4 44 48 4404 Goto, Ha dummy 0 2006/12/27/18:35:34(130.34.248.197) Target change 1. Pt -> Cr 5 0 20 4404 Goto, Ha dummy 0 2006/12/27/18:36:53(130.34.248.197) Target change 1.Pt -> Cr -5 20 40 4404 Goto, Ha dummy 0 2006/12/27/18:37:35(130.34.248.197) Cr@RT 2006/12/27/18:39:29(130.34.248.197) 5 20 40 4404 Goto, Ha dummy 0 2006/12/27/18:39:48(130.34.248.197) Cr, Ti@RT 8 28 38 4404 Lee dummy 0 2006/12/29/10:33:38(130.34.248.186) Cr, Ti, Al @R.T. 5 40 48 4404 Lee dummy 0 2007/1/4/16:54:17(130.34.248.186) Cr, Ti, Al @R.T. 9 26 38 6965 zhao dummy 0 2007/1/5/11:8:3(130.34.95.31) Target change Ti→Au 10 20 32 6965 zhao dummy 0 2007/1/5/11:9:56(130.34.95.31) Al,Au@R.T. 9 38 48 6965 zhao dummy 0 2007/1/5/11:11:9(130.34.95.31) Target change 6 26 38 6965 zhao dummy 0 2007/1/6/13:7:9(130.34.95.31) Au,Al 6 42 48 6965 zhao dummy 0 2007/1/6/19:51:44(130.34.95.31) 0 7 22 38 6965 zhao dummy 0 2007/1/6/19:52:10(130.34.95.31) 0 10 38 45 5318 A.ueno dummy 0 2007/1/9/19:22:20(130.34.231.209) Au@R.T -12 38 44 4404 Lee dummy 0 2007/1/10/14:56:24(130.34.248.186) Cr @ R.T. 2007/1/12/0:11:58(130.34.248.186) 15 20 32 6965 zhao dummy 0 2007/1/10/19:32:31(130.34.95.31) Au,Al@R.T. 11 30 36 6937 hashimoto dummy 0 2007/1/11/12:18:16(130.34.95.43) Cr/Au@170℃ -15 34 48 4771 K.shibata dummy 1 2007/1/11/16:18:44(130.34.95.21) target change 1.Pt 3.Ti 5.PZT 300℃ベーク 2007/1/11/17:39:34(130.34.95.21) -16 26 34 4771 K.shibata dummy 0 2007/1/11/16:20:24(130.34.95.21) Ti, Pt, PZT @300℃ 2007/1/11/17:39:41(130.34.95.21) -12 44 48 4771 田中・柴田 dummy 0 2007/1/11/17:27:21(130.34.95.21) ターゲット交換　1Ｐｔ　3Ｔｉ　5ＰＺＴ　３５０度ベーク 2007/1/11/17:27:32(130.34.95.21) 12 44 48 4771 田中・柴田 dummy 1 2007/1/11/17:28:20(130.34.95.21) ターゲット交換　1Pt 3Ti 5PZT ３５０度ベーク -13 0 20 4771 田中・柴田 dummy 0 2007/1/11/17:28:58(130.34.95.21) ターゲット交換　1Pt 3Ti 5PZT ３５０度ベーク 2007/1/12/7:55:2(130.34.95.21) 14 34 48 4771 田中・柴田 dummy 1 2007/1/11/17:30:2(130.34.95.21) ターゲット交換　1Ａｕ 3Ｔi 5Al 170度ベーク -13 28 36 4771 K.shibata dummy 0 2007/1/11/18:6:59(130.34.95.21) Ti,Pt,PZT @300℃ 2007/1/13/9:50:55(130.34.89.180) 12 36 44 4771 田中・柴田 dummy 1 2007/1/12/7:54:49(130.34.95.21) ターゲット交換 -13 0 20 4771 田中・柴田 dummy 1 2007/1/12/7:55:30(130.34.95.21) ターゲット交換 2007/1/12/22:28:14(130.34.89.180) 12 28 36 4771 田中・柴田 dummy 1 2007/1/12/12:22:52(130.34.95.21) 0 -15 40 46 4830 M. Otani dummy 0 2007/1/12/17:11:1(130.34.95.30) Al @R.T. 2007/1/15/17:16:29(130.34.95.30) 13 14 22 4771 K.shibata dummy 0 2007/1/13/7:3:35(130.34.89.180) Ti, Pt, PZT @300℃ 13 22 26 4771 K.shibata dummy 0 2007/1/13/9:50:46(130.34.89.180) PZT@350℃ 13 44 48 4771 K.shibata dummy 0 2007/1/13/21:44:38(130.34.89.180) Ti, Pt, PZT @350℃ 14 0 4 4771 K.shibata dummy 0 2007/1/13/21:45:30(130.34.89.180) Ti, Pt, PZT @350℃ 14 28 34 6937 Kurahashi dummy 0 2007/1/14/13:10:19(130.34.95.43) Ti@70℃ -15 32 36 6937 Kurahashi dummy 0 2007/1/15/11:52:28(130.34.95.43) 0 2007/1/15/11:52:33(130.34.95.43) -15 32 36 6937 Kurahashi dummy 0 2007/1/15/11:52:51(130.34.95.43) Ti@70℃ 2007/1/15/14:10:17(130.34.95.43) -16 18 30 6965 zhao dummy 0 2007/1/15/13:29:56(130.34.95.31) 0 2007/1/15/13:30:47(130.34.95.31) -16 22 30 6965 zhao dummy 0 2007/1/15/13:31:29(130.34.95.31) Au@R.T. 2007/1/15/17:29:29(130.34.95.31) 