-1 38 44 4830 M. Otani dummy 0 2007/8/31/22:50:58(130.34.95.30) Cr/ Cu at 200 2007/8/31/23:18:21(130.34.95.30) 1 37 41 6937 H.Matsuo dummy 1 2007/9/1/17:31:20(130.34.95.43) Target Change 1,Cu->Pt 3 20 22 6937 H.Matsuo dummy 0 2007/9/3/9:35:4(130.34.95.43) Pt@R.T -4 16 18 3586 Kishi dummy 0 2007/9/3/9:49:41(130.34.95.17) Cr@R.T 2007/9/3/9:52:38(130.34.95.17) -4 16 19 3586 kishi dummy 0 2007/9/3/9:53:24(130.34.95.17) Cr@R.T 2007/9/3/15:7:30(130.34.95.17) 3 27 30 3586 morimoto dummy 0 2007/9/3/12:48:50(130.34.95.43) Cr@R.T 3 31 33 3586 morimoto dummy 0 2007/9/3/15:7:23(130.34.95.17) Cr@R.T -4 18 20 3586 kishi dummy 0 2007/9/3/16:15:14(130.34.95.17) Cr@R.T 2007/9/3/18:53:28(130.34.95.17) -4 38 40 6937 H.Matsuo dummy 0 2007/9/4/12:53:43(130.34.95.43) Pt@R.T 2007/9/4/15:32:25(130.34.95.43) 4 32 34 6937 H.Matsuo dummy 0 2007/9/4/15:32:20(130.34.95.43) Pt@R.T 4 40 48 6937 Yoshida dummy 1 2007/9/4/16:37:36(130.34.95.43) Target change No.3 Ti, No.5 SiO2 5 22 26 6937 Yoshida dummy 0 2007/9/4/16:40:40(130.34.95.43) Ti/SiO2 4 34 36 6937 Andrew dummy 0 2007/9/4/16:48:35(130.34.95.43) Cr at 170 4 37 40 6937 Yoshida dummy 1 2007/9/4/18:0:54(130.34.95.43) Target change No.3 Ti, No.5 SiO2 -5 26 30 6937 Kurahashi dummy 0 2007/9/4/20:41:6(130.34.95.43) TiN@70℃ 2007/9/5/11:51:15(130.34.95.43) 5 28 32 6937 Kurahashi dummy 0 2007/9/5/11:51:28(130.34.95.43) TiN@70℃ 5 36 38 6937 H.Matsuo dummy 0 2007/9/5/17:49:2(130.34.95.43) Pt@R.T -7 26 31 6898 kato dummy 0 2007/9/6/11:28:29(130.34.95.28) TiN@70℃ 2007/9/6/11:29:52(130.34.95.28) -7 26 32 6898 kato dummy 0 2007/9/6/11:30:20(130.34.95.28) TiN@70℃ 2007/9/6/11:30:31(130.34.95.28) 6 26 28 6898 kato dummy 0 2007/9/6/11:41:43(130.34.95.28) TiN@70℃ 6 28 30 6898 kato dummy 0 2007/9/6/13:0:10(130.34.95.28) TiN@70℃ 6 32 34 6937 H.Matsuo dummy 0 2007/9/6/13:17:7(130.34.95.43) Pt@R.T 7 28 32 6937 関 dummy 0 2007/9/6/14:41:1(130.34.95.43) Pt/TiN 7 32 35 6937 関 dummy 0 2007/9/7/14:7:1(130.34.95.43) Pt/TiN 7 35 37 6937 関 dummy 0 2007/9/7/16:26:47(130.34.95.43) Pt/TiN 7 38 40 6937 H.Matsuo dummy 0 2007/9/7/16:47:48(130.34.95.43) Pt@R.T 9 22 26 6898 kato dummy 0 2007/9/8/20:59:56(130.34.95.28) TiN@70℃ 10 20 24 6898 kato dummy 0 2007/9/9/14:59:9(130.34.95.28) TiN@70℃ 9 32 35 6937 関 dummy 0 2007/9/9/15:31:53(130.34.95.43) Pt/TiN 9 35 37 6937 関 dummy 0 2007/9/9/17:20:21(130.34.95.43) 0 -10 28 32 6937 Kurahashi dummy 0 2007/9/9/22:18:22(130.34.95.43) TiN@70℃ 2007/9/9/22:19:52(130.34.95.43) 10 32 36 6937 Kurahashi dummy 0 2007/9/9/22:19:49(130.34.95.43) TiN@70℃ 10 24 26 6937 H.Matsuo dummy 0 2007/9/10/9:45:7(130.34.95.43) Pt@R.T 10 36 44 6937 k.hirano dummy 0 2007/9/10/12:47:50(130.34.95.43) target