2	32	44	6936	Ho	dummy	1	2007/4/2/15:52:51(130.34.95.43)	Ti --> Cr
3	26	32	6936	Ho	dummy	0	2007/4/2/15:56:50(130.34.95.43)	Cr ,  W 
3	38	44	4771	K.shibata	dummy	1	2007/4/3/10:29:48(130.34.89.180)	target change 3.Cr -> Ti   5.W -> PZT  350℃ベーク
-4	26	36	4771	K.shibata	dummy	0	2007/4/3/10:32:51(130.34.89.180)	Ti, Pt, PZT @350℃	2007/4/4/14:5:58(172.16.44.132)
-5	42	48	6898	settsu	dummy	1	2007/4/3/13:25:17(130.34.95.28)	Target change 1.Pt→Ta	2007/4/5/13:46:21(130.34.95.28)
-6	20	26	6898	settsu	dummy	0	2007/4/3/13:27:32(130.34.95.28)	Ta sputter@RT	2007/4/5/13:46:25(130.34.95.28)
-4	40	44	6898	kato	dummy	0	2007/4/3/15:50:22(130.34.95.28)	Ti@70℃	2007/4/4/19:28:40(130.34.95.28)
4	18	26	4771	shibata	dummy	0	2007/4/4/8:49:40(172.16.44.132)	Ti, Pt, PZT
5	20	26	6937	H.Matsuo	dummy	0	2007/4/4/10:12:38(130.34.95.43)	Pt @ 320℃
4	26	31	4771	K.shibata	dummy	0	2007/4/3/10:32:51(130.34.89.180)	Ti, Pt, PZT @350℃
4	40	41	6898	kato	dummy	0	2007/4/3/15:50:22(130.34.95.28)	Ti@70℃
5	37	46	6936	Ho	dummy	1	2007/4/5/18:27:1(130.34.95.43)	Ti, PZT --> Cr, W
6	18	28	6936	Ho	dummy	1	2007/4/5/21:44:22(130.34.95.43)	Gas and water leak check
-10	18	26	4404	Goto	dummy	0	2007/4/9/19:28:42(130.34.248.180)	Cr	2007/4/9/19:29:17(130.34.248.180)
-12	42	48	6898	settsu	dummy	1	2007/4/9/20:2:59(130.34.95.28)	Target change 1.Pt→Ta	2007/4/12/19:19:42(130.34.95.28)
-13	26	32	6898	settsu	dummy	0	2007/4/9/20:3:44(130.34.95.28)	Ta sputter@RT	2007/4/12/19:21:20(130.34.95.28)
12	44	48	6898	settsu	dummy	1	2007/4/12/19:20:47(130.34.95.28)	Target change 1.Pt→Ta, 3.Cr→Cu
13	26	32	6898	settsu	dummy	0	2007/4/12/19:22:31(130.34.95.28)	Ta,Cu sputter@R.T.
-18	36	38	6898	settsu	dummy	0	2007/4/18/14:0:49(130.34.95.28)	Ta sputter@R.T.	2007/4/18/14:1:21(130.34.95.28)
-18	36	40	6898	settsu	dummy	0	2007/4/18/14:1:47(130.34.95.28)	Ta,Cu sputter@R.T.	2007/4/18/15:51:54(130.34.95.28)
18	32	36	6898	settsu	dummy	0	2007/4/18/15:52:13(130.34.95.28)	Ta,Cu sputter@R.T.
18	36	48	6898	settsu	dummy	0	2007/4/18/16:35:57(172.16.44.210)	真空引き
-19	30	34	6898	settsu	dummy	0	2007/4/18/18:34:34(130.34.95.28)	Ta,Cu sputter@R.T.	2007/4/19/14:26:59(130.34.95.28)
-19	38	42	6898	settsu	dummy	0	2007/4/19/14:26:55(130.34.95.28)	Ta,Cu sputter@R.T.	2007/4/19/16:54:18(130.34.95.28)
19	30	31	6898	settsu	dummy	0	2007/4/18/18:34:34(130.34.95.28)	Ta,Cu sputter@R.T.
19	34	38	6898	settsu	dummy	0	2007/4/19/16:57:21(130.34.95.28)	Ta,Cu sputter@R.T.
23	36	42	6937	H.Matsuo	dummy	1	2007/4/23/9:39:54(130.34.95.43)	Target Change 1,Cu->Pt & 320℃Bake
24	20	28	6937	H.Matsuo	dummy	0	2007/4/23/9:42:28(130.34.95.43)	Ta & Pt @320℃
24	31	48	6937	Andrew	dummy	0	2007/4/24/13:18:43(130.34.95.43)	Target Change Cr/Au
25	12	16	6937	Andrew	dummy	0	2007/4/24/13:19:37(130.34.95.43)	Cr/Au at 170C
26	0	16	4771	shibata	dummy	1	2007/4/25/22:35:38(130.34.89.180)	target change 1.Pt  3.Ti  5.PZT  350℃ベーク
26	26	38	4771	shibata	dummy	0	2007/4/25/22:39:30(130.34.89.180)	PZT/Pt/Ti @350℃
26	22	26	4404	Lee	dummy	0	2007/4/26/0:15:27(130.34.248.213)	Cr @R.T.
26	38	46	4771	shibata	dummy	0	2007/4/26/17:13:23(172.16.44.132)	PZT/Pt/Ti @350℃
-27	26	36	6937	k.hirano	dummy	0	2007/4/27/10:10:35(130.34.95.43)	0	2007/4/27/10:40:2(172.16.44.132)
27	22	26	6937	k.hirano	dummy	1	2007/4/27/10:37:17(172.16.44.132)	ターゲット交換　3,Ti->Mo 350℃bake
27	36	42	6937	k.hirano	dummy	0	2007/4/27/10:39:21(172.16.44.132)	Mo sputter@300℃
28	36	42	6937	k.hirano	dummy	0	2007/4/27/10:40:42(172.16.44.132)	Mo sputter @300℃
29	28	36	6937	k.hirano	dummy	0	2007/4/29/13:7:12(172.16.44.132)	Mo sputter @300℃