-1 20 24 6937 Andrew dummy 0 2006/7/31/14:57:29(130.34.95.43) Cr/Au at 170 C 2006/8/1/1:55:50(130.34.95.43) -3 40 48 6937 Andrew dummy 0 2006/7/31/14:58:13(130.34.95.43) Shut Down 2006/7/31/15:0:37(130.34.95.43) 3 40 48 6937 Andrew dummy 0 2006/7/31/15:1:19(130.34.95.43) Shut down for power down. Will start back up next week. -1 30 34 5251 Mike dummy 0 2006/7/31/15:15:16(130.34.95.8) Cr/Au @ R.T. 2006/8/1/14:24:47(130.34.95.8) -1 36 40 6937 hashimoto dummy 0 2006/7/31/17:49:37(130.34.95.43) Cr/Au at 170C 2006/8/1/14:24:37(130.34.95.8) 1 20 24 6937 Andrew dummy 0 2006/8/1/1:56:26(130.34.95.43) Maitnence 2 28 37 7122 Ryosuke Nomura dummy 0 2006/8/1/10:26:27(130.34.75.252) Au R.T. 1 30 31 5251 Mike dummy 0 2006/7/31/15:15:16(130.34.95.8) Cr/Au @ R.T. -1 36 40 5251 Mike dummy 0 2006/8/1/14:26:1(130.34.95.8) Ti/Pt @R.T. 2006/8/1/14:27:4(130.34.95.8) 1 36 40 5251 Mike dummy 0 2006/8/1/14:27:40(130.34.95.8) Ti/Au @R.T. -2 20 26 6937 hashimoto dummy 0 2006/8/1/16:47:56(130.34.95.43) target change Au/Cr 2006/8/1/16:56:57(130.34.95.43) 1 40 44 6937 hashimoto dummy 0 2006/8/1/16:55:52(130.34.95.43) target change Cr/Au 2 20 26 6937 hashimoto dummy 0 2006/8/1/16:58:23(130.34.95.43) Cr/Au 2 26 28 6937 Andrew dummy 0 2006/8/1/16:59:13(130.34.95.43) Cr/Au 170 2 38 42 6937 hashimoto dummy 0 2006/8/2/12:13:1(172.16.44.138) Cr/Au at 170℃ 3 26 30 5251 Mike dummy 0 2006/8/2/21:47:25(130.34.95.8) Cr/Au @R.T. 3 34 40 6937 Andrew dummy 0 2006/8/2/22:3:15(130.34.95.43) Shutdown 8 30 34 5251 Mike dummy 0 2006/8/7/17:49:27(130.34.95.8) Cr/Au @ R.T. 9 26 30 4771 MIYASHITA dummy 0 2006/8/8/10:40:39(130.34.95.21) Cr,Au スパッタ 9 40 48 6937 Kurahashi dummy 0 2006/8/9/14:2:22(130.34.95.43) target change -> W 10 26 30 6937 Kurahashi dummy 0 2006/8/9/14:2:58(130.34.95.43) W sputter 10 36 46 6937 H.Matsuo dummy 1 2006/8/9/18:56:14(130.34.95.43) Magnet replace of No5 target 11 18 28 6937 H.Matsuo dummy 1 2006/8/9/18:57:19(130.34.95.43) Magnet replace of No5 target 10 30 36 6937 H.Matsuo dummy 1 2006/8/10/13:3:44(130.34.95.43) Magnet replace of No5 target 10 32 36 7122 K.Tago dummy 0 2006/8/10/13:6:19(130.34.198.5) Au sputter -11 28 44 6937 Kurahashi dummy 0 2006/8/10/15:13:32(130.34.95.43) W sputter 2006/8/11/13:36:40(130.34.95.43) 11 28 30 6937 Kurahashi dummy 0 2006/8/10/15:13:32(130.34.95.43) W sputter 20 42 48 6898 settsu dummy 0 2006/8/19/20:56:4(130.34.95.28) Target change Cr→Ta 21 0 10 6898 settsu dummy 0 2006/8/19/20:56:37(130.34.95.28) Target change Cr→Ta 21 26 32 6898 settsu dummy 0 2006/8/19/20:59:39(130.34.95.28) Ta sputter -24 26 32 6937 Randle dummy 0 2006/8/22/10:28:13(130.34.95.43) Maintnence 2006/8/22/10:48:55(130.34.95.43) 23 26 32 6937 Randles dummy 0 2006/8/22/10:49:11(130.34.95.43) 0 -23 36 44 6937 H.Matsuo dummy 0 2006/8/23/17:53:4(130.34.95.43) Test for No5 Terget 2006/8/23/19:33:14(172.16.44.140) 23 36 42 6937 H.Matsuo dummy 0 2006/8/23/17:53:4(130.34.95.43) Test for No5 Terget 23 42 46 6937 H.Matsuo dummy 1 2006/8/23/19:34:51(172.16.44.140) Target Change Ta->Ti 24 19 24 6937 H.Matsuo dummy 0 2006/8/23/20:33:32(130.34.95.43) Ti/Pt @ 315℃ 25 20 24 6936 kawai dummy 0 2006/8/25/9:29:54(130.34.95.43) Ti-Pt@315C -25 44 48 6898 settsu dummy 0 2006/8/25/10:43:43(130.34.95.28) target change Pt→Ta 2006/8/25/10:52:20(130.34.95.28) -26 0 10 6898 settsu dummy 0 2006/8/25/10:44:59(130.34.95.28) target change Pt→Ta 2006/8/25/10:53:41(130.34.95.28) 26 18 24 6898 settsu dummy 0 2006/8/25/10:46:6(130.34.95.28) Ta sputter 25 44 48 6898 settsu dummy 0 2006/8/25/10:53:22(130.34.95.28) Target change w→Ta 26 0 10 6898 settsu dummy 0 2006/8/25/10:54:6(130.34.95.28) Target change w→Ta 26 34 38 6898 settsu dummy 0 2006/8/26/16:52:1(130.34.91.196) Ta sputter 28 32 36 6937 H.Matsuo dummy 0 2006/8/28/16:2:32(172.16.44.140) Ti/Pt @315℃ 28 40 44 6937 H.Matsuo dummy 1 2006/8/28/17:37:13(172.16.44.140) No3 Sample Holder Remove -30 38 44 7124 T.Isogai dummy 0 2006/8/29/13:47:12(130.34.75.68) Pt at room temperature(naisen 3977) 2006/8/30/14:11:13(130.34.75.68) 29 38 42 7124 T.Isogai dummy 0 2006/8/29/15:33:55(130.34.75.68) Pt at room temperature(naisen 3977) 30 26 32 7124 T.Isogai dummy 0 2006/8/30/10:57:58(130.34.75.68) Pt at Room Temp.