4	22	26	6936	Kawai	dummy	0	2006/9/3/21:17:9(130.34.95.43)	Pt@315C
4	28	32	6937	H.Matsuo	dummy	0	2006/9/4/9:9:17(130.34.95.43)	Ti/Pt @ 315℃
4	32	36	6937	関	dummy	0	2006/9/4/12:5:59(130.34.95.43)	0
4	40	44	6937	関	dummy	0	2006/9/4/18:20:48(130.34.95.5)	Ti/Pt 300℃
5	19	25	6937	関	dummy	0	2006/9/4/23:14:8(130.34.95.43)	Ti/Pt 300℃
5	29	33	6937	関	dummy	0	2006/9/5/10:42:39(130.34.95.43)	Ti/Pt 300℃
5	33	38	6936	kawai	dummy	0	2006/9/5/16:24:34(172.16.44.142)	Pt@315C
7	24	34	6898	kato	dummy	0	2006/9/6/14:34:2(130.34.95.28)	Ti
7	34	38	6898	yamaya	dummy	0	2006/9/7/15:9:5(130.34.95.28)	Ta
8	28	34	6898	yamaya	dummy	0	2006/9/7/18:33:13(130.34.95.28)	Ta R.T.
10	36	38	6898	settsu	dummy	0	2006/9/10/16:16:38(130.34.95.28)	Ta sputter
11	28	32	6898	settsu	dummy	0	2006/9/10/23:33:32(130.34.95.28)	Ta sputter
11	38	42	6937	H.Matsuo	dummy	0	2006/9/11/12:30:34(130.34.95.43)	Ti/Pt @ 315℃
11	42	48	6937	Kurahashi	dummy	0	2006/9/11/13:6:22(130.34.95.43)	target change -> W
12	26	30	6937	Kurahashi	dummy	0	2006/9/11/13:6:55(130.34.95.43)	W sputter
12	44	48	6898	settsu	dummy	0	2006/9/12/13:41:19(130.34.95.28)	Target change w→Ta
13	0	10	6898	settsu	dummy	0	2006/9/12/13:42:10(130.34.95.28)	Target change w→Ta
-12	30	36	6937	Kurahashi	dummy	0	2006/9/12/14:19:51(130.34.95.43)	W sputter	2006/9/12/14:21:45(130.34.95.43)
12	30	31	6937	Kurahashi	dummy	0	2006/9/12/14:19:51(130.34.95.43)	W sputter
12	31	42	6937	Kurahashi	dummy	0	2006/9/12/14:22:5(130.34.95.43)	0
-13	20	24	6937	Randles	dummy	0	2006/9/12/14:43:25(130.34.95.43)	Cr/Au 170 C	2006/9/12/21:31:52(130.34.95.43)
-13	26	32	6898	settsu	dummy	0	2006/9/12/16:44:51(130.34.95.28)	Ta sputter	2006/9/12/21:18:38(130.34.95.28)
13	16	20	6898	settsu	dummy	0	2006/9/12/21:19:36(130.34.95.28)	Ta sputter
13	26	30	6937	randles	dummy	0	2006/9/12/21:32:21(130.34.95.43)	Cr/Au at 170 C
13	20	24	6898	settsu	dummy	0	2006/9/13/9:30:9(130.34.91.196)	Ta sputter
13	32	42	6937	D. Satoh	dummy	0	2006/9/13/10:20:0(130.34.95.43)	Cr sputter
13	42	48	6937	t.sato	dummy	0	2006/9/13/11:59:45(130.34.95.43)	Cr Spatter
14	20	24	6937	Yoshida	dummy	0	2006/9/13/15:25:53(130.34.95.43)	Cr/Au sputter
15	26	32	6937	nozawa	dummy	0	2006/9/13/16:5:35(130.34.95.43)	Cr/Ar at RT
-14	26	38	4404	Lee	dummy	0	2006/9/13/16:43:30(130.34.248.216)	Cr, Ta @R.T.	2006/9/14/14:3:16(130.34.248.216)
14	26	31	4404	Lee	dummy	0	2006/9/13/16:43:30(130.34.248.216)	Cr, Ta @R.T.
