-1 20 24 6937 Kurahashi dummy 0 2007/1/31/16:41:30(130.34.95.43) TiN@70邃� 2007/2/1/0:25:38(130.34.95.43) 1 22 26 6937 Kurahashi dummy 0 2007/2/1/0:25:52(130.34.95.43) TiN@70邃� 1 26 28 6937 Kurahashi dummy 0 2007/2/1/12:19:49(130.34.95.43) Ti @ 70邃� 1 40 42 6937 Kurahashi dummy 0 2007/2/1/18:51:2(130.34.95.43) TiN@70邃� 5 38 44 6937 H.Matsuo dummy 1 2007/2/5/17:46:52(130.34.95.43) Target Change 1,Cu->Pt & 320邃ィake 6 20 25 6937 H.Matsuo dummy 0 2007/2/5/17:47:40(130.34.95.43) Ti & Pt @320邃� 5 44 45 4771 K.shibata dummy 1 2007/2/5/22:39:31(130.34.89.180) target change 5. Al -> PZT 6 28 36 4771 K.shibata dummy 0 2007/2/6/2:41:7(130.34.89.180) Ti, Pt, PZT @350邃� -7 28 34 4771 逕ｰ荳ｭ dummy 0 2007/2/7/10:21:56(130.34.89.180) PZT/Pt/Ti縲縲350邃� 2007/2/7/13:53:44(130.34.89.180) -8 40 44 4771 逕ｰ荳ｭ dummy 0 2007/2/7/10:22:21(130.34.89.180) PZT/Pt/Ti縲縲350邃� 2007/2/7/21:51:52(130.34.89.180) 7 28 30 4771 逕ｰ荳ｭ dummy 0 2007/2/7/10:21:56(130.34.89.180) PZT/Pt/Ti縲縲350邃� 7 30 32 4771 逕ｰ荳ｭ dummy 0 2007/2/7/14:32:53(172.16.44.132) 0 -9 28 34 4771 逕ｰ荳ｭ dummy 0 2007/2/7/21:51:49(130.34.89.180) �ｰ�ｺ�ｴ/Pt/Ti 350邃� 2007/2/9/14:26:24(172.16.44.132) -13 26 31 6965 zhao dummy 0 2007/2/8/19:17:47(130.34.95.31) 0 2007/2/8/19:25:22(130.34.95.31) 11 30 36 6965 zhao dummy 0 2007/2/8/19:25:50(130.34.95.31) 0 9 26 28 4771 逕ｰ荳ｭ dummy 0 2007/2/9/12:53:44(172.16.44.132) 0 9 28 31 4771 逕ｰ荳ｭ dummy 0 2007/2/7/21:51:49(130.34.89.180) �ｰ�ｺ�ｴ/Pt/Ti 350邃� 13 30 36 6965 zhao dummy 0 2007/2/13/10:45:42(130.34.95.31) 0 16 20 30 7124 imaizumi_ohmi_lab dummy 0 2007/2/14/11:59:31(130.34.75.68) Pt -21 18 48 6898 kato dummy 1 2007/2/14/18:59:21(130.34.95.28) 蛻�梵螳､蛛憺崕縺ｫ莨ｴ縺�FE-SEM縺ｮ遶九■荳九￡蜿翫�遶九■荳翫￡ 2007/2/14/19:2:38(130.34.95.28) -21 22 48 6898 kato dummy 1 2007/2/14/19:5:21(130.34.95.28) 蛻�梵螳､蛛憺崕縺ｫ莨ｴ縺�FE-SEM縺ｮ遶九■荳九￡蜿翫�遶九■荳翫￡ 2007/2/16/9:21:18(130.34.95.28) -22 0 24 6898 kato dummy 1 2007/2/14/19:6:19(130.34.95.28) 蛻�梵螳､蛛憺崕縺ｫ莨ｴ縺�FE-SEM縺ｮ遶九■荳九￡蜿翫�遶九■荳翫￡ 2007/2/16/9:21:23(130.34.95.28) 15 30 36 6936 kawai dummy 0 2007/2/15/9:21:35(130.34.95.43) PZT@350ﾋ咾 -22 41 47 4830 M. Otani dummy 0 2007/2/15/13:23:41(130.34.95.30) 1.Cu 3.Cr at 330邃� 2007/2/16/11:25:12(130.34.95.30) -23 20 28 4830 M. Otani dummy 0 2007/2/15/13:26:43(130.34.95.30) Cu/Cr @300邃� 2007/2/22/18:30:29(172.16.44.210) 24 20 28 4830 M. Otani dummy 0 