-1	28	34	6925	k.yoshida	dummy	0	2009/5/29/19:53:57(130.34.95.35)	Ti@R.T	2009/6/1/13:4:50(130.34.95.35)
1	20	22	6937	H.Matsuo	dummy	0	2009/6/1/9:53:50(172.16.44.146)	Pt@320℃
1	28	29	6925	k.yoshida	dummy	0	2009/5/29/19:53:57(130.34.95.35)	Ti@R.T
1	29	36	6925	k.yoshida	dummy	0	2009/6/1/13:5:33(130.34.95.35)	Ti/R.T
1	40	46	6898	nobe	dummy	0	2009/6/1/15:53:32(130.34.95.28)	TiN@R.T
1	36	38	6925	k.kubota	dummy	0	2009/6/1/16:6:36(130.34.95.35)	Ti/R.T
4	38	44	6898	yasuda	dummy	1	2009/6/1/16:30:11(130.34.95.28)	Target change 5.Pt-->Ag@170deg
5	24	33	6898	yasuda	dummy	0	2009/6/1/16:42:43(130.34.95.28)	3.Ti, 5.Ag@R.T.
6	36	44	6898	yasuda	dummy	1	2009/6/1/16:44:46(130.34.95.28)	Target change 3.Ti-->W, 5.Ag-->SiO2@170deg
7	22	26	6898	yasuda	dummy	0	2009/6/1/16:45:57(130.34.95.28)	1.Au, 3.W, 5.SiO2@R.T.
2	20	29	6925	k.yoshida	dummy	0	2009/6/1/20:20:44(172.16.44.146)	Ti/R.T
4	20	24	6937	H.Matsuo	dummy	0	2009/6/2/9:52:30(130.34.95.43)	Pt @ 320℃
4	32	37	6925	Shimizu	dummy	0	2009/6/2/11:13:42(172.16.44.145)	Pt/Ti@R.T
-2	29	35	6925	k.yoshida	dummy	0	2009/6/2/12:41:28(130.34.95.35)	Ti/R.T	2009/6/2/12:46:18(130.34.95.35)
2	29	35	6925	k.yoshida	dummy	0	2009/6/2/12:47:0(130.34.95.35)	Ti/R.T,装置確認
-3	26	30	6898	nobe	dummy	0	2009/6/2/16:8:29(130.34.95.28)	TiN@R.T	2009/6/3/13:13:46(130.34.95.28)
2	38	40	6937	H KIM	dummy	0	2009/6/2/18:38:17(130.34.95.43)	0
3	26	29	6898	nobe	dummy	0	2009/6/2/16:8:29(130.34.95.28)	TiN@R.T
4	26	30	5810	M. TOda	dummy	0	2009/6/4/12:18:41(130.34.95.49)	Ti-Au
-5	34	42	5810	moriwaki	dummy	0	2009/6/4/18:32:10(130.34.95.49)	Pt @ 300℃	2009/6/4/18:48:21(130.34.95.49)
8	36	44	６９３７	JaeWung Lee	dummy	1	2009/6/5/11:30:54(172.16.44.151)	5--> PZT
9	24	32	6937	JaeWung Lee	dummy	0	2009/6/5/11:31:25(172.16.44.151)	 PZT
-10	24	32	6937	JaeWung Lee	dummy	0	2009/6/5/11:31:49(172.16.44.151)	 PZT	2009/6/10/10:25:9(172.16.44.137)
5	33	36	6898	yasuda	dummy	0	2009/6/5/15:18:10(172.16.44.146)	3.Ti, 5.Ag@R.T.
11	36	44	6937	JW Lee	dummy	1	2009/6/10/10:25:41(172.16.44.137)	PZT
12	22	36	6937	JW LEE	dummy	0	2009/6/10/10:26:16(172.16.44.137)	pzt 
13	22	36	6937	JW Lee	dummy	0	2009/6/10/10:26:47(172.16.44.137)	PZT