7 38 44 6898 yasuda dummy 1 2009/5/7/13:21:16(130.34.95.28) Target change 5.SiO2-->Ag@170deg -8 24 32 6898 yasuda dummy 0 2009/5/7/13:22:9(130.34.95.28) 3.Ti, 5.Ag@R.T. 2009/5/8/13:20:51(172.16.44.146) -8 32 40 5810 驥� 荳咏ヨ dummy 0 2009/5/7/14:12:9(130.34.95.49) Ti 2009/5/8/11:47:45(130.34.95.49) 7 35 36 6937 H.Matsuo dummy 0 2009/5/7/16:47:14(130.34.95.43) Pt@R.T -8 42 48 6898 yasuda dummy 1 2009/5/7/20:32:20(130.34.95.28) Target change 3.Ti-->W@170deg 2009/5/8/13:21:8(172.16.44.146) -9 28 32 6898 yasuda dummy 0 2009/5/7/20:33:9(130.34.95.28) 3.W@R.T. 2009/5/8/13:20:59(172.16.44.146) -8 40 42 6898 lu dummy 0 2009/5/7/20:44:10(130.34.95.28) TiN 2009/5/7/20:45:28(130.34.95.28) 8 19 24 6898 lu dummy 0 2009/5/7/20:45:22(130.34.95.28) TiN 8 17 19 6898 lu dummy 0 2009/5/7/20:48:4(130.34.95.28) TiN 9 21 28 5810 kim dummy 0 2009/5/8/11:47:31(130.34.95.49) TiN 8 24 29 6898 yasuda dummy 0 2009/5/7/13:22:9(130.34.95.28) 3.Ti, 5.Ag@R.T. 8 40 44 6898 yasuda dummy 1 2009/5/8/13:26:34(130.34.95.28) Ag target check -9 30 36 6898 yasuda dummy 0 2009/5/8/14:21:2(130.34.95.28) 3.Ti, 5.Ag@R.T. 2009/5/9/15:21:52(130.34.95.28) -9 36 42 6898 yasuda dummy 1 2009/5/8/14:21:28(130.34.95.28) Target change 3.Ti-->W@170deg 2009/5/9/15:22:0(130.34.95.28) -10 28 33 6898 yasuda dummy 0 2009/5/8/15:49:34(130.34.95.28) 3.W@R.T. 2009/5/9/15:22:7(130.34.95.28) 8 39 40 6937 H.Matsuo dummy 0 2009/5/8/19:10:5(130.34.95.43) Pt@R.T 9 30 33 6898 yasuda dummy 0 2009/5/8/14:21:2(130.34.95.28) 3.Ti, 5.Ag@R.T. 11 28 36 6898 yasuda dummy 0 2009/5/9/17:10:2(130.34.95.28) 3.Ti, 5.Ag@R.T. 11 40 46 6898 yasuda dummy 1 2009/5/9/17:10:33(130.34.95.28) Target change 3.Ti-->W@170deg -12 26 30 6898 yasuda dummy 0 2009/5/9/17:11:15(130.34.95.28) 3.W@R.T. 2009/5/11/12:12:14(130.34.95.28) 12 30 35 6898 yasuda dummy 0 2009/5/11/12:12:31(130.34.95.28) 3.W@R.T. 13 34 37 6898 yasuda dummy 0 2009/5/13/16:16:3(130.34.95.28) 3.W, 5.Ag@R.T. 21 34 48 6937 hino dummy 1 2009/5/21/13:4:41(130.34.95.43) Target change:3. W->Mo 22 0 26 6937 hino dummy 1 2009/5/21/13:5:10(130.34.95.43) Target change:3. W->Mo 22 26 34 6937 hino dummy 0 2009/5/21/13:5:26(130.34.95.43) 3.Mo -22 38 44 6925 Shimizu dummy 0 2009/5/21/16:56:8(130.34.95.35) 0 2009/5/21/18:25:35(130.34.95.35) -22 38 44 6925 Shimizu dummy 0 2009/5/21/18:26:7(130.34.95.35) 1.Pt/ 5.Ti@RT 2009/5/22/12:23:52(172.16.44.171) -23 28 38 4771 譯代cao dummy 0 2009/5/21/18:51:51(130.34.89.162) 1Pt/5Ti 