2007/2/15/13:27:54(130.34.95.30) Cu/Cr @R.T. -23 32 40 4830 M. Otani dummy 0 2007/2/15/13:36:11(130.34.95.30) Cu/Cr @300邃� 2007/2/23/0:4:12(172.16.44.132) -20 20 33 4771 蟆剰ｲｫ dummy 0 2007/2/15/14:16:4(130.34.95.21) Ag 2007/2/18/19:51:58(130.34.89.180) -25 28 36 4404 Lee dummy 0 2007/2/15/14:23:10(130.34.248.186) Cr @R.T. 2007/2/15/14:23:23(130.34.248.186) -26 26 36 4404 Lee dummy 0 2007/2/15/14:23:58(130.34.248.186) Cr @ R.T. 2007/2/26/10:10:28(130.34.248.205) -19 22 40 4771 蟆剰ｲｫ dummy 0 2007/2/15/14:56:22(130.34.89.180) ta�暖et change 5. Ag 170邃��繝ｼ繧ｯ 2007/2/15/14:56:33(130.34.89.180) -19 22 40 4771 蟆剰ｲｫ dummy 1 2007/2/15/14:56:58(130.34.89.180) ta�暖et change 5. Ag 170邃��繝ｼ繧ｯ 2007/2/16/17:33:23(130.34.89.180) -19 18 22 4771 蟆剰ｲｫ dummy 1 2007/2/15/15:1:59(130.34.89.180) ta�暖et change 5. Ag 170邃��繝ｼ繧ｯ 2007/2/16/17:33:29(130.34.89.180) 15 44 48 6936 kawai dummy 0 2007/2/15/22:44:5(130.34.95.43) PZT@350ﾋ咾 16 0 4 6936 kawai dummy 0 2007/2/15/22:44:42(130.34.95.43) PZT@315ﾋ咾 21 42 48 4830 M. Otani dummy 0 2007/2/16/11:26:56(130.34.95.30) target change 1->Cu 3->Cr @ 330邃� 22 32 40 4830 M. Otani dummy 0 2007/2/16/11:27:37(130.34.95.30) Cu/Cr @ 300邃� -16 30 40 7124 imaizumi dummy 0 2007/2/16/11:35:40(130.34.75.68) 謌占�螳､螟ｧ豌鈴幕謾ｾ縺ｮ轤ｺ縲�18:00縺ｾ縺ｧ逵溽ｩｺ蠑輔″縺ｫ縺ｪ繧翫∪縺吶� 2007/2/16/14:47:27(130.34.89.180) 16 30 32 7124 imaizumi dummy 0 2007/2/16/11:35:40(130.34.75.68) 謌占�螳､螟ｧ豌鈴幕謾ｾ縺ｮ轤ｺ縲�18:00縺ｾ縺ｧ逵溽ｩｺ蠑輔″縺ｫ縺ｪ繧翫∪縺吶� 16 32 48 4771 逕ｰ荳ｭ dummy 1 2007/2/16/14:49:49(130.34.89.180) target change 1.Au 3.Cr 5.Ag 170邃��繝ｼ繧ｯ -17 0 6 4771 miyashita dummy 0 2007/2/16/19:0:34(130.34.89.180) Au/Cr 2007/2/16/20:39:14(130.34.89.180) 17 10 16 4771 miyashita dummy 0 2007/2/16/20:39:29(130.34.89.180) 0 17 32 40 4771 miyashita dummy 0 2007/2/17/14:57:48(130.34.95.43) Cr -19 42 48 6937 Kurahashi dummy 1 2007/2/17/16:45:6(130.34.95.43) target change 1.Au->Ti 2007/2/19/12:48:33(130.34.95.43) -20 34 38 6937 Kurahashi dummy 0 2007/2/17/16:45:42(130.34.95.43) TiN@70邃� 2007/2/20/13:53:5(130.34.95.43) 17 40 48 4771 miyashita dummy 0 2007/2/17/19:3:8(130.34.89.180) Cr,Au/Cr 18 32 36 4771 蟆剰ｲｫ dummy 0 2007/2/18/16:7:34(130.34.89.180) Ag RT 18 36 48 4771 tanaka dummy 0 2007/2/18/16:8:53(130.34.89.180) target change 1.Pt 3.Ti 5.PZT -19 30 36 4771 逕ｰ荳ｭ dummy 0 2007/2/18/23:34:18(130.34.89.180) PZT Pt Ti 