-1 36 40 4404 Lee dummy 0 2007/5/1/17:26:36(130.34.248.30) Pt @R.T. 2007/5/1/17:37:39(130.34.248.30) 1 36 38 4404 Lee dummy 0 2007/5/1/17:26:36(130.34.248.30) Pt @R.T. -2 43 46 6937 Kurahashi dummy 0 2007/5/2/21:15:3(130.34.95.43) target change 3.Mo->Ti 2007/5/2/21:15:10(130.34.95.43) 2 43 45 6937 Kurahashi dummy 0 2007/5/2/21:15:3(130.34.95.43) target change 3.Mo->Ti 4 41 43 6937 Kurahashi dummy 0 2007/5/4/20:27:12(130.34.95.43) TiN@70℃ 6 28 30 6937 Kurahashi dummy 0 2007/5/6/13:48:44(130.34.95.43) TiN@70℃ 6 42 46 4771 miyashita dummy 0 2007/5/6/20:27:4(130.34.89.180) target change 5.PZT->Al 7 20 24 4771 miyashita dummy 0 2007/5/6/23:31:17(172.16.44.132) 0 8 20 24 4771 miyashita dummy 0 2007/5/7/21:18:8(130.34.89.180) Al 8 34 42 6965 wakui dummy 0 2007/5/8/15:35:32(130.34.95.31) 0 -9 20 24 6937 H.Matsuo dummy 0 2007/5/8/20:43:21(130.34.95.43) Ti & Pt @320℃ 2007/5/9/9:39:1(172.16.44.132) 9 18 20 6965 wakui dummy 0 2007/5/8/22:37:28(130.34.95.31) 0 9 20 22 6937 H.Matsuo dummy 0 2007/5/8/20:43:21(130.34.95.43) Ti & Pt @320℃ 9 22 36 6965 wakui dummy 1 2007/5/9/10:23:26(172.16.44.132) シュルツゲージ交換 9 38 42 6937 H.Matsuo dummy 0 2007/5/9/18:12:2(172.16.44.132) Ti/Pt @320℃ 10 14 20 6898 settsu dummy 0 2007/5/9/18:48:9(130.34.95.28) Target change 1.Pt→Cu 3.Ti→Ta -10 32 36 6898 settsu dummy 0 2007/5/9/18:49:17(130.34.95.28) Ta,Cu sputter@R.T. 2007/5/10/8:54:27(130.34.95.28) 10 20 22 6898 settsu dummy 0 2007/5/10/8:54:18(130.34.95.28) Target change 1.Pt→Cu 3.Ti→Ta 10 36 40 6898 settsu dummy 0 2007/5/10/8:54:58(130.34.95.28) Ta,Cu sputter@R.T. 10 41 46 6965 wakui dummy 0 2007/5/10/11:53:32(130.34.95.31) target change 5.Ai→Au 11 14 20 6965 wakui dummy 0 2007/5/11/1:3:9(130.34.95.31) Au@30 11 30 33 6898 settsu dummy 0 2007/5/11/12:6:37(130.34.95.28) Ta sputter@R.T 11 41 46 6965 wakui dummy 0 2007/5/11/12:56:2(130.34.95.31) Au@R.t -14 28 32 4404 Lee dummy 0 2007/5/11/21:32:57(130.34.224.4) Cu @R.T. 2007/5/14/12:6:38(130.34.248.148) 13 36 40 6965 wakui dummy 0 2007/5/13/15:41:41(130.34.95.31) Au@R.T. 14 41 47 6968 Lin dummy 0 2007/5/14/16:18:41(130.34.95.15) 0 15 0 12 6936 Andrew dummy 0 2007/5/14/22:4:13(130.34.95.43) Cr Au target change 15 24 29 6936 andrew dummy 0 2007/5/14/22:5:19(130.34.95.43) cr/au @170 16 40 48 4830 M. Otani dummy 0 2007/5/15/0:47:19(130.34.95.30) Target change 3.Ta→Cu @ 230 17 18 23 4830 M. Otani dummy 0 2007/5/15/0:49:8(130.34.95.30) Cu/Cr @ 200℃ 17 25 30 4830 M. Otani dummy 0 2007/5/15/0:49:27(130.34.95.30) Cu/Cr @ 200℃ 18 32 36 4404 Lee dummy 0 2007/5/15/20:29:24(130.34.248.148) Cr @ R.T. -18 18 23 6936 kasuga dummy 0 2007/5/16/9:11:55(130.34.95.43) 前日からサンプル入れます。 2007/5/16/9:12:31(130.34.95.43) 18 18 23 6936 kasuga dummy 0 2007/5/16/9:13:52(130.34.95.43) Cr/Cu/Au Samples are loaded from yesterday night 17 42 48 6936 kasuga dummy 0 2007/5/16/9:14:38(130.34.95.43) Sample loading for tommorow 17 23 25 4830 M Otani dummy 0 2007/5/17/11:55:19(172.16.44.132) 0 17 30 34 4830 M. OTANI dummy 0 2007/5/17/11:55:43(172.16.44.132) 0 -18 38 44 6937 k.hirano dummy 0 2007/5/18/17:36:3(130.34.95.43) 0 2007/5/18/17:36:17(130.34.95.43) 18 38 44 6937 k.hirano dummy 0 