2009/5/21/18:59:22(130.34.89.162) -23 30 39 4771 cao dummy 0 2009/5/21/19:0:18(130.34.89.162) 0 2009/5/21/19:0:30(130.34.89.162) -23 28 40 4771 cao dummy 0 2009/5/21/19:1:2(130.34.89.162) 1Pt/5Ti 2009/5/22/13:11:26(130.34.89.162) 24 28 32 6898 yasuda dummy 0 2009/5/21/19:34:12(130.34.95.28) 3. Mo@R.T. 25 20 26 6898 lu dummy 0 2009/5/21/19:54:7(130.34.95.28) TiN 22 34 38 6937 hino dummy 0 2009/5/22/0:49:15(130.34.94.148) 0 -25 16 20 6925 Shimizu dummy 0 2009/5/22/12:25:55(172.16.44.171) Pt/Ti@R.T. 2009/5/24/17:10:24(130.34.95.35) -25 28 40 4771 cao dummy 0 2009/5/22/13:11:17(130.34.89.162) 1Pt/5Ti 2009/5/25/18:3:1(172.16.44.146) 22 38 44 6937 H.Matsuo dummy 1 2009/5/22/17:36:35(172.16.44.146) 5,Ti target check (No Plasma) 23 31 35 6937 H.Matsuo dummy 1 2009/5/23/15:23:37(172.16.44.146) 0 -27 30 35 6925 Shimizu dummy 0 2009/5/24/17:11:17(130.34.95.35) Pt/Ti@R.T 2009/5/25/20:44:57(172.16.44.171) -25 40 42 6898 yasuda dummy 0 2009/5/25/14:45:9(130.34.95.28) 3. Mo@R.T. 2009/5/25/16:43:51(130.34.95.28) 25 28 39 4771 cao dummy 0 2009/5/22/13:11:17(130.34.89.162) 1Pt/5Ti -25 39 44 6937 H.matsuo dummy 1 2009/5/25/18:4:37(172.16.44.146) Target 5. check & 蜀咲悄遨ｺ蠑輔″bake@170邃� 2009/5/25/18:5:14(172.16.44.146) 25 39 46 6937 H.matsuo dummy 1 2009/5/25/18:7:2(172.16.44.146) No.5 check & target change 3.Mo->Ti 5.Ti->MgO bake @170邃� 26 20 34 �費ｼ暦ｼ暦ｼ� cao dummy 0 2009/5/25/18:10:23(172.16.44.146) 1Pt,3Ti,5MgO 27 20 26 6925 Shimizu dummy 0 2009/5/25/20:44:41(172.16.44.171) Pt/Ti@R.T. -27 40 48 6937 Yoshida dummy 1 2009/5/26/11:54:29(130.34.95.43) Target change 1. Pt->Au 2009/5/27/14:48:44(130.34.95.43) -28 26 30 6937 Yoshida dummy 0 2009/5/26/11:55:29(130.34.95.43) Au deposition 2009/5/27/14:49:57(130.34.95.43) -27 26 34 6937 H.Matsuo dummy 1 2009/5/26/19:42:42(130.34.95.43) 0 2009/5/26/19:44:25(130.34.95.43) -27 26 34 6937 H.Matsuo dummy 0 2009/5/26/19:45:36(130.34.95.43) No5 cathode Repair 2009/5/26/19:45:45(130.34.95.43) 27 26 30 6937 H.Matsuo dummy 1 2009/5/26/19:46:23(130.34.95.43) No5 cathode Repair 27 40 46 6937 Shinya Yoshida dummy 1 2009/5/27/14:49:44(130.34.95.43) Target change 1->Au, 5->Pt -28 20 24 6937 Shinya Yoshida dummy 0 2009/5/27/14:50:24(130.34.95.43) Ti, Pt, Au 2009/5/27/20:26:11(130.34.95.43) 28 26 30 6937 Shinya Yoshida dummy 0 2009/5/27/20:26:27(130.34.95.43) Ti, Pt, Au 29 27 31 6937 H.Matsuo dummy 0 2009/5/29/12:45:54(130.34.95.43) Pt @ 320邃� 31 24 30 6898 nobe dummy 0 2009/5/29/20:8:1(130.34.95.28) TiN