-1 40 44 6898 imaizumi dummy 0 2007/7/25/18:9:7(130.34.95.28) W sputter@R.T 2007/7/27/22:39:38(130.34.95.28) -1 28 32 6898 imaizumi dummy 0 2007/7/27/22:41:35(130.34.95.28) W sputter@R.T 2007/7/31/20:0:57(130.34.95.28) -1 34 42 6937 k.hirano dummy 0 2007/7/31/11:2:46(130.34.95.43) target change 3.W->Mo @350℃ 2007/7/31/11:3:23(130.34.95.43) 1 34 42 6937 k.hirano dummy 1 2007/7/31/11:3:45(130.34.95.43) target change 3.W->Mo @350℃ 2 16 24 6937 k.hirano dummy 0 2007/7/31/11:4:39(130.34.95.43) Mo@300℃ -1 0 20 4771 shibata dummy 1 2007/7/31/17:8:48(130.34.89.180) target change 3.Ti -> W 170℃ベーク 2007/7/31/20:16:53(130.34.89.180) 1 0 4 4771 shibata dummy 0 2007/7/31/20:23:11(130.34.89.180) PZT/Pt/Ti@350℃ 1 4 8 4771 shibata dummy 0 2007/7/31/23:38:22(130.34.89.180) PZT/Pt/Ti@350℃ 1 10 22 4771 shibata dummy 0 2007/8/1/4:58:19(172.16.44.138) PZT@350℃ -2 24 28 4771 Miyashita dummy 0 2007/8/1/11:38:8(130.34.89.180) Pt 2007/8/1/11:38:15(130.34.89.180) 1 24 28 4771 Miyashita dummy 0 2007/8/1/11:39:41(130.34.89.180) Pt 2 32 48 6937 Andrew dummy 0 2007/8/1/23:36:16(130.34.95.43) Cleaning Shutdown -2 24 32 6937 k.hirano dummy 0 2007/8/2/11:58:22(130.34.95.43) 0 2007/8/2/11:58:30(130.34.95.43) 2 24 26 6937 k.hirano dummy 0 2007/8/2/11:58:22(130.34.95.43) 0 -2 26 32 6937 k.hirano dummy 0 2007/8/2/11:59:11(130.34.95.43) Mo@300℃ 2007/8/2/13:48:25(130.34.95.43) 2 26 30 6937 k.hirano dummy 0 2007/8/2/11:59:11(130.34.95.43) Mo@300℃ 7 42 48 4771 shibata dummy 0 2007/8/7/20:57:3(130.34.89.180) target change 3.Mo -> Ti 350℃ベーク -8 12 14 4771 shibata dummy 0 2007/8/7/22:7:30(130.34.89.180) Pt/Ti @350℃ 2007/8/8/3:50:16(130.34.95.43) -8 22 36 4771 shibata dummy 0 2007/8/7/22:9:21(130.34.89.180) PZT@350℃ 2007/8/8/3:50:26(130.34.95.43) 8 20 22 6937 H.Matsuo dummy 0 2007/8/8/9:45:47(172.16.44.137) Pt @ RT 8 29 34 6937 関 dummy 0 2007/8/8/12:2:13(130.34.95.43) Pt/Ti@300℃ 8 34 36 6937 関 dummy 0 2007/8/8/14:12:45(130.34.95.43) Pt/Ti@300℃ 8 36 38 6937 関 dummy 0 2007/8/8/17:26:17(130.34.95.43) 0 8 38 40 6937 関 dummy 0 2007/8/8/18:29:3(130.34.95.43) Pt/Ti@300℃ 10 20 25 6925 maegami dummy 0 2007/8/9/16:55:28(130.34.95.35) Pt/Ti 9 37 39 6937 H.Matsuo dummy 0 2007/8/9/18:26:27(130.34.95.43) Pt@R.T 9 40 48 6936 kawai dummy 0 2007/8/9/19:11:29(130.34.95.43) PZT@315˚C 10 30 32 6937 H.Matsuo dummy 0 2007/8/10/14:58:47(172.16.44.137) Pt @ RT 10 33 38 6936 kawai dummy 0 2007/8/10/15:39:34(130.34.95.43) PZT@315C 11 20 26 6937 k.hirano dummy 0 2007/8/11/9:33:47(130.34.95.43) target change 3.Ti->Mo @350℃ 12 38 48 6937 k.hirano dummy 0 2007/8/12/14:27:35(172.16.44.137) Mo@300 -13 28 32 6937 Takahashi Tomokazu dummy 0 2007/8/13/13:24:12(130.34.95.43) Pt 2007/8/13/14:2:52(130.34.95.43) 13 28 31 6937 Takahashi Tomokazu dummy 0 2007/8/13/13:24:12(130.34.95.43) Pt 