4	40	48	4771	Ishikawa	dummy	1	2008/3/3/12:53:2(130.34.89.180)	Target ｃhange 1->Pt 3->Ti 5->PZT@350℃
5	0	18	4771	Ishikawa	dummy	1	2008/3/3/12:53:22(130.34.89.180)	Target ｃhange 1->Pt 3->Ti 5->PZT@350℃
5	18	24	4771	Ishikawa	dummy	0	2008/3/3/12:53:40(130.34.89.180)	PZT/Pt/Ti@350℃
-6	36	44	6898	yasuda	dummy	0	2008/3/4/15:18:1(130.34.95.28)	Target change 5.PZT→SiO2@170℃	2008/3/6/17:44:59(130.34.95.28)
7	24	30	6898	yasuda	dummy	0	2008/3/4/15:19:7(130.34.95.28)	5.SiO2@R.T.
-10	36	42	6937	Matsuzaki	dummy	1	2008/3/6/17:28:16(130.34.95.43)	3.Ti→3.Ge	2008/3/6/17:28:39(130.34.95.43)
10	36	44	6937	matsuzaki	dummy	1	2008/3/6/17:30:10(130.34.95.43)	3.Ti→3.Ge
6	36	38	6898	yasuda	dummy	0	2008/3/4/15:18:1(130.34.95.28)	Target change 5.PZT→SiO2@170℃
6	38	44	6898	yasuda	dummy	1	2008/3/6/17:45:51(130.34.95.28)	Target change 5.PZT→SiO2@170℃
7	30	42	6937	M. Toda	dummy	0	2008/3/6/19:51:56(130.34.95.43)	0
7	42	48	4771	Ishikawa	dummy	0	2008/3/6/20:7:20(130.34.89.180)	Pt/Ti@350℃
8	6	18	6937	Andrew	dummy	0	2008/3/7/17:37:21(130.34.95.43)	Target Change Cr/Au
10	20	24	6937	Andrew	dummy	0	2008/3/7/17:43:31(130.34.95.43)	Cr/Au at 170C
-12	40	48	4830	M. Otani	dummy	0	2008/3/8/18:18:27(130.34.95.30)	Target cheange 1. Cu 3. Ta @230 C	2008/3/12/14:16:42(130.34.95.30)
-13	26	34	4830	M. Otani	dummy	0	2008/3/8/18:19:38(130.34.95.30)	Ta/Cu @ 200C	2008/3/12/14:16:46(130.34.95.30)
10	32	36	6937	Andrew	dummy	0	2008/3/10/13:19:3(130.34.95.43)	Cr/Au at 170C
11	18	28	6936	Matsuzaki	dummy	0	2008/3/10/14:36:3(130.34.95.43)	0
-11	28	34	6937	nakamura	dummy	0	2008/3/10/16:49:13(130.34.95.43)	3.Ge @RT	2008/3/11/9:41:40(130.34.95.43)
-11	32	39	6937	nakamura	dummy	0	2008/3/11/9:42:0(130.34.95.43)	0	2008/3/11/17:16:54(130.34.95.43)
11	28	32	6936	Matsuzaki	dummy	0	2008/3/11/11:55:49(130.34.95.43)	Ge＠300℃
11	32	37	6937	nakamura	dummy	0	2008/3/11/9:42:0(130.34.95.43)	0
12	18	32	6936	Matsuzaki	dummy	0	2008/3/11/19:23:49(130.34.95.43)	Ge@300℃
13	46	48	6937	Andrew	dummy	0	2008/3/13/22:28:22(130.34.95.43)	Cr/Au @ 170 C
14	0	2	6937	Andrew	dummy	0	2008/3/13/22:28:44(130.34.95.43)	Cr/Au @ 170 C
17	18	26	6936	Matsuzaki	dummy	0	2008/3/16/13:53:20(130.34.95.43)	Ge@300℃
-17	26	34	6937	nakamura	dummy	0	2008/3/17/6:52:24(130.34.95.43)	0	2008/3/17/12:15:37(130.34.95.43)
