6	28	34	6898	lu	dummy	0	2009/1/6/11:43:1(130.34.95.28)	TiN
7	32	37	6937	ioana	dummy	0	2009/1/7/12:6:40(130.34.95.43)	Pt->Au, Ti->Cr
9	32	37	6937	ioana	dummy	0	2009/1/7/12:7:54(130.34.95.43)	Au, Cr
9	28	32	6937	ioana	dummy	0	2009/1/7/12:21:20(130.34.95.43)	cr, au
8	34	38	6937	ioana	dummy	0	2009/1/8/11:7:28(130.34.95.43)	Pt -> Au, Ti -> Cr
-9	37	48	6937	M. Toda	dummy	0	2009/1/8/16:29:36(130.34.95.43)	baking	2009/1/8/16:29:45(130.34.95.43)
8	38	48	6937	M. Toda	dummy	0	2009/1/8/16:30:9(130.34.95.43)	baking
-13	38	48	6898	lu	dummy	1	2009/1/10/12:24:7(130.34.95.28)	Target	2009/1/10/12:24:16(130.34.95.28)
-13	38	48	6898	lu	dummy	1	2009/1/10/12:26:1(130.34.95.28)	target change 3.cr->Ti, 5.sio2->Cu at 170deg	2009/1/13/13:45:25(130.34.95.28)
-14	36	42	6937	k.hirano	dummy	1	2009/1/12/17:26:31(172.16.44.146)	target change 3.Ti->Mo @350	2009/1/13/14:7:15(130.34.95.43)
-15	16	30	6937	k.hirano	dummy	0	2009/1/12/17:27:56(172.16.44.146)	3.Mo @300	2009/1/12/17:30:24(172.16.44.146)
-15	12	26	6937	k.hirano	dummy	0	2009/1/12/17:31:18(172.16.44.146)	3.Mo @300	2009/1/13/14:10:25(130.34.95.43)
14	20	26	6898	lu	dummy	0	2009/1/13/10:11:35(130.34.95.28)	TiN
-15	28	34	6898	lu	dummy	0	2009/1/13/13:28:58(130.34.95.28)	Cu	2009/1/13/13:45:15(130.34.95.28)
-13	38	44	6898	lu	dummy	1	2009/1/13/13:46:15(130.34.95.28)	target change 3.cr->Ti at 170deg	2009/1/13/14:7:8(130.34.95.28)
-13	38	44	6898	lu	dummy	0	2009/1/13/14:7:25(130.34.95.28)	0	2009/1/13/14:7:33(130.34.95.28)
13	38	44	6898	lu	dummy	1	2009/1/13/14:8:35(130.34.95.28)	target change 1.Au->Ti at 170deg
13	44	48	6937	K.HIrano	dummy	1	2009/1/13/14:10:9(130.34.95.43)	target change 3. Cr->Mo @350
14	26	40	6937	K.Hirano	dummy	0	2009/1/13/14:11:26(130.34.95.43)	3.Mo@300
15	26	32	6898	nobe	dummy	0	2009/1/15/11:27:3(130.34.95.28)	TiN
-15	32	38	6898	lu	dummy	0	2009/1/15/12:12:11(130.34.95.43)	TiN	2009/1/15/14:41:52(130.34.95.28)
16	21	27	6898	lu	dummy	0	2009/1/16/10:12:57(130.34.95.28)	TiN
19	34	48	6937	k.hirano	dummy	0	2009/1/19/13:40:49(130.34.95.43)	3,Mo@300
20	38	44	6937	H.Matsuo	dummy	1	2009/1/20/19:5:30(172.16.44.146)	Target Change 5,SiO2->Pt@350
21	20	25	6937	H.Matsuo	dummy	0	2009/1/20/20:10:42(172.16.44.146)	Pt@320
22	26	32	6925	Shimizu	dummy	0	2009/1/21/11:21:10(130.34.95.35)	Pt/Ti@R.T
22	38	44	6898	yasuda	dummy	1	2009/1/21/18:21:23(130.34.95.28)	Target change 5.Pt-->Ag@170deg
23	40	46	6898	yasuda	dummy	1	2009/1/21/18:22:5(130.34.95.28)	Target change 5.Ag-->SiO2@170deg
23	22	30	6898	yasuda	dummy	0	2009/1/21/18:22:37(130.34.95.28)	5.Ag@R.T.
24	25	30	6898	yasuda	dummy	0	2009/1/21/18:23:9(130.34.95.28)	5.SiO2@R.T.
24	44	46	6898	yasuda	dummy	0	2009/1/24/17:55:44(130.34.95.28)	5.SiO2@R.T.
-27	28	34	6898	lu	dummy	0	2009/1/27/11:25:12(130.34.95.28)	TiN@70 deg	2009/1/27/13:16:1(130.34.95.28)
27	28	29	6898	lu	dummy	0	2009/1/27/11:25:12(130.34.95.28)	TiN@70 deg
28	44	47	6925	Shimizu	dummy	0	2009/1/28/14:47:39(172.16.44.171)	3.Mo→Pt@R.T
-29	26	32	6925	Shimizu	dummy	0	2009/1/28/14:49:55(172.16.44.171)	Ti/Pt@R.T	2009/1/28/23:38:17(172.16.44.146)
-29	24	26	6925	Shimizu	dummy	0	2009/1/28/14:52:15(172.16.44.171)	0	2009/1/28/23:38:22(172.16.44.146)
28	47	48	6925	Shimizu	dummy	0	2009/1/28/23:39:51(172.16.44.146)	TargetChangeせず