2007/5/18/17:38:12(130.34.95.43) target change 3.Au->Mo 19 34 42 6937 k.hirano dummy 0 2007/5/18/17:39:8(130.34.95.43) Mo@300℃ 21 40 46 6898 settsu dummy 0 2007/5/21/11:52:47(130.34.95.28) Target change 1.Cr→Cu -24 20 30 6937 Kim dummy 0 2007/5/21/19:23:50(130.34.95.43) Kim is the best person 2007/5/21/19:25:49(130.34.95.43) 22 14 18 6898 settsu dummy 0 2007/5/21/22:54:9(130.34.95.28) Cu sputtering @R.T. 22 30 34 6937 H.Matsuo dummy 0 2007/5/22/14:50:58(172.16.44.132) Au@room temp 23 2 18 6937 Andrew dummy 0 2007/5/23/1:9:53(130.34.95.43) Target Change Cr/Au -23 30 34 6937 Andrew dummy 0 2007/5/23/1:10:33(130.34.95.43) Cr/Au at 170C 2007/5/23/10:56:20(130.34.95.43) -24 40 44 6937 Andrew dummy 0 2007/5/23/10:56:55(130.34.95.43) Cr/Au at 170C 2007/5/24/13:12:25(130.34.95.43) 23 39 43 6937 H.Matsuo dummy 0 2007/5/23/19:15:56(172.16.44.132) Au@RT 24 3 7 6937 Andrew dummy 0 2007/5/24/0:44:4(130.34.95.43) Cr/Au at 170C 24 35 39 6965 wakui dummy 0 2007/5/24/12:54:11(130.34.95.31) Au@R.T. 24 26 35 6925 shimizu dummy 0 2007/5/24/13:16:11(130.34.95.43) Target Change Ti/Pt 25 16 20 6925 shimizu dummy 0 2007/5/24/13:17:22(130.34.95.43) Ti/Pt -25 30 34 6937 H.Matsuo dummy 0 2007/5/24/18:2:16(130.34.95.43) Ti & Pt @320℃ 2007/5/25/11:22:34(172.16.44.132) 25 25 30 6937 H.Matsuo dummy 0 2007/5/25/11:23:19(172.16.44.132) Ti/Pt@320℃ -26 36 40 6898 settsu dummy 0 2007/5/26/15:33:1(130.34.95.28) Cu/TaatR.T. 2007/5/26/15:33:44(130.34.95.28) 26 35 37 6937 H.Matsuo dummy 0 2007/5/26/17:20:28(172.16.44.132) Ti/Pt@RT -29 34 38 6937 H.Matsuo dummy 0 2007/5/28/11:39:46(130.34.95.43) Ti/Pt @320℃ 2007/5/28/17:20:11(130.34.95.43) 28 24 26 6937 H.Matsuo dummy 0 2007/5/28/11:56:50(172.16.44.132) Ti/Pt@RT 29 40 48 4771 Ishikawa dummy 1 2007/5/28/15:6:40(130.34.89.180) target change 5. Au -> PZT 350℃ベーク 30 18 24 4771 Ishikawa dummy 0 2007/5/28/15:9:14(130.34.89.180) PZT/Pt/Ti @350℃ -30 26 32 6937 k.hirano dummy 0 2007/5/28/17:6:52(130.34.95.43) 0 2007/5/28/17:7:10(130.34.95.43) -28 36 42 6937 k.hirano dummy 0 2007/5/28/17:9:42(130.34.95.43) target change 3.Ti ->Mo 350℃ 2007/5/28/17:17:54(130.34.95.43) 28 36 37 6937 k.hirano dummy 0 2007/5/28/17:9:42(130.34.95.43) target change 3.Ti ->Mo 350℃ -28 37 43 6937 H.Matsuo dummy 0 2007/5/28/17:19:59(130.34.95.43) Ti/Pt @320℃ 2007/5/28/19:3:35(172.16.44.132) 28 44 48 6937 k.hirano dummy 0 2007/5/28/17:24:17(130.34.95.43) target change 3.Ti->Mo @350℃ 29 18 26 6937 k.hirano dummy 0 2007/5/28/17:25:24(130.34.95.43) 3.Mo @300℃ 28 37 41 6937 H.Matsuo dummy 0 2007/5/28/17:19:59(130.34.95.43) Ti/Pt @320℃ 31 22 30 6936 kawai dummy 0 2007/5/28/21:49:11(130.34.95.43) Pt/Ti@600C 31 30 40 6936 kawai dummy 0 2007/5/28/21:50:0(130.34.95.43) For cooling -29 26 34 6937 k.hirano dummy 0 2007/5/29/9:35:48(130.34.95.43) 3.Mo @300℃ 2007/5/29/13:56:59(172.16.44.132) -29 36 40 4771 Miyashita dummy 0 2007/5/29/13:27:0(172.16.44.141) Al 2007/5/29/13:45:3(172.16.44.141) 29 34 40 4771 Miyashita dummy 0 2007/5/29/13:45:34(172.16.44.141) Al@R.T. 29 26 30 6937 k.hirano dummy 0 2007/5/29/9:35:48(130.34.95.43) 3.Mo @300℃ 31 40 48 6936 kawai dummy 0 2007/5/31/18:38:3(130.34.95.43) サンプルホルダ回収＋真空引き