5	42	48	6898	yasuda	dummy	1	2009/2/5/20:35:54(130.34.95.28)	Target change 3. Mo-->Ag@170deg
6	28	36	6898	yasuda	dummy	0	2009/2/5/20:37:30(130.34.95.28)	1.Ti, 3.Ag,5.SiO2@R.T. 
-9	31	37	6898	lu	dummy	0	2009/2/9/15:6:26(130.34.95.28)	Ti	2009/2/9/15:26:15(130.34.95.28)
9	31	33	6898	lu	dummy	0	2009/2/9/15:6:26(130.34.95.28)	Ti
9	33	37	6898	lu	dummy	0	2009/2/9/15:49:46(130.34.95.28)	Ti
12	30	36	6898	lu	dummy	0	2009/2/12/14:53:25(130.34.95.28)	SiO2
-14	40	48	6937	Shinya Yoshida	dummy	0	2009/2/13/15:22:46(172.16.44.140)	1: Pt, 3 : Au, 5: Ti	2009/2/13/15:22:53(172.16.44.140)
-14	42	48	6937	Shinya Yoshida	dummy	1	2009/2/13/15:23:3(172.16.44.140)	1: Pt, 3 : Au, 5: Ti	2009/2/13/23:51:54(172.16.44.140)
-15	26	32	6937	Shinya Yoshida	dummy	0	2009/2/13/15:23:31(172.16.44.140)	1: Pt, 3 : Au, 5: Ti	2009/2/13/23:52:1(172.16.44.140)
16	42	46	6925	Shimizu	dummy	0	2009/2/16/10:30:41(172.16.44.146)	TargetChange 3 Ag→Pt
-17	19	23	6925	Shimizu	dummy	0	2009/2/16/10:31:50(172.16.44.146)	Ti/Pt@r.t.	2009/2/16/21:37:45(130.34.95.35)
-17	28	32	6937	kumagae	dummy	0	2009/2/16/12:46:31(130.34.95.43)	Ti @RT	2009/2/16/14:15:44(130.34.95.43)
-17	32	36	6937	Shinya Yoshida	dummy	0	2009/2/16/14:9:24(172.16.44.140)	Ti, Pt, Au	2009/2/16/15:28:38(172.16.44.140)
-16	46	48	6937	Shinya Yoshida	dummy	0	2009/2/16/14:11:57(172.16.44.140)	Target change 1->Au, 5->Ti	2009/2/16/21:33:6(172.16.44.140)
-18	28	32	6937	kumagae	dummy	0	2009/2/16/14:16:11(130.34.95.43)	Ti@RT	2009/2/16/15:52:45(130.34.95.43)
17	26	30	6937	Shinya Yoshida	dummy	0	2009/2/16/15:28:53(172.16.44.140)	Ti, Pt, Au
16	39	42	6937	Shinya Yoshida	dummy	0	2009/2/16/17:54:36(172.16.44.140)	0
-17	21	26	6925	Shimizu	dummy	0	2009/2/16/21:38:29(130.34.95.35)	Ti/Pt@R.T.	2009/2/16/23:8:6(130.34.95.35)
17	19	23	6925	Shimizu	dummy	0	2009/2/16/23:8:31(130.34.95.35)	Ti/Pt@R.T.
17	23	25	6925	Shimizu	dummy	0	2009/2/17/10:36:4(130.34.95.35)	0
17	30	32	6937	Shinya Yoshida	dummy	0	2009/2/17/13:35:39(172.16.44.140)	0
-23	36	40	6937	H.Matsuo	dummy	0	2009/2/23/12:56:2(130.34.95.43)	Pt @ 320℃	2009/2/23/14:9:16(172.16.44.146)
23	30	34	6937	H.Matsuo	dummy	0	2009/2/23/14:9:50(172.16.44.146)	Pt@320℃
25	28	34	6898	lu	dummy	0	2009/2/25/10:19:26(130.34.95.28)	TiN@70 deg