4	30	34	6937	H.Matsuo	dummy	0	2009/3/4/14:10:39(130.34.95.43)	Ti/Pt @320℃
-6	28	30	6937	H.Matsuo	dummy	0	2009/3/5/18:26:20(130.34.95.43)	Pt@R.T	2009/3/6/13:23:48(172.16.44.146)
6	28	29	6937	H.Matsuo	dummy	0	2009/3/5/18:26:20(130.34.95.43)	Pt@R.T
-7	34	42	6898	yasuda	dummy	1	2009/3/6/16:1:39(130.34.95.28)	Target change 3.Pt-->Ti, 5.Ti-->Ag@170deg	2009/3/6/16:42:7(130.34.95.28)
-8	26	32	6898	yasuda	dummy	0	2009/3/6/16:10:8(130.34.95.28)	3.Ti, 5.Ag@R.T.	2009/3/6/16:42:18(130.34.95.28)
6	39	46	6898	yasuda	dummy	1	2009/3/6/16:43:15(130.34.95.28)	Target change 3.Pt-->Ti,5.Ti-->Ag@170deg
7	32	38	6898	yasuda	dummy	0	2009/3/6/16:43:49(130.34.95.28)	3.Ti,5.Ag@R.T.
11	22	28	6898	nobe	dummy	0	2009/3/11/11:1:8(130.34.95.28)	TiN@R.T
13	23	27	6898	lu	dummy	0	2009/3/13/11:9:11(130.34.95.28)	0
-17	25	34	6898	yasuda	dummy	0	2009/3/17/10:55:46(130.34.95.28)	3.Ti, 5.Ag@R.T.	2009/3/17/13:5:50(130.34.95.28)
17	25	29	6898	yasuda	dummy	0	2009/3/17/10:55:46(130.34.95.28)	3.Ti, 5.Ag@R.T.
17	40	44	6898	yasuda	dummy	0	2009/3/17/18:13:55(130.34.95.28)	3.Ti, 5.Ag@R.T.
17	44	48	6898	yasuda	dummy	1	2009/3/17/18:14:53(130.34.95.28)	Target change 5.Ag-->SiO2@170deg
18	22	26	6898	yasuda	dummy	0	2009/3/17/18:15:46(130.34.95.28)	5.SiO2@R.T.
25	30	38	6937	JW Lee	dummy	1	2009/3/25/18:58:51(172.16.44.131)	5 SiO2-->PZT ,1 Au ---> Pt @350degree
26	30	38	6937	JW Lee	dummy	1	2009/3/26/15:6:46(172.16.44.146)	1Au-->Pt 5 SiO2-->PZT at 350 degree
27	20	26	6937	JW Lee	dummy	0	2009/3/26/15:8:29(172.16.44.146)	PZT at room Temp
27	35	39	6937	H.Matsuo	dummy	0	2009/3/27/17:29:33(172.16.44.145)	Pt@320℃
31	36	37	6937	H.Matsuo	dummy	0	2009/3/31/17:29:43(172.16.44.146)	Pt@RT