13 31 33 6937 k.hirano dummy 0 2007/8/13/14:4:11(130.34.95.43) Mo@300℃ 14 40 48 6937 Matsumura dummy 0 2007/8/14/19:12:12(130.34.95.43) Target Change pt->Al -15 28 32 6937 Matsumura dummy 0 2007/8/14/19:13:21(130.34.95.43) Mo/Al 2007/8/14/22:19:58(130.34.95.43) 16 0 16 6937 Andrew dummy 0 2007/8/15/23:7:4(130.34.95.43) Target Change Cr/Au -21 26 32 6937 YG JIANG dummy 0 2007/8/20/18:20:47(130.34.95.43) 0 2007/8/20/19:11:2(130.34.95.43) 21 26 34 6937 Y.G. JIANG dummy 0 2007/8/20/19:11:40(130.34.95.43) Cr. Au 20 46 48 3586 kato dummy 0 2007/8/20/22:58:56(172.16.44.137) 0 21 0 2 3586 kato dummy 0 2007/8/20/22:59:17(172.16.44.137) Cr/Au@R.T. 21 38 48 6937 T. Matsumura dummy 0 2007/8/21/12:24:18(130.34.95.43) Target Change Au -> Mo, Cr -> Al 22 20 28 6937 T. Matsumura dummy 0 2007/8/21/12:25:4(130.34.95.43) Al/Mo 21 35 38 6937 ゆき dummy 0 2007/8/21/17:36:18(130.34.95.43) Cr 22 31 36 6937 T. Matsumura dummy 0 2007/8/22/13:22:55(130.34.95.43) Al/Mo for Test -23 46 48 3586 加藤 dummy 1 2007/8/22/18:11:52(130.34.95.17) target1 Mo>Au, target2 Al>Cr 2007/8/23/4:14:46(130.34.95.17) 23 0 10 3586 kato dummy 1 2007/8/22/18:12:55(130.34.95.17) target1 Mo>Au, target3 Al>Cr 24 37 42 6925 maegami dummy 1 2007/8/24/9:53:26(130.34.95.35) target change Au>Pt,Cr>Ti 25 23 29 6925 maegami dummy 0 2007/8/25/9:53:53(130.34.95.35) 0 27 40 48 6898 settsu dummy 1 2007/8/25/16:39:25(130.34.95.28) Target change 1.Pt → Ta 3. Ti →　W 25 37 41 6937 H.Matsuo dummy 0 2007/8/25/16:40:45(130.34.95.43) Ti & Pt @320℃ 28 20 24 6898 settsu dummy 0 2007/8/25/16:43:8(130.34.95.28) Ta,W sputtering@R.T. 27 37 39 6937 H.Matsuo dummy 0 2007/8/27/12:36:39(130.34.95.43) Pt@R.T -28 40 48 6898 settsu dummy 1 2007/8/27/15:52:18(130.34.95.28) Target change 3. W →Cu 2007/8/28/11:51:43(130.34.95.28) -29 20 24 6898 settsu dummy 0 2007/8/27/15:53:2(130.34.95.28) Cu sputtering @R.T. 2007/8/28/11:52:53(130.34.95.28) -28 40 48 6898 settsu dummy 1 2007/8/28/11:52:33(130.34.95.28) Target change 1.Ta→Cu 3.W→Ta 2007/8/28/18:28:39(130.34.95.28) -29 20 24 6898 settsu dummy 0 2007/8/28/11:53:13(130.34.95.28) Ta,Cu sputter@R.T. 2007/8/28/18:28:32(130.34.95.28) 29 40 48 4830 M. Otani dummy 0 2007/8/29/15:17:22(130.34.95.30) Target change 1.Ta → Cu 3. W → Cr @230 30 20 28 4830 M. Otani dummy 0 2007/8/29/15:18:23(130.34.95.30) Cr/Cu @230 29 34 36 6937 H.Matsuo dummy 0 2007/8/29/16:20:54(130.34.95.43) W@RT 29 38 40 4830 M. Otani dummy 0 2007/8/29/16:41:30(130.34.95.30) target change -30 32 36 3586 kato dummy 0 2007/8/30/9:24:25(130.34.95.17) 0 2007/8/30/9:24:33(130.34.95.17) 30 32 36 3586 kato dummy 0 2007/8/30/9:25:5(130.34.95.17) Cr@R.T. 30 28 29 4830 M. Otani dummy 0 2007/8/30/13:50:53(172.16.44.137) 0 30 42 48 4830 M. Otani dummy 0 2007/8/30/15:30:56(130.34.95.30) Cr/Cu at 200