1	0	18	6936	kawai	dummy	0	2007/5/31/18:38:49(130.34.95.43)	サンプルホルダ回収+真空引き
3	26	34	4771	Ishikawa	dummy	0	2007/6/2/0:19:39(130.34.89.180)	PZT/Pt/Ti@350℃
2	36	38	6937	H.Matsuo	dummy	0	2007/6/2/17:38:34(172.16.44.132)	Ti/Pt@RT
-6	18	26	4771	Ishikawa	dummy	0	2007/6/4/13:56:28(130.34.89.180)	PZT/Pt/Ti@350℃	2007/6/5/16:17:3(130.34.89.180)
-6	28	32	6965	Hishinuma	dummy	0	2007/6/5/12:6:44(130.34.95.43)	0	2007/6/6/13:31:8(130.34.95.31)
-6	32	38	6925	maegami	dummy	0	2007/6/5/19:34:58(130.34.95.35)	Ti/Pt	2007/6/6/13:35:27(130.34.95.35)
6	28	30	6965	Hishinuma	dummy	0	2007/6/5/12:6:44(130.34.95.43)	0
6	30	34	6925	maegami	dummy	0	2007/6/6/13:36:6(130.34.95.35)	Ti/Pt
6	36	40	4771	Miyashita	dummy	0	2007/6/6/14:37:46(130.34.89.180)	TargetChange 1.Pt->Al
7	20	24	4771	Miyashita	dummy	0	2007/6/6/14:38:32(130.34.89.180)	Al @ R.T.
7	25	28	4771	Miyashita	dummy	0	2007/6/7/12:50:26(130.34.89.180)	Al @R.T.
-11	42	46	6898	settsu	dummy	0	2007/6/11/15:4:9(130.34.95.28)	Target change  3.Ti→Ta	2007/6/11/18:15:46(130.34.95.28)
-12	26	30	6898	settsu	dummy	0	2007/6/11/15:7:11(130.34.95.28)	Ta sputtering @R. T.	2007/6/11/16:42:23(130.34.95.17)
12	38	46	4771	tachihara	dummy	0	2007/6/11/15:42:14(130.34.89.180)	Al@R.T.  PZT@350度
-11	36	42	3586	kato	dummy	0	2007/6/11/16:27:46(130.34.95.17)	0	2007/6/11/16:39:25(130.34.95.17)
-12	20	26	3586	kato	dummy	0	2007/6/11/16:28:0(130.34.95.17)	0	2007/6/11/16:39:45(130.34.95.17)
13	34	40	3586	加藤	dummy	0	2007/6/11/16:41:6(130.34.95.17)	PZT→Cr　Ta→Au
-14	20	26	3586	kato	dummy	0	2007/6/11/16:43:7(130.34.95.17)	spettering Cr,Au	2007/6/13/19:28:23(172.16.44.132)
11	36	40	4771	Miyashita	dummy	0	2007/6/11/18:16:59(130.34.89.180)	TargetChange 3.Ti -> Ta , 5.PZT ->SiO2
12	26	30	6898	settsu	dummy	0	2007/6/11/18:17:15(130.34.95.28)	Ta sputtering @R. T.
12	20	24	4771	Miyashita	dummy	0	2007/6/11/18:18:12(130.34.89.180)	SiO2 @ R.T.
12	30	38	4771	Miyashita	dummy	0	2007/6/12/10:57:10(172.16.44.132)	SiO2 @ R.T.
-14	28	32	4771	Miyashita	dummy	0	2007/6/12/10:58:16(172.16.44.132)	Al @ r	2007/6/12/10:58:32(172.16.44.132)
-14	28	32	4771	Miyashita	dummy	0	2007/6/12/10:58:54(172.16.44.132)	Al @ R.T.	2007/6/14/9:55:8(130.34.89.180)
13	21	24	6898	settsu	dummy	0	2007/6/12/15:44:26(130.34.95.28)	Ta sputtering @R. T.
13	26	32	4771	Ishikawa	dummy	0	2007/6/12/16:9:36(130.34.89.180)	PZT@350℃
14	14	18	4771	tachihara	dummy	0	2007/6/13/14:8:19(130.34.89.180)	Al@R.T.
14	21	24	6898	settsu	dummy	0	2007/6/13/21:48:47(130.34.95.28)	Ta sputtering @R. T.
14	18	21	4771	tachihara	dummy	0	2007/6/14/8:11:28(130.34.89.180)	Al@R.T.
-14	32	36	4771	Miyashita	dummy	0	2007/6/14/9:54:57(130.34.89.180)	Al @ R.T.	2007/6/14/14:9:19(172.16.44.132)
-14	28	32	4771	Miyashita	dummy	0	2007/6/14/13:33:22(130.34.95.43)	Al @ R.T.	2007/6/14/14:9:27(172.16.44.132)
14	28	31	4771	Miyashita	dummy	0	2007/6/14/13:33:22(130.34.95.43)	Al @ R.T.
