2 19 22 6925 k.kubota dummy 0 2009/9/30/21:0:31(130.34.95.35) Ta target 6 39 44 6898 yasuda dummy 1 2009/10/6/15:12:19(130.34.95.28) Target change 1. Pt->Au, 5. Ta->Ag@170deg 7 24 32 6898 yasuda dummy 0 2009/10/6/15:16:47(130.34.95.28) 1.Au, 3.Ti, 5.Ag@R.T. 7 32 37 6898 yasuda dummy 1 2009/10/6/20:59:6(130.34.95.28) Target change 5.Ag->SiO2@170deg 8 22 26 6898 yasuda dummy 0 2009/10/7/18:39:26(130.34.95.28) 5.SiO2@R.T. 19 26 30 6937 H.Matsuo dummy 1 2009/10/15/14:48:59(130.34.95.43) 担当者引継ぎ 19 31 37 5810 金 dummy 0 2009/10/19/7:38:10(130.34.95.49) 0 19 37 39 5810 kim dummy 0 2009/10/19/17:50:19(130.34.95.44) 0 -20 30 40 6898 yasuda dummy 1 2009/10/20/12:51:6(130.34.95.28) 0 2009/10/20/14:51:0(130.34.95.28) 20 30 32 6898 yasuda dummy 1 2009/10/20/12:51:6(130.34.95.28) 0 22 19 28 4771 曹 dummy 0 2009/10/21/22:37:25(130.34.95.21) Ｔｉ 22 28 30 4771 tachihara dummy 0 2009/10/22/11:2:13(130.34.95.21) Au@R.T -22 30 34 4771 tachihara dummy 0 2009/10/22/14:25:45(130.34.95.44) Au 2009/10/22/14:52:35(130.34.95.21) 22 30 32 4771 tachihara dummy 0 2009/10/22/14:25:45(130.34.95.44) Au 22 33 35 6937 H.Matsuo dummy 0 2009/10/22/16:30:52(130.34.95.43) Au@RT -23 19 25 5810 金 dummy 0 2009/10/22/22:9:51(130.34.95.49) 0 2009/10/22/22:19:55(130.34.95.49) 23 16 21 5810 金 dummy 0 2009/10/22/22:20:9(130.34.95.49) 0 -23 32 38 5810 金 dummy 0 2009/10/23/12:45:12(130.34.95.49) 0 2009/10/23/14:7:59(130.34.95.49) 23 29 35 5810 金 dummy 0 2009/10/23/14:8:10(130.34.95.49) 0 26 42 44 5810 kim dummy 0 2009/10/26/17:8:45(130.34.95.44) 0 -27 36 40 6937 H.Matsuo dummy 1 2009/10/26/17:24:26(130.34.95.43) 1.Au->Pt 320℃ベーク 2009/10/27/16:31:25(130.34.95.43) 28 20 24 6937 H.Matsuo dummy 0 2009/10/26/17:24:58(130.34.95.43) Ti/Pt @320℃ -28 36 40 6937 Haubold dummy 0 2009/10/27/14:36:16(130.34.95.43) 1.Pt->Au 3.Ti->Ta 170℃ベーク 2009/10/27/16:40:28(130.34.95.43) 29 20 24 6937 Haubold dummy 0 2009/10/27/14:37:10(130.34.95.43) Ta & Au@RT -29 28 32 6937 Haubold dummy 0 2009/10/27/14:38:4(130.34.95.43) Ta & Au@RT 2009/10/28/19:37:32(130.34.95.44) -27 36 40 6937 H.Matsuo dummy 1 2009/10/27/16:38:6(130.34.95.43) 5.SiO2->Pt 320℃ベーク 2009/10/27/16:38:31(130.34.95.43) -27 36 40 6937 H.Matsuo dummy 1 2009/10/27/16:39:21(130.34.95.43) 5.SiO2->Pt 320℃ベーク 2009/10/27/16:42:4(130.34.95.43) -29 36 40 6937 Haubold dummy 1 2009/10/27/16:41:6(130.34.95.43) 3.Ti->Ta 170℃ベーク 2009/10/27/16:41:30(130.34.95.43) 28 36 40 6937 Haubold dummy 1 2009/10/27/16:41:56(130.34.95.43) 3.Ti->Ta 170℃ベーク 27 36 40 6937 H.Matsuo dummy 1 2009/10/27/16:42:36(130.34.95.43) 5.SiO2->Pt 320℃ベーク -29 28 32 6936 Haubold dummy 0 2009/10/28/19:38:2(130.34.95.44) Au at RT 2009/10/29/13:5:27(130.34.95.43) -29 34 38 6936 Haubold dummy 0 2009/10/28/19:38:37(130.34.95.44) Ta / Au @ RT 2009/10/29/13:6:16(130.34.95.43) 29 28 29 6936 Haubold dummy 0 2009/10/28/19:38:2(130.34.95.44) Au at RT 29 29 34 6936 Haubold dummy 0 2009/10/29/13:6:13(130.34.95.43) Ta / Au @ RT 29 34 42 6936 Haubold dummy 1 2009/10/29/16:35:47(130.34.95.44) pumping x heating at 350℃ for chamber vent problem 30 20 25 6936 Haubold dummy 0 2009/10/29/16:36:30(130.34.95.44) Ta and Au at RT