1 0 4 4771 T.Sano dummy 0 2007/10/29/15:35:30(130.34.89.180) Al@R.T. 1 40 48 4771 Ishikawa dummy 1 2007/10/29/21:15:16(130.34.89.180) Target change 1->Pt 2->Ti 3->PZT@350℃ 2 0 18 4771 Ishikawa dummy 1 2007/10/29/21:16:19(130.34.89.180) Target change 1->Pt 2->Ti 3->PZT@350℃ 2 18 24 4771 Ishikawa dummy 0 2007/10/29/21:16:52(130.34.89.180) PZT/Pt/Ti@350℃ -2 36 40 6937 k.hirano dummy 0 2007/10/30/19:22:12(130.34.95.43) target change 3.PZT ->Ge 300℃ 2007/10/30/19:22:21(130.34.95.43) 2 36 40 6937 k.hirano dummy 1 2007/10/30/19:23:1(130.34.95.43) target change 3.PZT ->Ge 300℃ 2 40 48 3586 加藤 dummy 1 2007/11/1/16:47:37(130.34.95.17) target change1.Pt>Au 5.PZT>Cr -3 34 38 6937 k.hirano dummy 0 2007/11/1/19:13:59(130.34.95.43) 3.Ge RT 2007/11/1/19:15:59(130.34.95.43) -3 30 36 6937 k.hirano dummy 0 2007/11/1/19:16:41(130.34.95.43) 3.Ge RT 2007/11/1/19:28:42(130.34.95.43) 3 18 26 6937 k.hirano dummy 0 2007/11/1/19:28:35(130.34.95.43) 3.Ge RT -3 36 44 6937 Nakamura dummy 0 2007/11/1/22:46:6(130.34.95.43) 3.Ge @RT 2007/11/3/13:14:2(130.34.95.43) -2 24 26 4771 Ishikawa dummy 0 2007/11/2/7:56:53(130.34.89.180) PZT/Pt/Ti@350℃ 2007/11/2/10:0:46(130.34.89.180) 2 24 28 4771 Ishikawa dummy 0 2007/11/2/10:1:0(130.34.89.180) PZT/Pt/Ti@350℃ 2 28 30 4771 Ishikawa dummy 0 2007/11/2/12:50:46(130.34.89.180) PZT/Pt/Ti@350℃ -3 44 48 6937 k.hirano dummy 1 2007/11/2/17:22:24(130.34.95.43) target change 3.Ge->Mo @350℃ 2007/11/2/17:23:26(130.34.95.43) 3 28 36 3586 kato dummy 0 2007/11/2/22:1:51(130.34.95.17) Au/Cr@R.T. 4 40 46 6937 nakamura dummy 0 2007/11/3/13:14:51(130.34.95.43) 3.Ge RT 3 38 39 6937 H.Matsuo dummy 0 2007/11/3/18:45:43(172.16.44.137) Au@RT 4 28 36 3586 kato dummy 0 2007/11/4/5:39:22(172.16.44.137) Au/Cr@R.T. 5 36 40 6937 k.hirano dummy 1 2007/11/5/9:45:0(130.34.95.43) target change 3.Ge->Mo @350℃ 6 18 36 6937 k.hirano dummy 0 2007/11/5/10:6:16(130.34.95.43) 3.Mo @300℃ -6 40 48 6898 yasuda dummy 1 2007/11/5/14:29:49(130.34.95.28) Target Change 1.Au→Ag 3.Mo→Ti 5. Cr→SiO2 2007/11/6/18:13:11(130.34.95.28) -7 26 33 6896 yasuda dummy 0 2007/11/5/14:31:48(130.34.95.28) SiO2/Ag/Ti@R.T. 2007/11/5/14:32:32(130.34.95.28) -7 26 33 6898 yasuda dummy 0 2007/11/5/14:33:4(130.34.95.28) SiO2/Ag/Ti@R.T 2007/11/6/18:13:18(130.34.95.28) 6 36 40 6937 H.Matsuo dummy 1 2007/11/6/18:1:57(130.34.95.43) メインバルブ異常調査 6 40 48 6937 H.Matsuo dummy 1 2007/11/6/20:55:46(130.34.95.43) シュルツゲージ交換＆真空引き 7 0 18 6937 H.Matsuo dummy 1 2007/11/6/20:56:37(130.34.95.43) 真空引き -19 40 48 6898 hirano dummy 1 2007/11/9/18:23:18(130.34.95.28) 1-Al　　3-Ti 2007/11/15/20:54:52(130.34.95.28) -20 0 8 6898 hirano dummy 1 2007/11/9/18:24:10(130.34.95.28) 1-Al 3-Ti 2007/11/15/20:55:15(130.34.95.28) -20 22 36 6898 hirano dummy 0 2007/11/9/18:27:42(130.34.95.28) TiN Al 2007/11/15/20:55:3(130.34.95.28) 16 32 42 6937 Andrew dummy 1 2007/11/16/16:2:18(130.34.95.43) Pump Down 16 42 47 6937 Andrew dummy 0 2007/11/16/16:2:40(130.34.95.43) Cr/Au at 170C -19 34 48 6909 Yamada dummy 0 2007/11/16/16:45:54(130.34.95.37) 