change 3.Ti ->Ge 300℃ 11 20 24 6937 k.hirano dummy 0 2007/9/10/12:50:35(130.34.95.43) Ge -11 36 48 3586 morimoto dummy 1 2007/9/10/18:28:4(130.34.95.17) target chenge 3.Ge>Cr 2007/9/10/22:24:22(130.34.95.43) -12 20 24 3586 morimoto dummy 0 2007/9/10/18:28:57(130.34.95.17) Cr@R.T. 2007/9/12/9:47:10(172.16.44.137) 11 36 48 3586 morimoto dummy 1 2007/9/10/22:25:25(130.34.95.43) target change1.Pt>Au,3.Ge>Cr 12 24 30 3586 kato dummy 0 2007/9/10/22:25:58(130.34.95.43) Cr/Au@R.T. -13 20 25 3586 morimoto dummy 0 2007/9/11/9:10:26(130.34.95.17) Cr/Au@R.T 2007/9/11/13:49:17(130.34.95.43) 13 40 48 6898 settsu dummy 1 2007/9/11/11:21:11(130.34.95.28) Target change 1.Au→Cu 3. Cr→Ta -12 30 36 6937 k.hirano dummy 0 2007/9/11/11:21:44(130.34.95.43) Ge 2007/9/11/11:21:55(130.34.95.43) 14 22 26 6898 settsu dummy 0 2007/9/11/11:22:24(130.34.95.28) Cu/Ta @R.T. 11 24 32 6937 k.hirano dummy 0 2007/9/11/11:22:47(130.34.95.43) 3.Ge RT 11 34 36 6937 H.Matsuo dummy 0 2007/9/11/13:27:28(130.34.95.43) Pt@R.T -13 20 26 3586 morimoto dummy 0 2007/9/11/13:50:3(130.34.95.43) Cr/Au@R.T 2007/9/11/13:55:6(130.34.95.43) -13 32 36 3586 morimoto dummy 0 2007/9/11/13:54:19(130.34.95.43) Cr/Au@R.T 2007/9/12/14:46:55(130.34.95.17) -12 30 36 3586 morimoto dummy 0 2007/9/11/13:56:13(130.34.95.43) Cr/Au@R.T 2007/9/12/14:44:37(130.34.95.17) 12 20 22 3586 morimoto dummy 0 2007/9/10/18:28:57(130.34.95.17) Cr@R.T. 12 22 24 3586 morimoto dummy 0 2007/9/12/9:48:39(172.16.44.137) Cr/Au@R.T 12 18 20 3586 morimoto dummy 0 2007/9/12/9:49:31(172.16.44.137) Cr@R.T -12 37 39 6937 H.Matsuo dummy 0 2007/9/12/14:35:25(130.34.95.43) Au@RT 2007/9/12/17:44:27(130.34.95.43) 12 30 32 3586 morimoto dummy 0 2007/9/11/13:56:13(130.34.95.43) Cr/Au@R.T -12 32 37 3586 morimoto dummy 0 2007/9/12/14:45:34(130.34.95.17) Cr/Au@R.T 2007/9/12/15:58:49(130.34.95.43) -13 26 34 3586 morimoto dummy 0 2007/9/12/14:47:51(130.34.95.17) Cr/Au@R.T,Cr@R.T 2007/9/12/21:48:38(172.16.44.137) 12 32 34 3586 morimoto dummy 0 2007/9/12/14:45:34(130.34.95.17) Cr/Au@R.T 12 40 44 3586 morimoto dummy 0 2007/9/12/16:0:24(130.34.95.43) Cr@R.T 12 37 38 6937 H.Matsuo dummy 0 2007/9/12/14:35:25(130.34.95.43) Au@RT 12 44 46 3586 morimoto dummy 0 2007/9/12/18:58:39(130.34.95.43) Cr/Au@R.T -12 46 48 6898 sawajiri dummy 0 2007/9/12/21:52:10(172.16.44.137) Target change 1.Au→Ti 2007/9/12/21:52:20(172.16.44.137) 12 46 48 6898 sawajiri dummy 1 2007/9/12/21:52:53(172.16.44.137) Target change 1.Au→Ti 13 0 14 6898 sawajiri dummy 1 2007/9/12/21:54:46(172.16.44.137) Target change 1.Au→Ti 13 22 30 6898 sawajiri dummy 0 2007/9/12/21:55:55(172.16.44.137) Ti 14 34 40 6937 k.hirano dummy 1 