8/31/14:6:21(130.34.95.35)
1	20	30	6925	k.yoshida	dummy	1	2009/8/31/14:7:27(130.34.95.35)	Target change 3.>Ta, 5.>Al
-2	20	40	6937	H.Matsuo	dummy	1	2009/9/1/18:7:0(130.34.95.43)	立ち上げ作業	2009/9/2/10:32:33(130.34.95.44)
2	20	24	6937	H.Matsuo	dummy	1	2009/9/1/18:7:0(130.34.95.43)	立ち上げ作業
2	28	38	5810	金	dummy	0	2009/9/2/13:42:7(130.34.95.49)	TiN体積
4	31	36	6898	lu	dummy	0	2009/9/4/15:6:6(130.34.95.28)	TiN
7	36	43	6898	yasuda	dummy	1	2009/9/4/20:18:16(130.34.95.28)	Target change 1. ->Au, 3. ->Ag@170deg
8	22	30	6898	yasuda	dummy	0	2009/9/4/20:18:57(130.34.95.28)	1.Au, 3.Ag, 5.SiO2@R.T.
7	26	36	4771	曹	dummy	0	2009/9/7/10:7:1(130.34.95.21)	Ti
-10	36	40	6937	H.Matsuo	dummy	0	2009/9/10/15:52:54(130.34.95.43)	Target Change 1,Au->Pt 3,Ag->Ti & 320℃Bake	2009/9/10/15:53:16(130.34.95.43)
10	36	40	6937	H.Matsuo	dummy	1	2009/9/10/15:53:48(130.34.95.43)	Target Change 1,Au->Pt 3,Ag->Ti & 320℃Bake
11	20	24	6937	H.Matsuo	dummy	0	2009/9/10/15:54:23(130.34.95.43)	Ti / Pt @320℃
-14	20	36	4771	曹　cao	dummy	0	2009/9/11/16:56:1(130.34.95.21)	P	2009/9/11/16:56:39(130.34.95.21)
-13	22	36	4771	曹	dummy	0	2009/9/11/16:58:2(130.34.95.21)	P	2009/9/11/16:58:11(130.34.95.21)
14	22	36	4771	曹	dummy	0	2009/9/11/16:58:48(130.34.95.21)	Pt/Ti
14	36	38	4771	曹　cao	dummy	0	2009/9/14/15:12:31(130.34.95.21)	Pt/Ti
15	26	38	6925	kubota&watanabe	dummy	1	2009/9/14/17:23:1(130.34.95.35)	Target change5, SiO2->Ta
-15	20	24	4771	桑　曹　cao	dummy	0	2009/9/14/19:32:55(130.34.95.44)	Pt	2009/9/14/19:33:12(130.34.95.44)
15	20	24	4771	曹	dummy	0	2009/9/14/19:33:43(130.34.95.44)	Pt
-15	38	44	6925	kubota&watanabe	dummy	0	2009/9/15/16:42:9(130.34.95.44)	0	2009/9/15/16:42:16(130.34.95.44)
-15	38	44	6925	kubota&watanabe	dummy	1	2009/9/15/16:42:47(130.34.95.44)	0	2009/9/15/16:43:11(130.34.95.44)
15	38	44	6925	kubota	dummy	1	2009/9/15/16:43:40(130.34.95.44)	0
-16	17	28	6925	kubota	dummy	1	2009/9/15/19:52:57(130.34.95.44)	baking	2009/9/15/20:15:44(130.34.95.44)
16	17	28	6925	k.kubota	dummy	0	2009/9/15/20:16:2(130.34.95.44)	0
17	30	34	6925	kubota(Ta)	dummy	0	2009/9/16/17:23:25(130.34.95.35)	0
-17	34	37	6925	k.yoshida	dummy	0	2009/9/17/16:36:2(130.34.95.44)	0	2009/9/17/16:36:14(130.34.95.44)
17	34	36	6925	k.yoshida	dummy	0	2009/9/17/16:36:2(130.34.95.44)	0
25	20	26	6937	H.Matsuo	dummy	0	2009/9/24/17:56:4(130.34.95.43)	Ti/Pt @320℃
24	37	41	6937	H.Matsuo	dummy	0	2009/9/24/18:26:9(130.34.95.44)	Bake 350℃
-29	34	40	6925	k.yoshida	dummy	0	2009/9/24/20:48:43(130.34.95.35)	0	2009/9/26/21:49:23(130.34.95.35)
-30	20	23	6925	k.kubota	dummy	0	2009/9/28/16:16:25(130.34.95.35)	0	2009/9/28/16:16:31(130.34.95.35)
-30	20	23	6925	k.kubota	dummy	0	2009/9/28/16:17:53(130.34.95.35)	Ta target	2009/9/29/11:43:33(130.34.95.35)
30	30	33	6925	k.kubota	dummy	0	2009/9/29/11:44:52(130.34.95.35)	Ta target
30	19	23	6925	shimizu	dummy	0	2009/9/29/15:46:25(130.34.95.44)	Pt/Ti@RT