-14	31	48	4771	Miyashita	dummy	0	2007/6/14/14:11:41(172.16.44.132)	maintenance	2007/6/14/14:25:37(172.16.44.132)
14	31	38	4771	Miyashita	dummy	1	2007/6/14/16:34:19(172.16.44.132)	Target Change 1.Al ->SiO2 3.Ta->Al Bake@170
-15	18	22	4771	Miyashita	dummy	0	2007/6/14/16:35:7(172.16.44.132)	Al @R.T.	2007/6/15/2:1:6(130.34.89.180)
-15	20	24	4771	Miyashita	dummy	0	2007/6/15/2:1:47(130.34.89.180)	Al @ R.T.	2007/6/15/4:52:53(130.34.89.180)
15	12	16	4771	Miyashita	dummy	0	2007/6/15/4:53:18(130.34.89.180)	Al @ R.T.
18	40	44	6898	settsu	dummy	0	2007/6/18/9:21:30(130.34.95.28)	Target change 1.Ta→Cu
19	20	28	6898	settsu	dummy	0	2007/6/18/9:26:25(130.34.95.28)	Cu sputtering @R.T.
-18	28	32	4771	Miyashita	dummy	0	2007/6/18/13:38:49(130.34.89.180)	Al @ R.T.	2007/6/18/13:48:20(130.34.89.180)
-19	32	36	4771	miyashita	dummy	0	2007/6/18/13:39:30(130.34.89.180)	Al @ R.T.	2007/6/18/13:48:29(130.34.89.180)
18	28	30	4771	Miyashita	dummy	0	2007/6/18/13:38:49(130.34.89.180)	Al @ R.T.
19	44	48	4771	Ishikawa	dummy	1	2007/6/18/15:52:11(130.34.89.180)	Target change 1.Cu ->Pt 2. SiO2 -> Ti 3. Al -> PZT@350℃
20	16	24	4771	Ishikawa	dummy	0	2007/6/18/15:53:7(130.34.89.180)	PZT/Pt/Ti@350℃
-19	28	33	4771	tachihara	dummy	0	2007/6/18/16:53:42(130.34.89.180)	Al@R.T.	2007/6/19/13:23:52(130.34.89.180)
19	16	20	6898	settsu	dummy	0	2007/6/18/17:24:19(130.34.95.28)	Cu sputtering @R.T.
-20	32	36	4771	Miyashita	dummy	0	2007/6/18/18:29:44(130.34.89.180)	Ti @ R.T.	2007/6/20/13:24:17(130.34.89.180)
20	28	32	6937	関	dummy	0	2007/6/18/19:40:1(130.34.95.43)	Pt/Ti@R.T.
-20	36	42	6937	H.Matsuo	dummy	0	2007/6/18/22:28:57(130.34.95.43)	Ti/Pt @320℃	2007/6/20/18:59:19(130.34.95.43)
19	28	29	4771	tachihara	dummy	0	2007/6/18/16:53:42(130.34.89.180)	Al@R.T.
-22	8	18	3586	kato	dummy	0	2007/6/19/17:37:31(130.34.95.17)	target change 1.Pt>Au 2.Ti>Cr	2007/6/20/8:50:24(130.34.95.17)
-22	28	36	3586	kato	dummy	0	2007/6/19/17:38:21(130.34.95.17)	Au/Cr 	2007/6/19/17:39:1(130.34.95.17)
-22	28	34	3586	kato	dummy	0	2007/6/19/17:39:43(130.34.95.17)	Au/Cr@R.T.	2007/6/20/8:50:29(130.34.95.17)
21	10	18	3586	kato	dummy	0	2007/6/20/8:51:56(130.34.95.17)	target chenge 1.Pt>Au,2.Ti>Cr
21	30	36	3586	kato	dummy	0	2007/6/20/8:53:26(130.34.95.17)	Cr/Au@R.T.
-21	36	42	6898	settsu	dummy	0	2007/6/20/10:25:26(130.34.95.28)	Cr sputter@R.T.	2007/6/21/17:11:50(130.34.95.28)
20	24	28	4771	Ishikawa	dummy	0	2007/6/20/10:36:13(130.34.89.180)	0
-22	28	34	6898	settsu	dummy	0	2007/6/20/16:32:6(130.34.95.28)	Cr sputter@R.T.	2007/6/20/16:32:19(130.34.95.28)
20	36	40	6937	H.Matsuo	dummy	0	2007/6/18/22:28:57(130.34.95.43)	Ti/Pt @320℃
21	36	37	6898	settsu	dummy	0	2007/6/20/10:25:26(130.34.95.28)	Cr sputter@R.T.
21	42	46	4771	Miyashita	dummy	0	2007/6/21/20:35:39(130.34.89.180)	Cr @ R.T.