2007/9/13/10:58:56(130.34.95.43) target change 3.Ta->Mo @350℃ 15 34 40 6937 k.hirano dummy 0 2007/9/13/11:8:13(130.34.95.43) 3.Mo @300℃ 13 30 36 6898 sawajiri dummy 0 2007/9/13/14:48:23(172.16.44.137) Ti 13 38 40 6898 settsu dummy 1 2007/9/13/18:1:28(130.34.95.28) Target change 1.Au→Cu 3. Cr→Ta -15 40 44 6937 Yoshida dummy 0 2007/9/14/4:36:53(130.34.95.43) SiO2 2007/9/14/7:37:8(130.34.95.43) -15 40 44 6937 Yoshida dummy 0 2007/9/14/7:48:7(130.34.95.43) Ti/SiO2 2007/9/14/7:50:42(130.34.95.43) 15 40 44 6937 Yoshida dummy 0 2007/9/14/7:50:57(130.34.95.43) SiO2 -18 0 12 4771 shibata dummy 1 2007/9/18/0:22:39(130.34.89.180) target change 1.Pt 3.Ti 5.PZT 350℃ベーク 2007/9/18/1:8:48(130.34.89.180) 18 0 5 4771 shibata dummy 1 2007/9/18/0:22:39(130.34.89.180) target change 1.Pt 3.Ti 5.PZT 350℃ベーク 18 28 30 6937 H.Matsuo dummy 0 2007/9/18/13:44:52(130.34.95.43) Mo@RT -18 38 42 6937 H.Matsuo dummy 1 2007/9/18/16:49:37(130.34.95.43) Target Change 1,Ti->Pt 3,Mo->Ti & 320℃Bake 2007/9/18/18:35:19(172.16.44.137) -19 21 26 6937 H.Matsuo dummy 0 2007/9/18/16:50:25(130.34.95.43) Ti/Pt @320℃ 2007/9/19/10:9:33(172.16.44.137) 18 38 40 6937 H.Matsuo dummy 1 2007/9/18/16:49:37(130.34.95.43) Target Change 1,Ti->Pt 3,Mo->Ti & 320℃Bake -18 40 43 6937 H.Matsuo dummy 1 2007/9/18/18:36:40(172.16.44.137) Target change 3.Mo→Pt 2007/9/18/18:37:0(172.16.44.137) 18 40 43 6937 H.Matsuo dummy 1 2007/9/18/18:38:20(172.16.44.137) Target change 3.Mo→Pt 320℃ベーク -19 34 36 6937 Kurahashi dummy 0 2007/9/18/19:45:39(130.34.95.43) TiN@70℃ 2007/9/19/13:16:56(130.34.95.43) 19 21 23 6937 H.Matsuo dummy 0 2007/9/18/16:50:25(130.34.95.43) Ti/Pt @320℃ -19 23 34 6937 H.Matsuo dummy 1 2007/9/19/10:11:28(172.16.44.137) No1 反射大　調査 2007/9/19/13:46:48(130.34.95.43) 19 23 30 6937 H.Matsuo dummy 1 2007/9/19/10:11:28(172.16.44.137) No1 反射大　調査 19 30 44 6937 H.Matsuo dummy 1 2007/9/19/17:32:7(172.16.44.137) 修理＆動作確認 20 18 37 6937 H.Matsuo dummy 1 2007/9/20/9:28:34(172.16.44.137) 動作確認 21 0 12 4771 shibata dummy 1 2007/9/20/23:28:22(130.34.89.180) target change 5.PZT 350℃ベーク -21 18 36 4771 shibata dummy 0 2007/9/20/23:30:6(130.34.89.180) PZT/Pt/Ti@350℃ 2007/9/21/5:23:3(130.34.89.180) 21 18 22 4771 shibata dummy 0 2007/9/21/5:23:28(130.34.89.180) PZT/Pt/Ti@350℃ -25 34 46 3586 morimoto dummy 1 2007/9/21/10:51:41(130.34.95.17) target change 1.Pt>Au, 3.Ti>Cr 2007/9/21/12:44:34(130.34.95.17) -26 20 28 3586 morimoto dummy 0 2007/9/21/10:53:25(130.34.95.17) Cr@R.T,Cr/Au@R.T 2007/9/21/12:44:38(130.34.95.17) -26 41 45 3586 morimoto dummy 0 2007/9/21/10:56:57(130.34.95.17) Cr@R.T 2007/9/21/10:57:14(130.34.95.17) -26 40 46 3586 morimoto dummy 0 2007/9/21/10:57:43(130.34.95.17) Cr@R.T 