0 2007/11/19/16:55:10(172.16.44.137) -20 26 48 6909 Yamada dummy 0 2007/11/16/16:46:35(130.34.95.37) 0 2007/11/19/16:56:55(172.16.44.137) 17 33 35 6937 H.Matsuo dummy 0 2007/11/17/16:19:32(172.16.44.137) Au@RT 21 16 32 6937 k.hirano dummy 0 2007/11/17/21:9:48(130.34.95.43) 3.Mo @300℃ -21 44 47 6898 yasuda dummy 1 2007/11/19/14:55:44(130.34.95.28) Target Change 5. Cr →Ag@R.T. 2007/11/21/16:9:26(130.34.95.28) -22 22 25 6898 yasuda dummy 0 2007/11/19/14:57:3(130.34.95.28) 5.Ag@R.T. 2007/11/22/9:50:57(130.34.95.28) 19 32 33 6937 H.Matsuo dummy 0 2007/11/19/15:35:3(172.16.44.137) Au@RT -22 44 47 6937 nakamura dummy 1 2007/11/19/15:56:48(130.34.95.43) Target change 3.Mo →　3.Ge 2007/11/22/13:42:27(130.34.95.43) 19 34 36 6909 Yamada dummy 0 2007/11/16/16:45:54(130.34.95.37) 0 19 36 48 6909 T.Konno dummy 0 2007/11/19/16:56:11(172.16.44.137) Target Change 1.Au→Al@R.T. 20 26 48 6909 T.Konno dummy 0 2007/11/19/16:57:9(172.16.44.137) 0 -21 32 38 6937 k.hirano dummy 0 2007/11/21/8:53:47(172.16.44.137) 0 2007/11/21/8:53:55(172.16.44.137) 21 32 38 6937 k.hirano dummy 0 2007/11/21/8:54:28(172.16.44.137) 3.Mo@300℃ 21 38 42 3586 morimoto dummy 0 2007/11/21/11:30:11(130.34.95.17) Cr@R.T -22 29 34 4771 tachihara dummy 0 2007/11/21/12:16:18(130.34.89.180) Al@R.T 2007/11/21/13:31:41(130.34.89.180) -23 30 36 4404 Lee dummy 0 2007/11/21/12:23:35(130.34.248.30) Cr@R.T. 2007/11/22/17:52:2(130.34.248.30) 22 26 31 4771 tachihara dummy 0 2007/11/21/13:32:15(130.34.89.180) Al@RT -22 32 44 6898 Hirosaki_university kirita dummy 0 2007/11/21/16:1:59(130.34.95.28) TiN@70℃ 2007/11/21/21:47:35(130.34.95.28) -23 18 30 6898 Hirosaki_university kirita dummy 0 2007/11/21/16:5:19(130.34.95.28) Al@R.T. 2007/11/21/21:47:17(130.34.95.28) 21 44 47 6898 yasuda dummy 1 2007/11/21/16:10:50(130.34.95.28) Taget Change 3.Mo→Ti , 5.Cr→Ag@R.T. 26 22 34 6898 Hirosaki_university Hirano dummy 0 2007/11/21/21:53:17(130.34.95.28) TiN@70℃ -25 42 48 6898 Hirosaki_university Hirano dummy 1 2007/11/21/22:6:33(130.34.95.28) Target change1.Al 3.Ti 2007/11/22/1:11:11(130.34.95.28) 26 40 48 6898 Hirosaki_university Hirano dummy 0 2007/11/21/22:8:1(130.34.95.28) Al@R.T. -22 34 37 6898 yasuda dummy 0 2007/11/21/23:49:35(172.16.44.137) 5.Ag@R.T. 2007/11/22/9:51:44(130.34.95.28) 25 36 40 6898 Hirosaki_university Hirano dummy 1 2007/11/22/1:12:22(130.34.95.28) Target change 3.Ge → Ti 22 20 25 6898 yasuda dummy 0 2007/11/22/9:51:35(130.34.95.28) 5.Ag@R.T. 22 34 42 6898 yasuda dummy 0 2007/11/22/11:42:56(172.16.44.137) 5.Ag@R.T. 23 36 40 6937 k.hirano dummy 1 2007/11/22/12:55:36(130.34.95.43) target change 3.Ge->Mo @350℃ 24 16 36 6937 k.hirano dummy 0 2007/11/22/12:56:35(130.34.95.43) 3.Mo @300℃ 22 31 33 4771 tachihara dummy 0 2007/11/22/13:14:52(130.34.89.180) Al@R.T -23 18 26 6937 nakamura dummy 0 2007/11/22/13:41:16(130.34.95.43) 0 2007/11/22/13:41:45(130.34.95.43) 27 38 44 6937 Nakamura dummy 1 2007/11/22/17:7:40(130.34.95.43) Target change 3.Ti →Ge -28 22 34 6937 Nakamura