22	24	32	3586	kato	dummy	0	2007/6/21/22:39:27(130.34.95.17)	Au/CR@R.T.
-25	28	34	4771	Ishikawa	dummy	0	2007/6/23/18:7:17(130.34.89.180)	PZT@350℃	2007/6/25/5:15:18(130.34.89.180)
25	46	48	6937	Kurahashi	dummy	0	2007/6/25/4:41:17(130.34.95.43)	TiN@70℃
-26	5	7	6937	Kurahashi	dummy	1	2007/6/25/4:42:2(130.34.95.43)	target change 3.Cr->Ti	2007/6/25/13:15:24(130.34.95.43)
25	38	44	4771	Ishikawa	dummy	0	2007/6/25/5:16:4(130.34.89.180)	PZT@350℃
-25	30	33	3586	kishi	dummy	0	2007/6/25/13:12:28(130.34.95.17)	0	2007/6/25/13:20:48(130.34.95.17)
25	5	7	6937	Kurahashi	dummy	1	2007/6/25/13:16:3(130.34.95.43)	target change 3.Cr->Ti
25	28	31	3586	kishi	dummy	0	2007/6/25/13:21:22(130.34.95.17)	0
26	2	8	3586	kato	dummy	1	2007/6/25/14:32:14(130.34.95.17)	target chenge 3.Ti>Cr
-26	18	26	3586	加藤	dummy	0	2007/6/25/15:20:5(130.34.95.17)	0	2007/6/25/15:20:14(130.34.95.17)
26	18	26	3586	kato	dummy	0	2007/6/25/15:20:44(130.34.95.17)	Cr/Au@R.T.
25	34	38	6937	Yoshida	dummy	0	2007/6/25/16:51:9(172.16.44.136)	Ti
26	0	2	6937	Kurahashi	dummy	0	2007/6/25/17:59:25(130.34.95.43)	TiN@70℃
26	28	32	4771	Miyashita	dummy	0	2007/6/25/19:14:28(130.34.89.180)	Cr @ R.T.
26	34	44	4771	shibata	dummy	1	2007/6/26/10:36:38(130.34.89.180)	target change 1.Pt  3.Ti  5.PZT 350℃ベーク
27	16	26	4771	shibata	dummy	0	2007/6/26/10:38:49(130.34.89.180)	PZT/Pt/Ti@350℃
26	26	28	4771	Miyashita	dummy	0	2007/6/26/10:58:57(130.34.89.180)	0
28	18	24	6925	Shimizu	dummy	0	2007/6/26/12:48:41(130.34.95.35)	Pt/ti@R.T
-27	6	14	7281	date	dummy	0	2007/6/26/18:23:56(130.34.77.72)	Ti/Pt	2007/6/26/18:27:34(130.34.77.72)
-27	36	38	6937	Kurahashi	dummy	0	2007/6/26/19:49:13(130.34.95.43)	TiN@70℃	2007/6/27/13:35:59(130.34.95.43)
29	42	48	4771	Ishikawa	dummy	0	2007/6/26/22:16:13(130.34.89.180)	PZT/Pt/Ti@350℃
27	10	16	4771	shibata	dummy	0	2007/6/27/4:36:7(130.34.95.43)	PZT/Pt/Ti@350℃
-27	38	40	6937	Kurahashi	dummy	0	2007/6/27/13:16:3(130.34.95.43)	TiN@70℃	2007/6/27/13:36:2(130.34.95.43)
-28	32	36	6937	Kurahashi	dummy	0	2007/6/27/13:36:42(130.34.95.43)	TiN@70℃	2007/6/27/16:16:58(130.34.95.43)
27	32	36	6937	Kurahashi	dummy	0	2007/6/27/16:16:34(130.34.95.43)	TiN@70℃
-28	28	36	4771	shibata	dummy	0	2007/6/28/3:43:55(130.34.89.180)	PZT@350℃	2007/6/28/10:15:50(130.34.89.180)
28	24	26	3586	kishi	dummy	0	2007/6/28/9:35:44(130.34.95.17)	Ti@R.T
-28	27	29	6937	H.Matsuo	dummy	0	2007/6/28/11:0:50(130.34.95.43)	Ti/Pt @R.T	2007/6/28/12:11:42(172.16.44.138)
28	26	40	6925	Shimizu	dummy	1	2007/6/28/13:21:20(130.34.95.35)	真空引き
-29	20	24	6937	H.Matsuo	dummy	0	2007/6/28/20:19:38(130.34.95.43)	Pt@R.T	2007/6/28/20:26:33(172.16.44.138)
29	20	24	6937	H.Matsuo	dummy	0	2007/6/28/21:24:1(130.34.95.43)	Pt@R.T
29	26	29	6925	Shimizu	dummy	0	2007/6/29/10:44:0(130.34.95.35)	Pt/Ti@R.T