14	38	48	4404	Lee	dummy	0	2006/9/14/14:4:1(130.34.248.216)	Cr, Ta @ RT
14	31	33	6937	Randles	dummy	0	2006/9/14/14:30:52(130.34.95.43)	Cr/Au @ 170C
15	22	26	6937	Yoshida	dummy	0	2006/9/14/22:1:1(130.34.95.43)	Cr/Au
15	32	36	5251	Hino	dummy	0	2006/9/15/10:37:35(130.34.95.8)	Au/Cr
15	36	46	6937	nozawa	dummy	0	2006/9/15/15:15:50(130.34.95.43)	Cr/Au at RT
-16	42	46	6898	settsu	dummy	0	2006/9/15/19:35:27(130.34.95.28)	Ta sputter	2006/9/15/22:9:53(130.34.91.196)
-16	34	38	6898	settsu	dummy	0	2006/9/15/22:10:14(130.34.91.196)	Ta sputter	2006/9/16/13:49:58(130.34.95.28)
-16	0	4	6937	Yoshida	dummy	0	2006/9/15/23:3:6(130.34.95.43)	0	2006/9/16/0:2:40(130.34.95.43)
16	0	3	6937	Yoshida	dummy	0	2006/9/15/23:3:6(130.34.95.43)	0
16	11	15	6937	Yoshida	dummy	0	2006/9/16/5:22:39(130.34.95.43)	0
16	22	24	6898	settsu	dummy	0	2006/9/16/10:39:25(172.16.44.140)	Ta sputter
16	36	42	6898	settsu	dummy	0	2006/9/16/13:50:44(130.34.95.28)	Ta sputter
19	28	36	6936	kikuchi	dummy	0	2006/9/18/18:52:54(130.34.95.43)	0
20	20	32	6936	Kentaro IWAMI	dummy	0	2006/9/19/17:35:6(130.34.95.43)	Change to 1. ZnO, 3. Ti, 5. Pt
20	32	40	6936	Kentaro IWAMI	dummy	0	2006/9/19/17:42:1(130.34.95.43)	0
19	46	48	6898	yamaya	dummy	0	2006/9/19/19:46:28(130.34.95.28)	0
20	0	14	6898	yamaya	dummy	0	2006/9/19/19:47:20(130.34.95.28)	change 3→Ta
20	14	20	6898	yamaya	dummy	0	2006/9/19/19:47:42(130.34.95.28)	Ta R.T.
20	40	46	6898	hirano(hirosaki Univ.)	dummy	0	2006/9/19/21:19:32(130.34.95.28)	TiN
-21	32	40	4404	Lee	dummy	0	2006/9/20/12:6:19(130.34.248.216)	Ti @ RT	2006/9/20/12:6:50(130.34.248.216)
21	30	40	4404	Lee	dummy	0	2006/9/20/12:8:13(130.34.248.216)	Ti @ RT
-20	46	48	6898	yamaya	dummy	0	2006/9/20/17:54:38(130.34.95.28)	Target change ZnO → Ta	2006/9/20/18:40:20(130.34.95.28)
21	0	14	6898	yamaya	dummy	0	2006/9/20/17:55:2(130.34.95.28)	Target change ZnO → Ta
21	24	30	6898	yamaya	dummy	0	2006/9/20/17:56:6(130.34.95.28)	Ta R.T.
21	40	44	6898	sakomizu	dummy	0	2006/9/20/18:56:6(130.34.95.28)	Ti/Pt 300℃
-22	0	16	6898	sakomizu	dummy	0	2006/9/20/19:13:36(130.34.95.28)	Target change[1:Ta→Cu][3:Ti→Ta][5:Pt]	2006/9/22/2:29:15(130.34.95.28)
20	46	48	6898	hirano(hirosaki Univ.)	dummy	0	2006/9/20/19:15:33(172.16.44.140)	0
-22	24	28	6898	sakomizu	dummy	0	2006/9/20/19:19:38(130.34.95.28)	Ta/Cu 300℃	2006/9/20/19:20:12(130.34.95.28)
-22	24	28	6898	sakomizu	dummy	0	2006/9/20/19:20:47(130.34.95.28)	Ta/Cu R.T	2006/9/21/22:8:53(130.34.95.28)
-22	28	31	6898	kato	dummy	0	2006/9/21/14:19:27(130.34.95.28)	0	2006/9/21/14:19:35(130.34.95.28)
-22	28	31	6898	kato	dummy	0	2006/9/21/14:20:20(130.34.95.28)	Ti@70℃	2006/9/21/19:0:58(130.34.95.28)
21	44	48	6898	sakomizu	dummy	0	2006/9/21/21:55:55(130.34.95.28)	Ti/Pt 300℃