dummy 0 2007/11/22/17:8:10(130.34.95.43) 3.Ge@Rt 2007/11/28/7:26:43(130.34.95.43) -26 34 40 4404 Lee dummy 0 2007/11/22/17:50:55(130.34.248.30) Cr @RT 2007/11/22/17:51:47(130.34.248.30) 27 31 38 4404 Lee dummy 0 2007/11/22/17:52:25(130.34.248.30) Cr @RT 24 42 48 6937 k.hirano dummy 0 2007/11/24/20:18:9(130.34.95.43) 3.Mo@300℃ 25 0 20 6937 k.hirano dummy 0 2007/11/24/20:19:7(130.34.95.43) 3.Mo@300℃ -25 40 44 6898 Hirosaki_university Hirano dummy 1 2007/11/25/15:26:23(130.34.95.28) Target change 5.Ag→Cr 2007/11/25/16:39:15(130.34.95.28) 25 34 36 6898 Hirosaki_university Hirano dummy 1 2007/11/25/16:39:52(130.34.95.28) Target change 5.Ag→Cr -29 38 44 6898 yasuda dummy 1 2007/11/26/11:23:1(130.34.95.28) Target Change 5.Cr→SiO2 2007/11/28/19:19:51(130.34.95.43) 30 26 38 6898 yasuda dummy 0 2007/11/26/11:24:50(130.34.95.28) 5.SiO2@R.T. 28 37 41 4771 tachihara dummy 0 2007/11/26/15:4:18(130.34.89.180) Al@R.T -28 42 48 6898 settsu dummy 0 2007/11/27/10:6:7(130.34.95.28) Cr @350℃ 2007/11/28/11:39:0(130.34.95.28) 29 0 10 6898 settsu dummy 0 2007/11/27/10:6:45(130.34.95.28) Cr @350℃ -28 34 37 4771 Ishikawa dummy 0 2007/11/27/19:45:41(130.34.89.180) Al@R.T 2007/11/27/19:50:29(130.34.89.180) 28 34 37 4771 Ishikawa dummy 0 2007/11/27/19:51:7(130.34.89.180) Al@R.T -28 18 22 3586 morimoto dummy 0 2007/11/27/21:42:20(130.34.95.17) Cr@R.T 2007/11/27/23:34:12(130.34.95.17) -29 32 36 3586 morimoto dummy 0 2007/11/27/23:37:14(130.34.95.17) Cr@R.T 2007/11/28/16:56:48(130.34.95.43) 29 10 16 6898 settsu dummy 0 2007/11/28/11:38:49(130.34.95.28) Cr @350℃ -30 40 48 4830 M. Otani dummy 0 2007/11/28/13:53:56(130.34.95.30) target change 1: Cu 3: Ta @350C 2007/11/30/16:0:19(130.34.95.30) -29 16 28 6937 Andrew dummy 0 2007/11/28/19:19:31(130.34.95.43) Target Change Cr/Au 2007/11/28/19:19:57(130.34.95.43) 29 16 28 6937 Andrew dummy 0 2007/11/28/19:20:47(130.34.95.43) Target Change Cr/Au/SiO2 -30 8 12 6937 Andrew dummy 0 2007/11/28/19:21:43(130.34.95.43) Cr/Au at 170C 2007/11/29/19:14:21(130.34.95.43) 28 46 48 6937 Kurahashi dummy 0 2007/11/28/20:41:14(130.34.95.43) TiN@70℃ -29 41 47 3586 morimoto dummy 0 2007/11/28/22:37:4(130.34.95.17) Cr/Au@R.T.Cr@R.T 2007/11/28/22:41:58(130.34.95.17) 30 22 26 3586 morimoto dummy 0 2007/11/28/22:42:51(130.34.95.17) Cr/Au@R.T 29 28 32 3586 morimoto dummy 0 2007/11/28/23:1:59(130.34.95.17) Cr@R.T 29 40 44 4830 M. Otani dummy 0 2007/11/29/2:49:58(130.34.95.30) Cr @ 200C 30 18 22 3586 kishi dummy 0 2007/11/29/15:42:37(130.34.95.17) Cr/Au@R.T 29 36 39 3586 kishi dummy 0 2007/11/29/15:58:50(130.34.95.17) Cr/Au@R.T 29 44 48 6937 Andrew dummy 0 2007/11/29/19:14:5(130.34.95.43) Cr/Au at 170C -30 38 40 6937 H.Matsuo dummy 0 2007/11/29/21:2:4(130.34.95.43) Au@RT 2007/11/30/17:16:19(172.16.44.137) 30 6 9 3586 kishi dummy 0 2007/11/29/22:50:4(130.34.95.17) Cr/Au@R.T 30 40 48 4830 M. Otani dummy 0 2007/11/30/16:1:4(130.34.95.30) 1 Cu 3 Ta @ 170C 30 38 40 6937 H.Matsuo dummy 1 2007/11/30/18:28:49(172.16.44.137) 1,SiO2 不具合調査（プラズマ立たない）