-1	26	31	6937	Yoshida	dummy	0	2008/9/30/15:39:28(172.16.44.135)	Ti, Pt, Au	2008/9/30/18:5:2(172.16.44.135)
-5	26	40	6898	yasuda	dummy	0	2008/10/2/20:51:36(130.34.95.28)	baking@340deg	2008/10/3/9:54:58(130.34.95.28)
-6	20	24	6925	watanabe	dummy	0	2008/10/3/17:43:19(130.34.95.35)	0	2008/10/3/17:43:28(130.34.95.35)
6	20	25	6925	watanabe	dummy	0	2008/10/3/17:44:3(130.34.95.35)	Au at R.T.
-8	20	24	6898	sun	dummy	0	2008/10/7/11:17:30(130.34.95.28)	TiN@70C	2008/10/7/17:1:41(130.34.95.28)
-8	28	36	6898	sun	dummy	0	2008/10/8/11:18:52(130.34.95.28)	TiN@70C	2008/10/8/13:42:21(130.34.95.28)
8	28	30	6898	sun	dummy	0	2008/10/8/11:18:52(130.34.95.28)	TiN@70C
8	30	34	6898	sun	dummy	0	2008/10/8/13:46:43(130.34.95.28)	TiN@70C
-10	40	48	4771	Ishikawa	dummy	1	2008/10/10/6:13:36(130.34.95.21)	Target change 1. Au -> Pt	2008/10/10/6:13:49(130.34.95.21)
10	40	48	4771	Ishikawa	dummy	1	2008/10/10/6:14:27(130.34.95.21)	Target change 1. Au -> Pt @350ºC
11	18	24	4771	Ishikawa	dummy	0	2008/10/10/6:15:4(130.34.95.21)	Ti/Pt@350ºC
-11	0	18	4771	Ishikawa	dummy	0	2008/10/10/6:15:45(130.34.95.21)	Target change 1.Au -> Pt@350ºC	2008/10/10/6:25:47(130.34.95.21)
11	0	18	4771	Ishikawa	dummy	1	2008/10/10/6:26:17(130.34.95.21)	Target change 1.Au -> Pt@350ºC
-18	40	48	6937	Yoshida	dummy	1	2008/10/16/14:18:48(130.34.94.141)	Target change 3. Mo -> Au	2008/10/16/14:20:30(130.34.94.141)
-19	0	20	6937	Yoshida	dummy	1	2008/10/16/14:19:15(130.34.94.141)	Target change 3. Mo -> Au	2008/10/16/14:20:34(130.34.94.141)
-19	20	26	6937	Yoshida	dummy	0	2008/10/16/14:19:37(130.34.94.141)	Ti, Pt, Au	2008/10/16/14:20:32(130.34.94.141)
-18	42	48	6937	Yoshida	dummy	1	2008/10/16/17:44:53(172.16.44.140)	Target change 3. Mo -> Au	2008/10/18/8:51:11(172.16.44.140)
-19	0	20	6937	Yoshida	dummy	1	2008/10/16/17:45:20(172.16.44.140)	Target change 3. Mo -> Au	2008/10/18/8:51:16(172.16.44.140)
-19	20	26	6937	Yoshida	dummy	0	2008/10/16/17:45:41(172.16.44.140)	Ti, Pt, Au	2008/10/18/8:51:14(172.16.44.140)
-16	42	48	6898	yasuda	dummy	0	2008/10/16/20:41:52(130.34.95.28)	Target Change 3.Mo-->Ta@170deg	2008/10/16/20:42:31(130.34.95.28)
16	42	44	6898	yasuda	dummy	0	2008/10/16/20:41:52(130.34.95.28)	Target Change 3.Mo-->Ta@170deg
16	44	48	6898	yasuda	dummy	1	2008/10/16/20:43:14(130.34.95.28)	Target Change 3.Mo-->Ta@170deg
17	21	24	6898	yasuda	dummy	0	2008/10/16/20:44:23(130.34.95.28)	3. Ta@R.T.
21	21	24	6937	kumagae	dummy	0	2008/10/21/9:15:12(130.34.95.43)	Ta/Pt
22	20	25	6937	H.Matsuo	dummy	0	2008/10/21/18:3:42(130.34.95.43)	Ti/Pt @320℃
23	38	44	6898	yasuda	dummy	1	2008/10/21/19:53:46(130.34.95.28)	Target change 5. Ti -->Ag@170deg
23	27	31	6898	yasuda	dummy	0	2008/10/21/20:36:18(130.34.95.28)	5. Ti@R.T.
22	34	38	6937	H KIM	dummy	0	2008/10/22/9:36:29(130.34.95.43)	Pt/Ti@320℃
22	38	44	6925	yoshinaga	dummy	1	2008/10/22/11:41:18(130.34.95.35)	Target change 3Ta→W
23	12	27	6925	yoshinaga	dummy	0	2008/10/22/12:45:43(130.34.95.35)	3:W@R.T
-23	31	38	6925	yoshinaga	dummy	0	2008/10/22/12:46:5(130.34.95.35)	3:W@R.T	2008/10/23/8:24:53(172.16.44.146)
24	22	28	6898	yasuda	dummy	0	2008/10/22/14:11:53(130.34.95.28)	5.Ag@R.T.
