-1 24 36 6909 yamada dummy 0 2008/1/29/18:50:8(172.16.44.136) Al/W 2008/1/29/18:52:8(172.16.44.136) -2 24 36 6909 yamada dummy 0 2008/1/29/18:52:38(172.16.44.136) Al/W 2008/1/30/11:16:36(172.16.44.137) -5 24 36 6909 yamada dummy 0 2008/1/29/18:53:44(172.16.44.136) Al/W 2008/1/30/11:16:40(172.16.44.137) 1 0 22 6937 cho,wonje dummy 1 2008/1/30/18:0:14(130.34.95.43) 0 1 22 26 6937 cho,wonje dummy 0 2008/1/30/18:1:16(130.34.95.43) Cr/Au@300 -1 26 30 6937 Randles dummy 0 2008/1/30/18:52:6(130.34.95.43) Cr/Au at 170C 2008/2/1/11:53:20(130.34.95.43) -4 18 26 3586 kishi dummy 0 2008/2/1/11:7:41(130.34.95.17) Cr/Au@RT 2008/2/3/22:58:59(130.34.95.17) -5 18 26 3586 kishi dummy 0 2008/2/1/11:8:9(130.34.95.17) Cr/Au@RT 2008/2/4/19:24:24(130.34.95.17) 3 30 34 3586 kishi dummy 0 2008/2/1/11:8:49(130.34.95.17) Cr/Au@RT 1 26 28 6937 Cho, Wonje dummy 0 2008/2/1/11:53:53(130.34.95.43) Cr/Au@300 -4 4 9 3586 kishi dummy 0 2008/2/3/22:58:51(130.34.95.17) Cr/Au@RT 2008/2/4/1:38:39(130.34.95.17) 4 19 24 3586 kishi dummy 0 2008/2/3/22:59:24(130.34.95.17) Cr/Au@RT 4 4 6 3586 kishi dummy 0 2008/2/3/22:58:51(130.34.95.17) Cr/Au@RT 4 6 9 3586 kishi dummy 0 2008/2/4/1:39:57(130.34.95.17) Cr/Au@RT 5 20 25 3586 kishi dummy 0 2008/2/4/19:25:0(130.34.95.17) Cr/Au@RT 4 40 41 6937 H.Matsuo dummy 0 2008/2/4/19:59:4(172.16.44.137) Cr@RT -7 40 48 4771 Ishikawa dummy 1 2008/2/7/12:50:51(130.34.89.180) Target change 1->Pt 3->Ti @350℃ 2008/2/7/14:14:31(130.34.95.43) -8 16 24 4771 Ishikawa dummy 0 2008/2/7/12:51:19(130.34.89.180) PZT/Pt/Ti@350℃ 2008/2/7/14:14:42(130.34.95.43) -8 0 16 4771 Ishikawa dummy 1 2008/2/7/12:51:36(130.34.89.180) Target change 1->Pt 3->Ti @350℃ 2008/2/7/14:14:56(130.34.95.43) -8 26 38 6937 Kurahashi dummy 0 2008/2/7/23:29:9(130.34.95.43) target change 3.Cr->Ti 2008/2/7/23:29:16(130.34.95.43) 8 26 38 6937 Kurahashi dummy 1 2008/2/7/23:29:48(130.34.95.43) target change 3.Cr->Ti -11 32 38 6925 shimizu dummy 1 2008/2/11/15:8:37(130.34.95.35) Target change 5.PZT→Pt 2008/2/11/15:14:9(130.34.95.35) 11 32 33 6925 shimizu dummy 1 2008/2/11/15:8:37(130.34.95.35) Target change 5.PZT→Pt 11 33 38 6925 shimizu dummy 1 2008/2/11/15:15:7(130.34.95.35) Target change 1.Au→ Pt -12 18 22 6925 shimizu dummy 0 2008/2/11/17:41:49(172.16.44.137) 0 2008/2/11/17:42:49(172.16.44.137) 12 18 22 6925 shimizu dummy 0 2008/2/11/17:43:27(172.16.44.137) Ti/Pt@R.T 12 22 26 6925 shimizu dummy 0 2008/2/12/9:33:55(130.34.95.35) 0 12 32 36 6937 Kurahashi dummy 0 2008/2/12/12:23:5(130.34.95.43) TiN@70℃ 13 20 24 6937 Kurahashi dummy 0 2008/2/12/18:45:5(130.34.95.43) TiN@70℃ 14 22 30 6937 H.Matsuo dummy 0 2008/2/14/10:16:27(130.34.95.43) Ti/Pt@320℃ 7 21 25 6937 Andrew dummy 