2007/9/21/12:44:42(130.34.95.17) -24 28 40 3586 morimoto dummy 1 2007/9/21/12:45:42(130.34.95.17) target change 1.Pt>Au, 3.Ti>Cr 2007/9/24/11:21:52(130.34.95.17) 25 20 28 3586 morimoto dummy 0 2007/9/21/12:46:26(130.34.95.17) Cr@R.T,Cr/Au@R.T 25 41 48 3586 morimoto dummy 0 2007/9/21/12:48:48(130.34.95.17) Cr@R.T,Cr/Au@R.T 26 0 6 6898 settsu dummy 1 2007/9/21/14:29:10(130.34.95.28) Target change 1.Au→Cu 3.Cr→Ta 26 26 30 6898 settsu dummy 0 2007/9/21/14:30:3(130.34.95.28) Cu/Ta @R.T. 21 32 33 6937 H.Matsuo dummy 0 2007/9/21/15:12:23(172.16.44.137) Pt@RT 22 0 5 6937 k.hirano dummy 1 2007/9/21/22:11:25(172.16.44.137) Target change 3.Ti→Mo -22 32 36 6937 k.hirano dummy 0 2007/9/21/22:12:10(172.16.44.137) 0 2007/9/21/22:12:29(172.16.44.137) -22 32 36 6937 k.hirano dummy 0 2007/9/21/22:12:47(172.16.44.137) 0 2007/9/21/22:12:53(172.16.44.137) 22 32 36 6937 k.hirano dummy 0 2007/9/21/22:13:35(172.16.44.137) 3.Mo@300℃ 24 23 33 3586 morimoto dummy 1 2007/9/24/11:22:47(130.34.95.17) target change 1.Pt>Au, 3.Mo>Cr -24 41 45 3586 morimoto dummy 0 2007/9/24/11:25:4(130.34.95.17) Cr@R.T 2007/9/24/11:49:59(130.34.95.17) -24 42 46 3586 morimoto dummy 0 2007/9/24/11:52:39(130.34.95.17) Cr@R.T 2007/9/24/14:7:15(172.16.44.137) 24 33 36 3586 morimoto dummy 1 2007/9/24/14:7:8(172.16.44.137) Target change 延長 24 36 46 3586 morimoto dummy 1 2007/9/24/20:51:52(172.16.44.137) Target付近水漏れによるメンテナンスのため延長 -26 32 38 6898 sawajiri dummy 1 2007/9/24/21:59:28(172.16.44.137) Target change 1.Cu→Al 3.Ta→Ti 2007/9/25/8:31:57(130.34.95.43) -27 20 30 6898 sawajiri dummy 0 2007/9/24/22:9:8(172.16.44.137) Ti@R.T/Al@300℃ 2007/9/25/8:32:10(130.34.95.43) 24 46 48 3586 morimoto dummy 1 2007/9/24/22:30:49(172.16.44.137) Target change 延長 -27 32 38 6937 k.hirano dummy 1 2007/9/25/5:45:18(130.34.95.43) target change 3.Ti ->Mo 350℃ 2007/9/25/9:14:12(130.34.95.43) -28 16 22 6937 k.hirano dummy 0 2007/9/25/5:46:37(130.34.95.43) 3.Mo @300℃ 2007/9/25/9:15:0(130.34.95.43) -26 18 21 3586 kishi dummy 0 2007/9/25/8:0:23(130.34.95.43) Au/Cr@R.T 2007/9/25/8:0:59(130.34.95.43) -26 21 24 3586 kishi dummy 0 2007/9/25/8:2:3(130.34.95.43) Au/Cr@R.T 2007/9/25/8:3:42(130.34.95.43) -26 32 38 6937 k.hirano dummy 0 2007/9/25/9:14:4(130.34.95.43) target change 3.Ta->Mo @350℃ 2007/9/25/9:14:28(130.34.95.43) -27 0 6 6937 k.hirano dummy 1 2007/9/25/9:14:55(130.34.95.43) target change 3.Ta->Mo @350℃ 2007/9/26/13:55:24(130.34.95.43) -27 26 30 6937 k.hirano dummy 0 2007/9/25/9:15:30(130.34.95.43) 3.Mo @300℃ 2007/9/26/13:56:14(130.34.95.43) 25 28 30 3586 morimoto dummy 0 2007/9/25/13:0:32(172.16.44.137) 延長 25 30 33 3586 kishi dummy 0 2007/9/25/14:22:23(130.34.95.17) Au/Cr@R.T -27 30 42 6937 Kurahashi dummy 0 2007/9/25/16:31:26(130.34.95.43) target change 3.Mo->Ti 2007/9/25/16:31:29(130.34.95.43) 27 30 42 6937 Kurahashi dummy 1 2007/9/25/16:31:49(130.34.95.43) target change 3.Mo->Ti -27 42 46 6937 Kurahashi dummy 0 2007/9/25/16:32:6(130.34.95.43) TiN@70℃ 2007/9/27/20:47:12(130.34.95.43) 26 30 32 6898 settsu dummy 0 2007/9/26/13:20:47(130.34.95.28) Cu/Ta @R.T. 26 32 36 6937 k.hirano dummy 1 2007/9/26/13:46:18(130.34.95.43) target change 3.Ta->Mo @350℃ 27 18 22 6937 k.hirano dummy 0 2007/9/26/13:56:6(130.34.95.43) 3.Mo @300℃ -28 26 34 4830 M. Otani dummy 0 2007/9/27/0:20:47(130.34.95.30) Cu/Ti @R.T. 2007/9/27/0:23:12(130.34.95.30) -28 38 48 6936 Kasuga dummy 1 2007/9/27/9:19:47(130.34.95.43) 1.Cu->Cr, 3.Ti->Pt, 5.PZT->Au 2007/9/28/14:49:57(130.34.95.43) 28 0 16 6936 Kasuga dummy 1 2007/9/27/9:20:28(130.34.95.43) 一晩真空引き -29 16 20 6936 Kasuga dummy 0 2007/9/27/9:21:22(130.34.95.43) Cr/Pt/Au R.T. スパッタ後にメインチャンバー大気開放 2007/9/28/14:50:5(130.34.95.43) -29 20 28 6936 Kasuga dummy 1 2007/9/27/9:22:23(130.34.95.43) 真空引き 2007/9/28/14:50:16(130.34.95.43) -30 18 22 3586 kishi dummy 0 2007/9/27/10:5:24(130.34.95.17) Au/Cr@R.T 2007/9/28/12:41:48(130.34.95.17) 27 42 44 6937 Kurahashi dummy 0 2007/9/25/16:32:6(130.34.95.43) TiN@70℃ 28 26 30 6937 Kurahashi dummy 0 2007/9/27/20:47:30(130.34.95.43) TiN@70℃ -30 26 30 3586 kishi dummy 0 2007/9/28/12:42:34(130.34.95.17) Au/Cr@R.T 2007/9/29/14:9:4(130.34.95.17) 28 30 34 6937 Kurahashi dummy 0 2007/9/28/14:9:11(130.34.95.43) TiN@70℃ -29 32 40 3586 kato dummy 0 2007/9/28/14:32:23(130.34.95.17) 0 2007/9/28/14:32:35(130.34.95.17) -29 36 43 3586 kato dummy 0 2007/9/28/14:33:12(130.34.95.17) 0 2007/9/28/16:31:4(130.34.95.17) -28 41 48 3586 kato dummy 0 2007/9/28/16:25:17(130.34.95.17) 0 2007/9/28/16:25:26(130.34.95.17) -28 40 48 3586 kato dummy 0 2007/9/28/16:26:24(130.34.95.17) target change 1.Cu>Au, 2.Mo>Cr 2007/9/28/16:27:35(130.34.95.17) -29 0 8 3586 kato dummy 0 2007/9/28/16:27:25(130.34.95.17) target change 1.Cu>Au, 2.Mo>Cr 2007/9/28/16:28:57(130.34.95.17) 28 40 48 3586 kato dummy 1 2007/9/28/16:28:14(130.34.95.17) target change1.Cu>Au 2.Mo>Cr 29 0 8 3586 kato dummy 1 2007/9/28/16:30:4(130.34.95.17) target change 1.Cu>Au 2.Mo>Cr 29 30 36 3586 kato dummy 0 2007/9/28/16:31:33(130.34.95.17) Cr/Au@R.T. -30 27 30 3586 kishi dummy 0 2007/9/29/14:12:52(130.34.95.17) Au/Cr@R.T 2007/9/30/13:16:42(130.34.95.43) -30 38 44 3586 morimoto dummy 0 2007/9/30/13:6:28(130.34.95.17) 0 2007/9/30/13:6:51(130.34.95.17) 30 27 29 3586 kishi dummy 0 2007/9/29/14:12:52(130.34.95.17) Au/Cr@R.T 30 29 32 3586 kishi dummy 0 2007/9/30/13:17:21(130.34.95.43) Au/Cr@R.T