1	36	44	6936	kawai	dummy	0	2008/4/1/18:9:19(172.16.44.137)	PZT@400C
5	36	42	6937	k.hirano	dummy	1	2008/4/4/20:32:46(130.34.95.43)	target change 3.Cr ->Ge 300℃
-8	36	42	6937	k.hirano	dummy	1	2008/4/4/20:36:56(130.34.95.43)	target change 3.Ge->Mo @350℃	2008/4/7/16:8:39(172.16.44.137)
-9	16	32	6937	k.hirano	dummy	0	2008/4/4/20:38:39(130.34.95.43)	3.Mo @300℃	2008/4/7/16:9:51(172.16.44.137)
5	25	27	6925	Andrew	dummy	0	2008/4/5/11:31:40(172.16.44.140)	Cr/Au @ 170C
5	34	36	6925	Andrew	dummy	0	2008/4/5/14:5:15(172.16.44.140)	Cr/Au @ 170C
6	30	36	6937	k.hirano	dummy	0	2008/4/6/12:41:12(130.34.95.43)	3.Ge RT
7	21	22	6937	H.Matsuo	dummy	0	2008/4/7/10:11:33(130.34.95.43)	Au@RT
7	38	44	6937	k.hirano	dummy	1	2008/4/7/16:8:34(172.16.44.137)	target change 3.Ge ->Mo @350℃
8	26	42	6937	k.hirano	dummy	0	2008/4/7/16:9:47(172.16.44.137)	3.Mo@300℃
-15	18	26	6936	Matsuzaki	dummy	0	2008/4/7/21:46:16(130.34.95.43)	Ge@300℃	2008/4/8/9:33:44(130.34.95.43)
9	44	48	6937	Andrew	dummy	0	2008/4/9/18:46:2(130.34.95.43)	Mo -> Cr
10	26	28	6937	Andrew	dummy	0	2008/4/9/18:54:54(130.34.95.43)	Cr/Au @ 170 C
-10	44	46	6937	Andrew	dummy	0	2008/4/9/19:13:8(130.34.95.43)	Cr/Au @ 170 C	2008/4/10/16:45:40(172.16.44.140)
11	38	44	6937	k.hirano	dummy	0	2008/4/9/19:58:42(130.34.95.43)	target change 3.Cr ->Mo @350℃
-11	44	46	6937	H.Matsuo	dummy	0	2008/4/10/13:0:19(130.34.95.43)	Target Change 1,Au->Pt & 350℃Bake	2008/4/10/18:25:42(130.34.95.43)
10	32	34	6937	Andrew	dummy	0	2008/4/10/15:32:24(172.16.44.140)	Cr/Au @ 170 C
11	2	4	6937	Andrew	dummy	0	2008/4/10/15:32:52(172.16.44.140)	Cr/Au @ 170 C
11	37	38	6937	H.Matsuo	dummy	0	2008/4/11/18:5:49(172.16.44.137)	target change 1.Au ->Pt @350℃
12	26	28	6937	H.Matsuo	dummy	0	2008/4/12/13:13:17(172.16.44.137)	Pt@320℃
14	22	24	6937	H.Matsuo	dummy	0	2008/4/14/10:6:10(130.34.95.43)	Pt@R.T
14	34	48	6937	k.hirano	dummy	0	2008/4/14/15:40:23(130.34.95.43)	3.Mo@300℃
17	0	14	6925	Andrew	dummy	0	2008/4/16/22:0:38(172.16.44.140)	Target Change Cr/Au
17	46	48	6925	Andrew	dummy	0	2008/4/16/22:1:3(172.16.44.140)	Cr/Au @ 170 C
17	16	18	6925	Andrew	dummy	0	2008/4/17/7:38:54(130.34.95.43)	0
18	8	10	6925	Andrew	dummy	0	2008/4/17/7:49:12(172.16.44.140)	Cr/Au at 170
19	34	42	6936	Matsuzaki	dummy	1	2008/4/18/18:43:15(130.34.95.43)	Cr-->Ge
21	19	28	6936	Matsuzaki	dummy	0	2008/4/18/18:43:39(130.34.95.43)	Ge@300℃
22	26	36	6936	Matsuzaki	dummy	0	2008/4/20/12:22:33(130.34.95.43)	Ge@300℃
20	36	40	6936	Matsuzaki	dummy	0	2008/4/20/17:42:18(130.34.95.43)	0
21	34	48	6925	Andrew	dummy	0	2008/4/21/8:43:54(130.34.95.43)	PZT -> Cr target change
-22	16	19	6925	Andrew	dummy	0	2008/4/21/8:44:42(130.34.95.43)	Cr/Au @ 170	2008/4/21/21:2:46(172.16.44.140)
22	36	48	6925	Andrew	dummy	0	2008/4/21/8:45:17(130.34.95.43)	Cr/Au @ 170 C
22	22	26	6937	Andrew	dummy	0	2008/4/21/21:4:6(172.16.44.140)	Cr/Au @ 170
-23	38	41	6937	Andrew	dummy	0	2008/4/22/8:57:50(130.34.95.43)	Cr/Au @ 170C	2008/4/23/10:18:58(172.16.44.140)
-24	24	34	6937	Andrew	dummy	0	2008/4/22/8:58:38(130.34.95.43)	Cr/Au @ 170C	2008/4/23/10:20:26(172.16.44.140)
23	25	31	6936	Matsuzaki	dummy	0	2008/4/22/10:23:43(130.34.95.43)	Ge@200℃
23	21	24	6937	Andrew	dummy	0	2008/4/23/10:16:21(172.16.44.140)	Cr/Au @ 170 C
23	34	44	6937	Andrew	dummy	0	2008/4/23/10:20:19(172.16.44.140)	Cr/Au @ 170 C
24	38	42	6937	H.Matsuo	dummy	1	2008/4/24/13:21:14(130.34.95.43)	1.Au->Pt  320℃ベーク
25	20	24	6937	H.Matsuo	dummy	0	2008/4/24/13:21:50(130.34.95.43)	Pt @ 320℃
25	29	30	6937	H.Matsuo	dummy	0	2008/4/25/14:26:30(172.16.44.137)	Pt@RT
27	22	34	6937	Andrfew	dummy	0	2008/4/27/10:45:16(130.34.95.43)	Cr/Au target change
28	24	27	6937	Andrew	dummy	0	2008/4/27/17:44:6(130.34.95.43)	Cr/Au @170
28	40	42	6937	Andrew	dummy	0	2008/4/27/17:45:1(130.34.95.43)	Cr/Au at RT
-29	30	32	6937	Andrew	dummy	0	2008/4/29/13:24:55(130.34.95.43)	Cr/Au	2008/4/29/13:30:37(130.34.95.43)
-29	40	42	6937	Andrew	dummy	0	2008/4/29/13:30:58(130.34.95.43)	Cr/Au	2008/4/29/17:12:1(172.16.44.140)
29	36	38	6937	Andrew	dummy	0	2008/4/29/17:12:21(172.16.44.140)	0