0 2008/2/14/10:26:9(130.34.95.43) Cr/Au at 170C 14 40 48 6937 Andrew dummy 0 2008/2/14/11:21:17(130.34.95.43) Target Change Cr/Au 15 22 26 6937 Andrew dummy 0 2008/2/14/11:22:6(130.34.95.43) Cr/Au at 170C 14 36 40 6937 Kurahashi dummy 0 2008/2/14/11:40:0(130.34.95.43) TiN@70℃ -18 42 46 6898 settsu dummy 0 2008/2/15/12:55:56(130.34.95.28) Target change 5. PZT →SiO2 2008/2/15/22:0:28(130.34.95.28) 18 36 42 6937 k.hirano dummy 1 2008/2/18/13:18:26(130.34.95.43) target change 3.Ti->Mo @350℃ -19 16 36 6937 k.hirano dummy 0 2008/2/18/13:19:6(130.34.95.43) 3.Mo @300℃ 2008/2/18/13:19:14(130.34.95.43) 19 20 36 6937 k.hirano dummy 0 2008/2/18/13:20:9(130.34.95.43) 3.Mo @300℃ -20 36 42 6937 nakamura dummy 1 2008/2/18/16:24:7(130.34.95.43) 3.Mo→3.Ge 2008/2/19/15:53:11(130.34.95.43) -21 18 32 6937 nakamura dummy 0 2008/2/18/16:24:18(130.34.95.43) 0 2008/2/18/16:24:33(130.34.95.43) -21 20 36 6937 nakamura dummy 0 2008/2/18/16:24:49(130.34.95.43) 3.Ge at RT 2008/2/19/15:52:40(130.34.95.43) 21 36 42 6937 nakamura dummy 1 2008/2/19/15:53:39(130.34.95.43) 3.Mo→3.Ge 22 20 28 6937 nakamura dummy 0 2008/2/19/15:53:59(130.34.95.43) 3.Ge @RT 20 26 32 4771 Ishikawa dummy 0 2008/2/19/19:13:18(130.34.89.180) PZT@350℃ 25 36 48 6937 M. Toda dummy 1 2008/2/20/14:43:35(130.34.95.43) 3: Mo --> Cr -26 22 26 6937 M. Toda dummy 0 2008/2/20/14:45:46(130.34.95.43) Cr/Au at 300C 2008/2/25/3:36:37(130.34.94.146) 22 36 46 6898 yasuda dummy 1 2008/2/20/14:53:25(130.34.95.28) 3.Ge→Ti, 5.PZT→Ag 23 22 28 6898 yasuda dummy 0 2008/2/20/14:54:53(130.34.95.28) 3.Ti / 5.Ag@R.T. 24 26 42 6898 settsu dummy 0 2008/2/20/23:3:24(130.34.95.28) Baking@350℃ -26 36 44 6925 yoshinaga dummy 1 2008/2/21/17:2:8(130.34.95.35) 5:Ag→W 2008/2/22/15:50:47(130.34.95.35) -27 28 34 6925 yoshinaga dummy 0 2008/2/21/17:3:11(130.34.95.35) 5:W@300℃ 2008/2/22/15:50:55(130.34.95.35) 23 28 34 6898 sun dummy 0 2008/2/22/21:24:1(130.34.95.28) TiN@70degree -25 28 33 6898 sun dummy 0 2008/2/23/16:26:44(172.16.44.137) TiN@70degree 2008/2/23/16:27:12(172.16.44.137) -25 25 30 6898 sun dummy 0 2008/2/23/16:27:37(172.16.44.137) TiN@70degree 2008/2/23/16:30:14(172.16.44.137) 23 34 36 6898 sun dummy 0 2008/2/23/16:30:45(172.16.44.137) TiN@70℃ 26 22 28 6937 M.Toda dummy 0 2008/2/25/3:37:16(130.34.94.146) Cr/Au @300C -26 36 46 6898 yasuda dummy 1 2008/2/25/15:3:46(130.34.95.28) Target change 5.Ag→SiO2 2008/2/25/16:57:53(130.34.95.28) -27 20 30 6898 yasuda dummy 0 2008/2/25/15:5:10(130.34.95.28) 5.SiO2@R.T. 2008/2/25/16:58:2(130.34.95.28) 28 40 48 6898 yasuda dummy 1 2008/2/28/15:20:17(130.34.95.28) Target change 5.Ag→SiO2@R.T. 29 22 30 6898 yasuda dummy 0 2008/2/28/15:22:19(130.34.95.28) 5.SiO2@R.T.