-22	30	34	6898	sakomizu	dummy	0	2006/9/21/22:10:53(130.34.95.28)	0	2006/9/21/22:10:58(130.34.95.28)
22	30	34	6898	sakomizu	dummy	0	2006/9/21/22:11:24(130.34.95.28)	Ta/Cu R.T
22	0	7	6898	sakomizu	dummy	0	2006/9/20/19:13:36(130.34.95.28)	Target change[1:Ta→Cu][3:Ti→Ta][5:Pt]
22	7	22	6898	sakomizu	dummy	0	2006/9/22/2:32:49(130.34.95.28)	Target change[1:Ta][3:Ti→Cu][5:Pt]」
22	22	30	6898	sakomuzu	dummy	0	2006/9/22/5:0:50(130.34.95.28)	Target change
23	26	30	6898	settsu	dummy	0	2006/9/22/13:8:24(130.34.95.28)	Ta sputter
22	34	36	6898	sakomizu	dummy	0	2006/9/22/16:8:37(130.34.95.28)	Ta/Cu R.T
23	20	26	6898	sakomizu	dummy	0	2006/9/22/17:51:20(130.34.95.28)	Ta/Cu R.T
-25	20	28	6937	t.sato	dummy	0	2006/9/25/9:25:30(130.34.95.43)	Cr/Cr	2006/9/25/10:12:17(130.34.95.43)
25	20	23	6937	t.sato	dummy	0	2006/9/25/9:25:30(130.34.95.43)	Cr/Cr
-26	20	24	5251	A. Yasui	dummy	0	2006/9/25/10:16:0(130.34.95.8)	0	2006/9/26/9:45:55(130.34.95.8)
25	23	30	6937	t.sato	dummy	0	2006/9/25/11:31:0(172.16.44.142)	Cu
25	38	42	6937	H.Matsuo	dummy	1	2006/9/25/18:48:13(172.16.44.140)	Shultz Gage Replace
26	20	22	5251	A. Yasui	dummy	0	2006/9/25/10:16:0(130.34.95.8)	0
26	22	34	5251	A. Yasui	dummy	0	2006/9/26/9:56:40(130.34.95.8)	ターゲット交換
27	44	48	6937	Kawai	dummy	0	2006/9/26/16:20:31(130.34.95.43)	0
27	15	20	5251	A. Yasui	dummy	0	2006/9/26/16:20:52(130.34.95.43)	0
28	0	16	6936	Kawai	dummy	0	2006/9/26/16:21:58(130.34.95.43)	Target change 1. Au->PZT
28	20	24	6937	Kawai	dummy	0	2006/9/26/16:22:27(130.34.95.43)	0
28	28	32	6937	Kawai	dummy	0	2006/9/26/16:22:58(130.34.95.43)	315 deg C
28	36	40	6936	Kawai	dummy	0	2006/9/26/16:23:19(130.34.95.43)	0
27	22	26	5251	A. Yasui	dummy	0	2006/9/27/8:55:54(172.16.44.142)	0
27	26	32	5251	A. Yasui	dummy	0	2006/9/27/9:24:33(130.34.95.8)	0
27	32	34	5251	A. Yasui	dummy	0	2006/9/27/15:16:40(172.16.44.142)	0
28	32	36	5251	Jiun-Jie, Chen	dummy	0	2006/9/27/21:15:2(130.34.95.8)	0
28	44	48	6898	sakomizu	dummy	0	2006/9/27/21:34:42(130.34.95.28)	0
-29	0	16	6898	sakomizu	dummy	0	2006/9/27/21:38:5(130.34.95.28)	Target change　[1:PZT][3:Ti→Ta][5:Pt→Cu]	2006/9/29/4:28:17(172.16.44.140)
-29	18	24	6898	sakomizu	dummy	0	2006/9/27/21:46:51(130.34.95.28)	Ta/Cu R.T	2006/9/29/3:32:38(130.34.95.28)
-29	16	24	6898	sakomizu	dummy	0	2006/9/29/3:33:46(130.34.95.28)	Target change　[1:PZT][3:Ti→Ta][5:Pt→Cu]	2006/9/29/4:28:34(172.16.44.140)
29	24	30	6898	sakomizu	dummy	0	2006/9/29/3:34:42(130.34.95.28)	Ta/Cu R.T
29	0	11	6898	sakomizu	dummy	0	2006/9/27/21:38:5(130.34.95.28)	Target change　[1:PZT][3:Ti→Ta][5:Pt→Cu]
29	11	24	6898	sakomizu	dummy	0	2006/9/29/4:29:23(172.16.44.140)	Target change　[1:PZT→Cu][3:Ti→Ta][5:Pt]
29	30	34	6898	sakomizu	dummy	0	2006/9/29/14:51:40(130.34.95.28)	Ta/Cu R.T
29	42	44	6898	sakomizu	dummy	0	2006/9/29/20:18:48(130.34.95.28)	Ta/Cu R.T