2	18	24	4771	田中	dummy	0	2007/2/27/22:25:12(130.34.89.180)	PZT/Pt/Ti 350℃
2	36	42	6937	H.Matsuo	dummy	0	2007/3/2/9:53:19(130.34.95.43)	Ti & Pt @320℃
2	28	34	6936	Ho	dummy	0	2007/3/2/11:17:30(130.34.95.43)	0
-3	36	48	6937	nozawa	dummy	1	2007/3/2/11:35:46(130.34.95.43)	Target Change 1:Pt 2:Cr 3:Au	2007/3/3/16:18:7(172.16.44.132)
-4	0	8	6937	nozawa	dummy	1	2007/3/2/11:42:18(130.34.95.43)	 Target Change 1:Pt 2:Cr 3:Au	2007/3/3/16:19:41(172.16.44.132)
4	20	30	6937	nozawa	dummy	0	2007/3/2/11:44:15(130.34.95.43)	Cr/Au @170℃
3	34	48	6937	nozawa	dummy	1	2007/3/3/16:18:48(172.16.44.132)	Target Change 1:Pt->Au 3:Ti->Cr 5:PZT
6	18	30	6937	Ho	dummy	1	2007/3/5/10:10:20(130.34.95.43)	target change 3.Cr->Ti
6	30	34	6937	Ho	dummy	0	2007/3/5/10:10:38(130.34.95.43)	TiN@70℃
6	34	40	6937	Ho	dummy	0	2007/3/6/10:31:52(172.16.44.132)	Ti@70℃
7	41	43	6937	Kurahashi	dummy	0	2007/3/7/20:26:44(130.34.95.43)	TiN@70℃
8	22	32	4771	K.shibata	dummy	1	2007/3/8/11:3:6(130.34.89.180)	target change 1. Au -> Pt 　350℃ベーク
-9	24	34	4771	K.shibata	dummy	0	2007/3/8/11:3:35(130.34.89.180)	Ti, Pt, PZT @350℃	2007/3/8/22:11:26(172.16.44.132)
8	38	40	6937	Kurahashi	dummy	0	2007/3/8/16:39:31(130.34.95.43)	TiN@70℃
8	44	48	4771	shibata	dummy	0	2007/3/8/22:10:56(172.16.44.132)	PZT/Pt/Ti @350℃
9	0	6	4771	shibata	dummy	0	2007/3/8/22:11:21(172.16.44.132)	PZT/Pt/Ti @350℃
-9	34	36	4771	shibata	dummy	0	2007/3/9/2:43:3(130.34.89.180)	PZT@350℃	2007/3/9/2:43:29(130.34.89.180)
9	8	10	4771	shibata	dummy	0	2007/3/9/4:1:28(172.16.44.132)	PZT@350℃
9	26	36	6936	Ho	dummy	1	2007/3/9/13:30:24(172.16.44.132)	Pt --> W, 170 C bake
13	0	12	4771	K.shibata	dummy	1	2007/3/13/0:7:22(130.34.89.180)	target change 1. W -> Pt 　350℃ベーク
13	24	32	4771	K.shibata	dummy	0	2007/3/13/0:8:50(130.34.89.180)	Ti, Pt, PZT @350℃
14	18	30	3977	imaizumi	dummy	0	2007/3/13/9:41:21(130.34.75.68)	Ti,Pt
13	32	42	6936	Ho	dummy	1	2007/3/13/10:20:31(130.34.95.43)	PZT -> W
15	27	38	6936	Ho	dummy	0	2007/3/15/13:33:14(172.16.44.132)	W@RT
-19	29	34	6937	H.Matsuo	dummy	0	2007/3/19/13:13:21(130.34.95.43)	Pt @ 320℃	2007/3/19/14:32:55(172.16.44.132)
19	29	32	6937	H.Matsuo	dummy	0	2007/3/19/13:13:21(130.34.95.43)	Pt @ 320℃
21	40	42	6937	Kurahashi	dummy	0	2007/3/21/20:46:28(172.16.44.132)	TiN@70℃
22	46	48	6937	Kurahashi	dummy	0	2007/3/22/23:3:3(172.16.44.132)	TiN@70℃
23	28	32	6936	Ho	dummy	0	2007/3/23/14:11:41(130.34.95.43)	0
-29	28	32	4404	Lee	dummy	0	2007/3/28/19:8:37(130.34.248.30)	Pt/Ti @ R.T.	2007/3/29/13:1:14(130.34.248.30)
29	22	26	6936	Ho	dummy	0	2007/3/29/11:4:32(130.34.95.43)	W @ 70C
29	28	29	4404	Lee	dummy	0	2007/3/28/19:8:37(130.34.248.30)	Pt/Ti @ R.T.
29	29	32	4404	Lee	dummy	0	2007/3/29/14:40:44(130.34.248.30)	Ti @R.T.
30	34	38	6936	Ho	dummy	0	2007/3/30/16:16:12(130.34.95.43)	Ti @ RT, W @RT
30	39	43	6937	H.Matsuo	dummy	0	2007/3/30/18:4:7(130.34.95.43)	Ti & Pt @320℃