17	26	27	6937	nakamura	dummy	0	2008/3/17/6:52:24(130.34.95.43)	0
17	29	36	6937	nakamura	dummy	0	2008/3/17/12:16:2(130.34.95.43)	5.Ge@RT
17	40	48	6936	kawai	dummy	0	2008/3/17/14:14:12(172.16.44.137)	target cahnge 1.Au -> 1.PZT
17	36	38	6937	nakamura	dummy	0	2008/3/17/17:36:25(130.34.95.43)	5.Ge@RT
-18	40	48	4830	otani	dummy	0	2008/3/17/17:43:3(130.34.95.30)	target change 1 Cu 3 Ta @230C	2008/3/18/20:40:46(172.16.44.137)
-19	28	34	4830	otani	dummy	0	2008/3/17/17:43:28(130.34.95.30)	Ta/Cu @ 200C	2008/3/19/0:18:22(172.16.44.137)
18	26	40	6936	kawai	dummy	0	2008/3/17/21:15:26(172.16.44.137)	PZT@350C
18	0	20	6936	kawai	dummy	0	2008/3/17/21:16:9(172.16.44.137)	chamber bakeing
18	40	44	4830	otani	dummy	0	2008/3/17/17:43:3(130.34.95.30)	target change 1 Cu 3 Ta @230C
18	44	48	4830	otani	dummy	0	2008/3/18/20:41:35(172.16.44.137)	1Cu 3 Ta 5 PZT @ 350C
19	35	39	4830	otani	dummy	0	2008/3/19/0:19:42(172.16.44.137)	Ta @ 200 C
19	39	41	4830	otani	dummy	0	2008/3/19/19:31:49(172.16.44.137)	0
21	28	34	6936	Matsuzaki	dummy	0	2008/3/21/8:21:12(130.34.95.43)	Ge@300℃
22	33	48	6936	Matsuzaki	dummy	1	2008/3/22/15:50:2(130.34.95.43)	Ta--->Ge
24	20	30	6936	Matsuzaki	dummy	0	2008/3/22/15:50:54(130.34.95.43)	Ge@300℃
24	30	48	6937	H.Matsuo	dummy	1	2008/3/22/20:4:9(130.34.95.43)	No1 Target  Repair
-25	16	32	6937	H.Matsuo	dummy	1	2008/3/24/18:19:24(172.16.44.137)	No1 Target Repair	2008/3/25/12:28:48(172.16.44.137)
25	16	27	6937	H.Matsuo	dummy	1	2008/3/24/18:19:24(172.16.44.137)	No1 Target Repair
25	36	46	6936	kawai	dummy	0	2008/3/25/17:59:9(130.34.95.43)	PZT@350˚C
27	39	48	6937	Andrew	dummy	0	2008/3/27/18:11:2(130.34.95.43)	Target Change Cr/Au
28	22	24	6937	Andrew	dummy	0	2008/3/27/18:11:38(130.34.95.43)	Cr/Au at 170C
28	33	35	6937	Andrew	dummy	0	2008/3/28/15:44:14(130.34.95.43)	Cr/Au at 170
28	46	48	6937	Andrew	dummy	0	2008/3/28/15:44:34(130.34.95.43)	Cr/Au at 170
31	22	24	6937	Andrew Randles	dummy	0	2008/3/29/1:49:53(130.34.95.43)	Cr/Au @ 170 C
31	32	34	6937	Andrew	dummy	0	2008/3/31/9:20:6(172.16.44.140)	Cr/Au @ 170 C
-31	30	32	6937	H.Matsuo	dummy	0	2008/3/31/14:11:58(172.16.44.137)	Au@RT	2008/3/31/14:12:5(172.16.44.137)
31	30	31	6937	H.Matsuo	dummy	0	2008/3/31/14:11:58(172.16.44.137)	Au@RT