1	30	38	4771	チョウ	dummy	0	2009/11/30/21:35:55(130.34.95.43)	Pt/Au/Ti
2	22	34	6898	yasuda	dummy	0	2009/12/1/10:53:44(130.34.95.28)	Baking@300deg and cooling
-1	38	46	6937	kim	dummy	0	2009/12/1/14:23:42(130.34.95.43)	Pt/Ti	2009/12/1/19:52:5(130.34.95.43)
-3	30	36	4771	cao	dummy	0	2009/12/1/18:23:15(130.34.95.21)	Pt/Ti	2009/12/3/12:43:48(130.34.95.21)
1	38	42	6937	kim	dummy	0	2009/12/1/14:23:42(130.34.95.43)	Pt/Ti
10	26	32	6898	yasuda	dummy	0	2009/12/8/17:58:36(130.34.95.28)	3.Ti, 5.Ag@R.T.
9	30	40	6898	yasuda	dummy	1	2009/12/8/17:59:51(130.34.95.28)	Target change 5.Pt->Ag@170deg
10	32	40	6898	yasuda	dummy	1	2009/12/8/18:0:20(130.34.95.28)	Target change 5.Ag->SiO2@170deg
11	22	26	6898	yasuda	dummy	0	2009/12/8/18:1:3(130.34.95.28)	5.SiO2@R.T.
-9	40	44	6937	kim	dummy	0	2009/12/9/11:56:4(130.34.95.43)	Pt/Ti	2009/12/9/11:57:52(130.34.95.43)
17	34	40	4771	Zhang	dummy	0	2009/12/17/16:37:12(130.34.95.21)	Au>Al
18	26	36	4771	zhang	dummy	0	2009/12/17/16:38:44(130.34.95.21)	Al
-18	18	24	6937	Yoshida	dummy	1	2009/12/17/16:40:17(130.34.95.43)	Target change 5->Pt	2009/12/17/16:40:45(130.34.95.43)
-19	40	48	6937	Yoshida	dummy	0	2009/12/17/16:44:7(130.34.95.43)	Target change 1->Au, 5->Pt	2009/12/17/16:44:13(130.34.95.43)
-19	40	48	6937	Yoshida, Makishi	dummy	1	2009/12/17/16:45:13(130.34.95.43)	Target change 1->Au, 5->Pt	2009/12/19/14:54:37(130.34.95.43)
20	26	30	6937	Yoshida, Makishi	dummy	0	2009/12/17/16:45:46(130.34.95.43)	Ti, Pt, Au deposition
-18	37	42	6898	yasuda	dummy	0	2009/12/18/11:36:25(130.34.95.28)	1.Al, 3.Ti, 5.SiO2@R.T.	2009/12/18/19:15:35(130.34.95.44)
18	36	37	4771	zhang	dummy	0	2009/12/18/15:28:59(130.34.95.44)	0
-19	28	39	4771	cao	dummy	0	2009/12/18/16:20:9(130.34.95.44)	AL 300 degree	2009/12/18/17:54:12(130.34.95.21)
18	37	41	6898	yasuda	dummy	0	2009/12/18/11:36:25(130.34.95.28)	1.Al, 3.Ti, 5.SiO2@R.T.
-19	32	38	6937	Yoshida, Makishi	dummy	0	2009/12/19/14:54:51(130.34.95.43)	Target change 1->Au, 5->Pt	2009/12/19/14:54:55(130.34.95.43)
19	32	38	6937	Yoshida, Makishi	dummy	1	2009/12/19/14:55:6(130.34.95.43)	Target change 1->Au, 5->Pt
20	35	40	6937	Yoshida, Takahashi	dummy	0	2009/12/20/16:14:54(130.34.95.43)	Ti, Pt, Au deposition
-22	22	34	4771	cao	dummy	0	2009/12/21/10:11:52(130.34.95.21)	Pt/Ti 300 degree	2009/12/22/10:6:11(130.34.95.21)
21	34	39	6898	lu	dummy	0	2009/12/21/15:18:42(130.34.95.28)	TiN
-23	26	34	5810	kim	dummy	0	2009/12/21/16:19:58(130.34.95.43)	0	2009/12/21/16:52:38(130.34.95.44)
24	20	26	6937	H.Matsuo	dummy	0	2009/12/21/16:48:14(130.34.95.43)	Ti / Pt @320℃
22	22	23	4771	cao	dummy	0	2009/12/21/10:11:52(130.34.95.21)	Pt/Ti 300 degree
22	23	34	4771	cao	dummy	0	2009/12/22/10:7:8(130.34.95.21)	Pt/Ti 300 degree
22	34	37	4771	zhang	dummy	0	2009/12/22/16:10:53(130.34.95.44)	Pt/Ti 300 degree
24	28	36	4771	cao	dummy	0	2009/12/22/16:11:22(130.34.95.44)	Pt/Ti 300 degree
24	38	44	5810	kim	dummy	0	2009/12/24/12:58:56(130.34.95.49)	0