-1 24 36 6937 Andrew dummy 0 2008/6/30/12:30:2(130.34.95.43) Cr/Au @ 170C 2008/7/1/1:6:3(130.34.95.43) 1 30 43 6937 Andrew dummy 0 2008/7/1/1:6:31(130.34.95.43) Cr/Au @ 170 C -2 20 32 6937 kumagae dummy 0 2008/7/1/12:24:2(130.34.95.43) Cr@RT 2008/7/2/14:18:47(172.16.44.137) -2 32 36 6925 yoshinaga dummy 0 2008/7/1/15:59:54(172.16.44.136) 1W at R.T 2008/7/1/18:24:21(130.34.95.35) 1 43 48 6937 Andrew dummy 0 2008/7/1/16:51:22(130.34.95.43) 0 2 32 36 6925 yoshinaga dummy 0 2008/7/1/18:24:37(130.34.95.35) 0 2 20 31 6937 kumagae dummy 0 2008/7/1/12:24:2(130.34.95.43) Cr@RT 2 37 38 6937 H.Matsuo dummy 0 2008/7/2/18:36:1(172.16.44.137) Au@RT -3 38 42 6925 yoshinaga dummy 0 2008/7/2/19:51:40(130.34.95.35) Target mentenance 1W 2008/7/2/19:51:53(130.34.95.35) -3 38 42 6925 yoshinaga dummy 1 2008/7/2/19:52:23(130.34.95.35) Target mentenance 1W 2008/7/3/17:57:47(172.16.44.137) 3 29 34 6937 kumagae dummy 0 2008/7/3/10:36:55(130.34.95.43) Cr 3 34 35 6937 kumagae dummy 0 2008/7/3/15:53:26(172.16.44.137) 0 3 36 40 6925 yoshinaga dummy 1 2008/7/3/17:58:19(172.16.44.137) Target mentenance 1W 5 39 40 6937 H.Matsuo dummy 0 2008/7/5/19:36:35(172.16.44.137) Au@RT 7 34 38 6925 yoshinaga dummy 0 2008/7/7/12:17:57(130.34.95.35) 1W at RT 7 38 39 6925 yoshinaga dummy 0 2008/7/7/17:24:10(172.16.44.137) 1W at R.T 8 20 25 6937 kumagae dummy 0 2008/7/8/9:22:19(130.34.95.43) Cr -8 30 33 6937 Andrew dummy 0 2008/7/8/13:57:54(172.16.44.140) Cr/Au @ 170 C 2008/7/8/14:26:18(172.16.44.140) 8 30 31 6937 Andrew dummy 0 2008/7/8/13:57:54(172.16.44.140) Cr/Au @ 170 C 8 32 35 6937 Andrew dummy 0 2008/7/8/14:26:40(172.16.44.140) Cr/Au @ 170 C 8 40 48 6937 Andrew dummy 0 2008/7/8/17:22:30(130.34.95.43) Cr/Au @ 170C 9 0 4 6937 Andrew dummy 0 2008/7/8/17:23:26(130.34.95.43) Cr/Au @ 170C -9 26 30 6925 watanabe dummy 0 2008/7/8/21:10:28(130.34.95.35) 0 2008/7/8/21:13:17(130.34.95.35) -11 34 37 6925 watanabe dummy 0 2008/7/10/16:35:23(130.34.95.35) Au 2008/7/11/11:58:19(130.34.95.35) 11 42 48 6925 maegami dummy 0 2008/7/10/20:51:46(130.34.95.35) Target change 3Au>Pt, 5Cr>Ti 11 20 26 6925 maegami dummy 0 2008/7/10/23:58:15(130.34.95.35) Pt/Ti@RT 11 33 34 6937 H.Matsuo dummy 0 2008/7/11/16:24:51(172.16.44.137) Pt@R.T 12 36 46 6898 yasuda dummy 1 2008/7/11/16:31:40(130.34.95.28) Target Change 1.W-->Cu 3.Pt-->Ta 13 24 30 6898 yasuda dummy 0 2008/7/11/16:32:48(130.34.95.28) 1.Cu 3.Ta@R.T. 12 28 32 6898 sun dummy 0 2008/7/11/16:59:37(130.34.95.28) TiN@70degree -12 32 34 6898 5.Ti@R.T. dummy 0 2008/7/12/13:59:25(130.34.95.28) 0 2008/7/12/13:59:36(130.34.95.28) 12 32 34 6898 yasuda dummy 0 2008/7/12/13:59:56(130.34.95.28) 5.Ti@R.T. 14 28 32 6898 sun dummy 0 2008/7/12/18:22:31(130.34.95.28) TiN@70degree 14 40 48 6937 Andrew dummy 1 2008/7/14/13:19:21(172.16.44.140) Target Change Cr/Au 15 26 28 6937 Andrew dummy 0 2008/7/14/14:24:8(130.34.95.43) Cr/Au at 170 15 36 40 4771 Ishikawa dummy 0 2008/7/14/15:48:24(130.34.95.21) Cr/Au@R.T 14 32 34 6968 sun dummy 0 2008/7/14/15:50:21(172.16.44.137) 0 -14 36 40 6898 sun dummy 0 