15 34 38 6937 Kurahashi dummy 0 2007/1/15/14:11:11(130.34.95.43) Ti@70℃ -16 42 48 4830 M. Otani dummy 0 2007/1/15/17:18:4(130.34.95.30) Al @R.T. 2007/1/16/20:45:42(130.34.95.30) 16 16 23 6965 zhao dummy 0 2007/1/15/17:29:49(130.34.95.31) 0 16 36 42 4771 T.Sano dummy 0 2007/1/16/14:25:23(130.34.89.180) Al@R.T. 16 42 44 4830 M. Otani dummy 0 2007/1/15/17:18:4(130.34.95.30) Al @R.T. 17 18 23 6965 zhao dummy 0 2007/1/16/21:39:54(130.34.95.31) 0 -17 30 34 6965 zhao dummy 0 2007/1/16/21:43:4(130.34.95.31) 0 2007/1/16/21:52:50(130.34.95.31) 17 36 41 6965 zhao dummy 0 2007/1/16/21:56:35(130.34.95.31) 0 17 32 36 6937 Kurahashi dummy 0 2007/1/17/9:36:56(130.34.95.43) 0 18 36 46 6937 H.Matsuo dummy 0 2007/1/17/17:56:46(130.34.95.43) Target Change 1,Au->Pt & 320℃Bake 19 20 25 6937 H.Matsuo dummy 0 2007/1/17/17:59:33(130.34.95.43) Ti & Pt @320℃ 19 26 30 4771 T.Sano dummy 0 2007/1/18/20:55:7(130.34.89.180) Al@R.T. 19 32 48 4771 K.shibata dummy 1 2007/1/18/22:36:38(130.34.89.180) target change 5. Al -> PZT 350℃ベーク -20 26 34 4771 K.shibata dummy 0 2007/1/18/22:44:0(130.34.89.180) Ti, Pt, PZT @350℃ 2007/1/20/5:41:51(130.34.89.180) -22 40 48 4830 M. Otani dummy 0 2007/1/19/11:10:38(130.34.95.30) 1,Pt->Cu & 320℃Bake 2007/1/19/11:31:22(130.34.95.30) -23 30 40 4830 M. Otani dummy 0 2007/1/19/11:11:38(130.34.95.30) Ti/Cu @300℃ 2007/1/19/11:31:26(130.34.95.30) 23 40 48 4830 M. Otani dummy 0 2007/1/19/11:18:15(130.34.95.30) Ti/Cu @300℃ 22 40 48 4830 M. Otani dummy 0 2007/1/19/11:33:50(130.34.95.30) target change 1. Pt -> Cu 5. PZT -> Cr 320℃Bake 23 30 40 4830 M. Otani dummy 0 2007/1/19/11:34:18(130.34.95.30) Cr/Cu @300℃ 22 20 26 6937 H.Matsuo dummy 0 2007/1/19/12:42:43(130.34.95.43) Ti & Pt @320℃ 20 12 22 4771 K.shibata dummy 0 2007/1/20/5:41:48(130.34.89.180) Ti, Pt, PZT @350℃ 21 12 16 4771 K.shibata dummy 0 2007/1/21/5:20:40(130.34.89.180) Ti, Pt, PZT @350℃ 21 31 33 6937 Kurahashi dummy 0 2007/1/21/16:56:0(130.34.95.43) Ti@70℃ (N2 flow) 22 28 32 6937 hashimoto dummy 0 2007/1/21/22:44:41(130.34.95.43) Ti/Pt@R.T 24 30 36 4404 Lee dummy 0 2007/1/22/12:20:49(130.34.248.186) Cr @ R.T. 22 36 40 4404 Lee dummy 0 2007/1/22/16:49:33(130.34.248.186) Pt @R.T. 24 24 28 6937 Kurahashi dummy 0 2007/1/22/18:35:18(130.34.95.43) 0 24 0 8 4830 M. Otani dummy 0 2007/1/23/23:18:3(172.16.44.132) Cr/Cu @300℃ 24 42 48 6937 Randles dummy 0 2007/1/24/14:2:2(130.34.95.43) Target Change Cr/Au 25 20 26 6937 Faizul dummy 0 2007/1/24/14:9:43(130.34.95.43) Cr/Au Sputter 25 34 48 4771 Kouji Sano dummy 1 2007/1/24/15:53:59(130.34.89.180) Target change5.⇒Al -26 15 20 4771 Kouji Sano dummy 0 2007/1/24/15:55:25(130.34.89.180) Al@RT 2007/1/25/22:42:49(172.16.44.132) 25 26 30 6937 Andrew dummy 0 2007/1/25/11:5:2(130.34.95.43) Cr/Au at 170C 26 26 32 4771 Kouji.S dummy 0 2007/1/25/22:44:3(172.16.44.132) Al@TR 29 38 42 4771 T.Sano dummy 0 2007/1/29/14:1:22(130.34.89.180) Al@R.T. -31 42 46 6937 Kurahashi dummy 0 2007/1/31/14:45:57(130.34.95.43) target change -> Ti 2007/1/31/14:46:15(130.34.95.43) 31 42 46 6937 Kurahashi dummy 0 2007/1/31/14:47:9(130.34.95.43) target change 3.Au -> Ti 26 36 42 4771 Sano dummy 0 2007/1/31/15:36:30(172.16.44.141) 0