350邃� 2007/2/19/2:56:51(130.34.95.43) -21 32 38 4771 逕ｰ荳ｭ dummy 0 2007/2/18/23:35:27(130.34.89.180) PZT 350邃� 2007/2/21/11:1:41(130.34.89.180) -22 20 26 4771 逕ｰ荳ｭ dummy 0 2007/2/18/23:36:5(130.34.89.180) PZT縲350邃� 2007/2/22/2:9:30(172.16.44.132) 19 36 40 4771 逕ｰ荳ｭ dummy 0 2007/2/19/2:57:33(130.34.95.43) PZT縲Pt縲Ti 350邃� 19 44 46 6937 Kurahashi dummy 0 2007/2/19/21:46:41(172.16.44.132) TiN@70邃� -22 40 45 6937 譛ｴ髏俶� dummy 0 2007/2/20/15:45:12(172.16.44.160) 0 2007/2/21/19:16:45(172.16.44.160) 22 46 48 4830 M. Otani dummy 0 2007/2/20/20:49:27(130.34.95.30) Cu/Cr @ 300邃� 23 0 10 4830 M. Otani dummy 0 2007/2/20/20:49:59(130.34.95.30) Cu/Cr @ 300邃� 24 32 40 4830 M. Otani dummy 0 2007/2/20/20:51:31(130.34.95.30) Cu/Cr @ 300邃� -22 40 46 4771 逕ｰ荳ｭ dummy 0 2007/2/22/2:9:52(172.16.44.132) PZT縲�難ｼ包ｼ仙ｺｦ 2007/2/22/17:21:40(130.34.95.43) 22 26 30 4771 miyashita dummy 0 2007/2/22/6:28:29(130.34.89.180) 0 -23 42 46 6937 D.Satoh dummy 0 2007/2/22/14:24:12(130.34.95.43) Cr@R.T. 2007/2/23/16:6:24(130.34.95.43) -23 28 32 4771 逕ｰ荳ｭ dummy 0 2007/2/22/18:3:32(130.34.89.180) PZT縲�難ｼ包ｼ仙ｺｦ 2007/2/22/20:28:51(130.34.89.180) 22 40 46 4830 M. Otani dummy 0 2007/2/22/18:30:19(172.16.44.210) Cu/Cr RT -23 26 32 4771 逕ｰ荳ｭ dummy 0 2007/2/22/20:29:17(130.34.89.180) PZT縲�難ｼ包ｼ仙ｺｦ 2007/2/23/14:17:14(130.34.89.180) 24 28 32 4830 M. Otani dummy 0 2007/2/23/1:26:37(172.16.44.132) Cu/ Cr RT 23 26 31 4771 逕ｰ荳ｭ dummy 0 2007/2/22/20:29:17(130.34.89.180) PZT縲�難ｼ包ｼ仙ｺｦ 23 36 42 6937 D.Satoh dummy 0 2007/2/23/16:6:6(130.34.95.43) Cr@R.T. 23 43 46 4771 逕ｰ荳ｭ dummy 0 2007/2/23/21:42:28(172.16.44.132) PZT縲350蠎ｦ -27 16 30 4771 miyashita dummy 0 2007/2/25/6:58:43(172.16.44.132) target change 5.PZT竊但l 2007/2/26/21:34:6(130.34.89.180) -27 38 42 4771 miyashita dummy 0 2007/2/25/6:59:27(172.16.44.132) Al 2007/2/26/21:34:16(130.34.89.180) 25 38 46 4404 Lee dummy 0 2007/2/26/10:11:6(130.34.248.205) Cr @ R.T. 26 38 46 4404 Lee dummy 0 2007/2/26/10:11:37(130.34.248.205) Cr @ R.T. 27 36 40 4771 逕ｰ荳ｭ dummy 0 2007/2/27/17:15:23(130.34.89.180) 0 27 40 48 4771 逕ｰ荳ｭ dummy 1 2007/2/27/17:16:29(130.34.89.180) 繧ｿ繝ｼ繧ｲ繝�ヨ莠､謠帙1Pt 3Ti 5PZT 360邃� 28 0 12 4771 逕ｰ荳ｭ dummy 1 2007/2/27/17:17:10(130.34.89.180) 0 28 12 18 4771 逕ｰ荳ｭ dummy 1 2007/2/27/23:38:47(130.34.89.180) 0 28 45 47 6937 Ho dummy 0 2007/2/28/22:22:40(130.34.95.43) 0