2	36	44	6898	yasuda	dummy	1	2009/10/29/13:41:37(130.34.95.28)	Target change 1. ->Ti, 3. ->Cr, 5. ->Ag@170deg
-4	20	30	6898	yasuda	dummy	0	2009/10/29/13:42:50(130.34.95.28)	1.Ti, 3.Cr, 5.Ag@R.T.	2009/11/4/11:7:16(130.34.95.44)
-4	30	38	6898	yasuda	dummy	1	2009/10/29/13:43:19(130.34.95.28)	Target change 5.Ag->SiO2@170deg	2009/10/30/10:7:33(130.34.95.28)
-5	20	25	6898	yasuda	dummy	0	2009/10/29/13:43:47(130.34.95.28)	5.SiO2@R.T.	2009/10/30/10:8:16(130.34.95.28)
-4	30	38	6898	yasuda	dummy	1	2009/10/30/10:8:1(130.34.95.28)	Target change 1. ->Au, 3. ->SiO2@170deg	2009/11/4/11:7:21(130.34.95.44)
-5	20	25	6898	yasuda	dummy	0	2009/10/30/10:9:1(130.34.95.28)	1.Au, 5.SiO2@R.T.	2009/11/4/11:8:15(130.34.95.44)
2	20	25	6936	Haubold	dummy	0	2009/10/30/16:23:11(130.34.95.43)	Ta / Au　at RT
4	20	25	6898	yasuda	dummy	0	2009/10/29/13:42:50(130.34.95.28)	1.Ti, 3.Cr, 5.Ag@R.T.
4	25	38	6898	yasuda	dummy	1	2009/11/4/11:8:11(130.34.95.44)	Target check & baking@170deg
-5	20	30	6898	yasuda	dummy	0	2009/11/4/11:8:44(130.34.95.44)	1.Ti, 3.Cr, 5.Ag@R.T.	2009/11/5/12:13:41(130.34.95.44)
-5	33	36	6937	kumagae	dummy	0	2009/11/4/16:26:22(130.34.95.43)	Cr	2009/11/5/15:11:50(130.34.95.43)
5	38	44	6898	yasuda	dummy	1	2009/11/4/18:20:9(130.34.95.28)	Target change 1.->Au, 5.->SiO2@170deg
6	20	24	6898	yasuda	dummy	0	2009/11/4/18:20:38(130.34.95.28)	1.Au, 5.SiO2@R.T.
5	20	27	6898	yasuda	dummy	0	2009/11/4/11:8:44(130.34.95.44)	1.Ti, 3.Cr, 5.Ag@R.T.
5	31	33	6937	kumagae	dummy	0	2009/11/5/14:0:40(130.34.95.43)	Cr
5	33	34	6937	kumagae	dummy	0	2009/11/5/15:12:9(130.34.95.43)	0
12	22	36	6937	Yoshida	dummy	1	2009/11/12/10:37:26(130.34.95.43)	Target change 5->Pt
-12	40	44	6937	Yoshida	dummy	0	2009/11/12/11:39:7(130.34.95.44)	Cr, Pt, Au deposition	2009/11/12/18:59:37(130.34.95.43)
13	20	32	4771	曹	dummy	0	2009/11/12/14:16:24(130.34.95.21)	Cr/Au/Pt
12	46	48	6937	Yoshida	dummy	0	2009/11/12/19:0:30(130.34.95.43)	Cr, Pt, Au deposition
13	32	36	4771	曹	dummy	0	2009/11/13/10:39:19(130.34.95.21)	Cr/Au/Pt
13	36	38	4771	曹	dummy	0	2009/11/13/16:24:48(130.34.95.44)	Cr/Au
-16	26	38	4771	曹	dummy	0	2009/11/13/17:51:28(130.34.95.21)	Cr/Au/Pt	2009/11/14/16:40:25(130.34.95.21)
13	38	42	6925	watanabe	dummy	0	2009/11/13/18:12:20(130.34.95.35)	Cr
-16	28	34	4771	曹	dummy	0	2009/11/14/16:41:5(130.34.95.21)	Pt	2009/11/15/16:35:13(130.34.95.21)
-17	32	44	4771	曹	dummy	0	2009/11/14/16:43:52(130.34.95.21)	Au/Pt	2009/11/16/11:12:29(130.34.95.21)
-16	30	38	4771	曹	dummy	0	2009/11/15/16:36:14(130.34.95.21)	Au/Pt	2009/11/16/11:10:36(130.34.95.21)
-16	32	40	4771	曹	dummy	0	2009/11/16/11:11:17(130.34.95.21)	Pt	2009/11/16/16:55:40(130.34.95.44)
17	32	40	4771	曹	dummy	0	2009/11/16/11:13:12(130.34.95.21)	Au/Pt
18	20	38	4771	曹	dummy	0	2009/11/16/11:14:0(130.34.95.21)	Au/Pt
16	32	36	4771	曹	dummy	0	2009/11/16/11:11:17(130.34.95.21)	Pt
16	36	42	6898	nobe	dummy	1	2009/11/16/17:54:51(130.34.95.28)	target change 3->Ti
17	26	32	6898	nobe	dummy	0	2009/11/16/21:3:11(130.34.95.28)	ＴｉＮ＠ＲＴ
17	40	44	6898	nobe	dummy	0	2009/11/17/14:49:49(130.34.95.28)	TiN@70℃
19	34	40	6898	nobe	dummy	0	2009/11/17/19:44:30(130.34.95.44)	TiN@70deg
-18	38	42	4771	チョウ	dummy	0	2009/11/18/14:3:30(130.34.95.44)	Au/Pt	2009/11/18/19:26:57(130.34.95.44)
-19	28	34	4771	チョウ	dummy	0	2009/11/18/19:14:24(130.34.95.44)	Au/Pt	2009/11/18/19:47:35(130.34.95.44)
18	38	41	4771	チョウ	dummy	0	2009/11/18/14:3:30(130.34.95.44)	Au/Pt
18	41	44	4771	チョウ	dummy	0	2009/11/18/19:27:28(130.34.95.44)	Au/Pt
25	20	26	6937	H.Matsuo	dummy	0	2009/11/24/9:58:2(130.34.95.43)	Ti / Pt @320℃
24	27	32	6937	H.Matsuo	dummy	0	2009/11/24/12:56:53(130.34.95.44)	Ti/Pt @320℃
24	32	36	6937	H.Matsuo	dummy	0	2009/11/24/14:59:13(130.34.95.44)	Ti/Pt @320℃
27	20	22	6937	H.Matsuo	dummy	0	2009/11/27/10:2:55(130.34.95.44)	Pt@RT