2008/7/14/18:16:24(130.34.95.28) 0 2008/7/14/18:16:40(130.34.95.28) 14 36 39 6898 sun dummy 0 2008/7/14/18:16:24(130.34.95.28) 0 14 39 40 6898 sun dummy 0 2008/7/14/18:17:21(130.34.95.28) TiN@70degree -15 20 24 6898 sun dummy 0 2008/7/15/9:40:34(130.34.95.28) TiN@70degree 2008/7/15/10:18:11(130.34.95.28) 15 20 23 6898 sun dummy 0 2008/7/15/9:40:34(130.34.95.28) TiN@70degree -15 30 34 6898 sun dummy 0 2008/7/15/10:18:52(130.34.95.28) TiN@70degree 2008/7/15/12:52:27(130.34.95.28) 16 20 24 6898 sun dummy 0 2008/7/15/14:37:10(130.34.95.28) TiN@70degree 16 25 26 6937 H.Matsuo dummy 0 2008/7/16/9:57:37(172.16.44.137) Au@RT -17 38 42 6937 H.Matsuo dummy 0 2008/7/16/19:32:24(130.34.95.43) 1.Au->Pt 320℃ベーク 2008/7/16/19:32:50(130.34.95.43) 17 38 42 6937 H.Matsuo dummy 1 2008/7/16/19:33:25(130.34.95.43) 1.Au->Pt 320℃ベーク -18 20 26 6937 H.Matsuo dummy 0 2008/7/16/19:33:54(130.34.95.43) Pt @ 320℃ 2008/7/16/19:34:9(130.34.95.43) 18 20 26 6937 H.Matsuo dummy 0 2008/7/16/19:34:32(130.34.95.43) Ti / Pt @320℃ 17 26 38 4404 Lee dummy 0 2008/7/16/20:0:58(130.34.248.30) Cr at R.T. -18 28 36 4404 Lee dummy 0 2008/7/17/15:16:54(130.34.248.30) Ti at R.T. 2008/7/17/15:17:7(130.34.248.30) -18 28 38 4404 Ha dummy 0 2008/7/17/15:17:25(130.34.248.30) Ti at R.T. 2008/7/18/10:37:25(130.34.248.30) -18 30 40 4404 Ha dummy 0 2008/7/18/10:38:4(130.34.248.30) Ti dep.(RT) 2008/7/18/15:17:15(130.34.248.30) 18 30 33 4404 Ha dummy 0 2008/7/18/10:38:4(130.34.248.30) Ti dep.(RT) 18 36 37 6937 H.Matsuo dummy 0 2008/7/18/17:56:7(172.16.44.141) Pt@RT 22 40 48 6937 Andrew dummy 0 2008/7/22/13:50:57(172.16.44.140) Target Change Cr/Au -23 28 31 6937 Andrew dummy 0 2008/7/22/20:54:17(172.16.44.140) Cr/Au @ 170 C 2008/7/23/11:55:6(172.16.44.140) 23 29 32 6937 Andrew dummy 0 2008/7/23/11:55:26(172.16.44.140) Cr/Au @ 170 C 23 34 35 6937 H.Matsuo dummy 0 2008/7/23/17:2:46(172.16.44.137) Au@RT 30 28 36 6937 kumagae dummy 0 2008/7/24/12:13:41(130.34.95.43) Cr @RT 25 30 31 6937 H.Matsuo dummy 0 2008/7/25/14:48:52(172.16.44.137) Au@RT 25 33 42 4404 Lee dummy 0 2008/7/25/16:5:29(130.34.248.30) Cr/Ti at R.T. 28 30 33 6937 Andrew dummy 0 2008/7/26/19:23:22(172.16.44.140) Cr/Au @ 170 C 29 36 40 6925 yoshinaga dummy 1 2008/7/28/13:10:28(130.34.95.35) Target change 5Ti→W -30 24 28 6925 yoshinaga dummy 0 2008/7/28/13:19:36(130.34.95.35) 3W@R.T 2008/7/28/13:19:43(130.34.95.35) 30 24 28 6925 yoshinaga dummy 0 2008/7/28/13:20:8(130.34.95.35) 5W@R.T 28 34 38 4771 Ishikawa dummy 0 2008/7/28/14:50:53(130.34.95.21) Cr/Au@R.T. 28 44 46 6937 Andrew dummy 0 2008/7/28/21:32:48(172.16.44.144) Cr/Au @ 170 C 29 31 32 6937 H.Matsuo dummy 0 2008/7/29/15:13:37(172.16.44.137) Au@RT 30 44 48 6937 Sarah dummy 0 2008/7/30/14:18:49(172.16.44.140) Target Change Ti/Pt/PZT 31 26 36 6937 Sarah dummy 0 2008/7/30/14:19:50(172.16.44.140) Pt/Ti/PZT @ 350 30 36 40 6937 kumagae dummy 0 2008/7/30/17:2:34(172.16.44.137) Cr 30 40 44 6925 watanabe dummy 0 2008/7/30/18:35:57(130.34.95.35) Au 31 40 42 6937 H.Matsuo dummy 1 2008/7/31/14:39:22(172.16.44.137) shutdown