-24	38	44	6898	yasuda	dummy	1	2008/10/22/14:13:16(130.34.95.28)	Target change 5.Ag-->SiO2@170deg	2008/10/24/14:45:52(130.34.95.28)
-25	24	30	6898	yasuda	dummy	0	2008/10/22/14:14:5(130.34.95.28)	5.SiO2@R.T.	2008/10/24/14:46:2(130.34.95.28)
-27	40	48	4771	Murakawa	dummy	1	2008/10/22/14:40:3(130.34.95.21)	Target change 5. SiO2 -> Ti	2008/10/22/14:41:29(130.34.95.21)
-28	18	24	4771	Murakawa	dummy	0	2008/10/22/14:41:9(130.34.95.21)	Pt/Ti	2008/10/22/14:42:9(130.34.95.21)
-27	40	48	4771	Murakawa	dummy	1	2008/10/22/14:42:4(130.34.95.21)	Target change 5. SiO2 -> Ti @350ºC	2008/10/23/17:26:15(130.34.95.21)
-28	18	24	4771	Murakawa	dummy	0	2008/10/22/14:42:47(130.34.95.21)	Ti/Pt@350ºC	2008/10/28/6:51:29(130.34.95.21)
-24	16	22	6925	yoshinaga	dummy	0	2008/10/22/16:25:40(130.34.95.35)	0	2008/10/23/6:38:49(172.16.44.146)
-24	28	38	6925	yoshinaga	dummy	0	2008/10/23/8:25:9(172.16.44.146)	0	2008/10/24/12:40:54(130.34.95.35)
-28	0	2	6937	Yoshida	dummy	1	2008/10/23/17:26:44(172.16.44.140)	Target change 3. W -> Au	2008/10/23/17:27:29(172.16.44.140)
27	40	48	4771	Murakawa	dummy	1	2008/10/23/17:26:59(130.34.95.21)	Target change 3. W -> Au 5. SiO2 -> Ti
28	26	32	6937	Yoshida	dummy	0	2008/10/23/17:28:10(172.16.44.140)	Ti, Pt, Au
24	28	36	6925	yoshinaga	dummy	0	2008/10/24/12:41:17(130.34.95.35)	3:W@R.T
-28	36	39	6898	yasuda	dummy	0	2008/10/24/18:9:43(130.34.95.28)	5.Ti@R.T.	2008/10/24/18:9:55(130.34.95.28)
-29	42	44	6898	yasuda	dummy	0	2008/10/24/18:10:21(130.34.95.28)	5.Ti@R.T.	2008/10/24/18:11:17(130.34.95.28)
-29	44	48	6898	yasuda	dummy	1	2008/10/24/18:11:3(130.34.95.28)	Target change 5.Ti -> Ag@170deg	2008/10/24/18:11:27(130.34.95.28)
-28	40	42	6898	yasuda	dummy	0	2008/10/24/18:11:57(130.34.95.28)	5.Ti@R.T.	2008/10/24/18:12:13(130.34.95.28)
-28	42	44	6898	yasuda	dummy	0	2008/10/24/18:12:42(130.34.95.28)	5.Ti@R.T.	2008/10/28/17:28:28(130.34.95.28)
-28	44	48	6898	yasuda	dummy	1	2008/10/24/18:13:26(130.34.95.28)	Target change 5. Ti -> Ag@170deg	2008/10/28/17:28:17(130.34.95.28)
-29	21	27	6898	yasuda	dummy	0	2008/10/24/18:14:4(130.34.95.28)	5. Ag@R.T.	2008/10/28/17:28:38(130.34.95.28)
-29	44	48	6898	yasuda	dummy	1	2008/10/24/18:15:5(130.34.95.28)	Target change 5. Ag -> SiO2@170deg	2008/10/28/17:28:50(130.34.95.28)
-30	18	21	6898	yasuda	dummy	0	2008/10/24/18:16:38(130.34.95.28)	5. SiO2@R.T.	2008/10/24/18:17:19(130.34.95.28)
-30	18	28	6898	yasuda	dummy	0	2008/10/24/18:17:51(130.34.95.28)	5. SiO2@R.T.	2008/10/28/17:28:59(130.34.95.28)
30	40	43	6898	yasuda	dummy	0	2008/10/30/18:13:52(130.34.95.28)	5.Ti@R.T.
31	21	23	6937	H.Matsuo	dummy	1	2008/10/31/10:55:52(172.16.44.146)	B/A動作確認
31	28	32	6898	yasuda	dummy	0	2008/10/31/12:50:59(130.34.95.28)	5.Ti@R.T.
31	34	48	6937	H.Matsuo	dummy	1	2008/10/31/20:30:3(130.34.95.43)	RF Power ON　不具合復旧＆真空引き